Abstract: An automated gas supply system includes a gas cylinder transfer unit configured to transfer a cradle in which one or more gas cylinders storing a gas therein are stored; a gas cylinder inspection unit configured to check properties of the gas stored in the gas cylinder transferred from the gas cylinder transfer unit and check whether the gas leaks from the gas cylinder; a storage queue configured to receive the gas cylinder from the gas cylinder inspection unit by a mobile robot and configured to classify and store the transferred gas cylinders according to the properties of the gas stored in the gas cylinder; and a gas cabinet configured to receive the gas cylinder from the storage queue by the mobile robot and fasten a gas pipe, which is connected to a semiconductor manufacturing process line, to a gas spray nozzle, which is disposed at one side of the received gas cylinder, to supply the gas stored in the gas cylinder to the semiconductor manufacturing process line, wherein the gas cabinet includes a resid

Abstract: An automated gas supply system includes a gas cylinder transfer unit configured to transfer a cradle in which one or more gas cylinders storing a gas therein are stored; a gas cylinder inspection unit configured to check properties of the gas stored in the gas cylinder transferred from the gas cylinder transfer unit and check whether the gas leaks from the gas cylinder; a storage queue configured to receive the gas cylinder from the gas cylinder inspection unit by a mobile robot and configured to classify and store the transferred gas cylinders according to the properties of the gas stored in the gas cylinder; and a gas cabinet configured to receive the gas cylinder from the storage queue by the mobile robot and fasten a gas pipe, which is connected to a semiconductor manufacturing process line, to a gas spray nozzle, which is disposed at one side of the received gas cylinder, to supply the gas stored in the gas cylinder to the semiconductor manufacturing process line, wherein the gas cabinet includes a resid

Abstract: An automated gas supply system includes a gas cylinder transfer unit configured to transfer a cradle in which one or more gas cylinders storing a gas therein are stored; a gas cylinder inspection unit configured to check properties of the gas stored in the gas cylinder transferred from the gas cylinder transfer unit and check whether the gas leaks from the gas cylinder; a storage queue configured to receive the gas cylinder from the gas cylinder inspection unit by a mobile robot and configured to classify and store the transferred gas cylinders according to the properties of the gas stored in the gas cylinder; and a gas cabinet configured to receive the gas cylinder from the storage queue by the mobile robot and fasten a gas pipe, which is connected to a semiconductor manufacturing process line, to a gas spray nozzle, which is disposed at one side of the received gas cylinder, to supply the gas stored in the gas cylinder to the semiconductor manufacturing process line, wherein the gas cabinet includes a resid

Abstract: An automated gas supply system includes a gas cylinder transfer unit configured to transfer a cradle in which one or more gas cylinders storing a gas therein are stored; a gas cylinder inspection unit configured to check properties of the gas stored in the gas cylinder transferred from the gas cylinder transfer unit and check whether the gas leaks from the gas cylinder; a storage queue configured to receive the gas cylinder from the gas cylinder inspection unit by a mobile robot and configured to classify and store the transferred gas cylinders according to the properties of the gas stored in the gas cylinder; and a gas cabinet configured to receive the gas cylinder from the storage queue by the mobile robot and fasten a gas pipe, which is connected to a semiconductor manufacturing process line, to a gas spray nozzle, which is disposed at one side of the received gas cylinder, to supply the gas stored in the gas cylinder to the semiconductor manufacturing process line, wherein the gas cabinet includes a resid

Abstract: An automated gas supply system includes a gas cylinder transfer unit configured to transfer a cradle in which one or more gas cylinders storing a gas therein are stored; a gas cylinder inspection unit configured to check properties of the gas stored in the gas cylinder transferred from the gas cylinder transfer unit and check whether the gas leaks from the gas cylinder; a storage queue configured to receive the gas cylinder from the gas cylinder inspection unit by a mobile robot and configured to classify and store the transferred gas cylinders according to the properties of the gas stored in the gas cylinder; and a gas cabinet configured to receive the gas cylinder from the storage queue by the mobile robot and fasten a gas pipe, which is connected to a semiconductor manufacturing process line, to a gas spray nozzle, which is disposed at one side of the received gas cylinder, to supply the gas stored in the gas cylinder to the semiconductor manufacturing process line, wherein the gas cabinet includes a resid

Abstract: A motor velocity control apparatus and method in which the velocity of a motor to drive a joint of a robot is controlled.

Abstract: Disclosed herein are a motor control apparatus and a motor control method thereof. The motor control method includes estimating a current torque of a motor based on dynamics of a body driven by the motor, judging whether the estimated torque is higher than a predetermined torque value, compensating for a velocity profile to drive the motor from the predetermined torque value, upon judging that the estimated torque is higher than the predetermined torque value, and driving the motor using the compensated velocity profile. Thereby, the velocity profile is compensated for in real time, and thus the velocity of the motor is raised while preventing the motor from stepping out.

Abstract: Disclosed is a teaching and playback method using a redundancy resolution parameter determined in conjunction with a joint structure, for a robot, and a method to apply analytic inverse kinematics to a robot having an elbow with an offset and a computer-readable medium of controlling the same. A reference plane variable with the joint structure is generated and an angle between the reference plane and an arm plane of the robot is used as the redundancy resolution parameter. The robot is taught and its operation is played back in differential inverse kinematics or analytic inverse kinematics using the resolution redundancy parameter.

Abstract: A motor velocity control apparatus and method in which the velocity of a motor to drive a joint of a robot is controlled. The motor velocity control apparatus and method compensates for a velocity profile used to drive a motor in real time using acceleration, thus increasing a driving velocity of the motor to the maximum velocity while stably maintaining performance of the motor. Thereby, efficiency of the motor is increased, the velocity of the motor is based on the acceleration made by data obtained through experimentation and is thus more precisely and simply calculated than the conventional compensation algorithm using dynamics, and reliability in driving of the motor is assured.

Abstract: Disclosed herein are a motor control apparatus and a motor control method thereof. The motor control method includes estimating a current torque of a motor based on dynamics of a body driven by the motor, judging whether the estimated torque is higher than a predetermined torque value, compensating for a velocity profile to drive the motor from the predetermined torque value, upon judging that the estimated torque is higher than the predetermined torque value, and driving the motor using the compensated velocity profile. Thereby, the velocity profile is compensated for in real time, and thus the velocity of the motor is raised while preventing the motor from stepping out.

Abstract: Disclosed is a teaching and playback method using a redundancy resolution parameter determined in conjunction with a joint structure, for a robot, and a method to apply analytic inverse kinematics to a robot having an elbow with an offset and a computer-readable medium of controlling the same. A reference plane variable with the joint structure is generated and an angle between the reference plane and an arm plane of the robot is used as the redundancy resolution parameter. The robot is taught and its operation is played back in differential inverse kinematics or analytic inverse kinematics using the resolution redundancy parameter.

Abstract: A method and apparatus is provided whereby a shadow mask support pin can be forced into a cathode ray tube panel without having to use any panel support post. Three or four support pads are utilized to support the bottom edge of the skirt portion of the panel. Each of the support pads may be elevationally moved by a drive unit. First through fourth distance sensors serve to detect the height of corner points on the interior surface of the panel face portion. A control device is adapted to control the operation of the drive unit in a manner that the corner points are brought into a predetermined reference plane before the support pin insertion proceeds. A fifth distance sensor may be further employed to detect the height of a center point.