Abstract: A system and method for job queue management. A job queue management apparatus acquires multiple wafer lot records individually regarding a plurality of wafers processed by a recipe, clusters the wafer lots by the common recipe into a group, creates a process job corresponding to the group, and stores the process job in a job queue of a fabrication tool.

Abstract: Provided are a system and method for automatically tracking a lot being moved between first and second manufacturing lines during semiconductor manufacturing. In one example, the method includes assigning a first state to the lot to indicate the lot's presence in the first manufacturing line. A trigger event indicating that the lot has been moved to the second manufacturing line may be identified, and a second state may be determined for the lot to reflect the lot's presence in the second manufacturing line. The second state may then be assigned to the lot.

Abstract: A system and method for carrier transport traffic management. A host computer connects to a fabrication tool, configured to acquire an available number of a resource type for the fabrication tool upon detecting a fabrication tool loadport of the fabrication tool is available. A material transport system connects to the host computer, receives the available number of a resource type for the fabrication tool, acquires a carrier identity corresponding to a carrier, acquires a required number of the resource type corresponding to the carrier, and issues a load command to an automated material handling system (AMHS) to transport the carrier to the fabrication tool if the available number of the resource type exceeds or equals to the required number of the resource type.

Abstract: Provided are a system and method for automatically tracking a lot being moved between first and second manufacturing lines during semiconductor manufacturing. In one example, the method includes assigning a first state to the lot to indicate the lot's presence in the first manufacturing line. A trigger event indicating that the lot has been moved to the second manufacturing line may be identified, and a second state may be determined for the lot to reflect the lot's presence in the second manufacturing line. The second state may then be assigned to the lot.

Abstract: A system and method for job queue management. A job queue management apparatus acquires multiple wafer lot records individually regarding a plurality of wafers processed by a recipe, clusters the wafer lots by the common recipe into a group, creates a process job corresponding to the group, and stores the process job in a job queue of a fabrication tool.

Abstract: A system and method for carrier transport traffic management. A host computer connects to a fabrication tool, configured to acquire an available number of a resource type for the fabrication tool upon detecting a fabrication tool loadport of the fabrication tool is available. A material transport system connects to the host computer, receives the available number of a resource type for the fabrication tool, acquires a carrier identity corresponding to a carrier, acquires a required number of the resource type corresponding to the carrier, and issues a load command to an automated material handling system (AMHS) to transport the carrier to the fabrication tool if the available number of the resource type exceeds or equals to the required number of the resource type.