Patents by Inventor Kinya AMADA

Kinya AMADA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • REDUCED ZINC SHOWERHEAD
    Publication number: 20150000597
    Abstract: Embodiments described herein generally relate to an aluminum alloy showerhead with a reduced zinc content for use in semiconductor processing chambers. The showerhead may be utilized in processing chambers adapted for making low temperature polysilicon (LTPS) liquid crystal displays (LCD) or LTPS organic light emitting diode (OLED) displays which may be controlled by thin film transistors (TFT). More specifically, embodiments described herein relate to a reduced zinc showerhead.
    Type: Application
    Filed: September 26, 2013
    Publication date: January 1, 2015
    Applicant: Applied Materials, Inc.
    Inventors: Nishil NAMBIAR, Kinya AMADA