Abstract: An oven apparatus including wall members which constitute an oven wall defining internal and external regions of an oven and partition walls forming oven compartments within the oven by defining internal and external regions thereof, the wall members including an inner wall panel facing an internal side of the oven or oven compartment, an outer wall panel facing the external side of the oven or oven compartment, and thermal insulation installed between the inner and outer wall panels, wherein a sealable ventilation port is formed on the inner wall panel, a sealable suction port is formed on the outer wall panel, and a suction-generator is connected to the suction port for evacuating the atmosphere within the wall member.

Abstract: A glass panel assembly sealing method and sealing process furnace used therewith wherein coordinated control of temperature and pressure enables the removal of impure gas and the like from the glass panel assembly and reduces the amount of residual impure gas and the like remaining in the glass panel assembly after the sealing process is complete. A seal frit is applied between two mutually overlaid glass substrates comprising a glass panel assembly. The internal temperature of the glass panel assembly is raised, through a forcefully circulated environment, to a preliminary temperature T1 which is near the initial melting temperature of the seal frit. The pressure (P1) of the internal environment is then reduced while the preliminary temperature is maintained. The temperature is then increased from the preliminary temperature up to the sealing temperature T2 by the forcefully circulated environment, after which the glass panel assembly is cooled by the forceful circulated environment.

Abstract: The system includes a closed loop process line, multiple carts which traverse the process line, a substrate magazine installed to each cart, evacuation tube connectors (each holding an evacuation tube) installed to each cart, an evacuation unit installed to each cart to connect with the evacuation tube connector, a heat treating oven in which a sealing and evacuation process is conducted, a loading-unloading station provided at the process line, substrate and evacuation tube delivery conveyors, control data driven robots provided at the loading-unloading station, a panel discharge conveyor which removes panels from the loading-unloading station, and robot controllers which actuate the robots.

Abstract: An oven apparatus including wall members which constitute an oven wall defining internal and external regions of an oven and partition walls forming oven compartments within the oven by defining internal and external regions thereof, the wall members including an inner wall panel facing an internal side of the oven or oven compartment, an outer wall panel facing the external side of the oven or oven compartment, and thermal insulation installed between the inner and outer wall panels, wherein a sealable ventilation port is formed on the inner wall panel, a sealable suction port is formed on the outer wall panel, and a suction-generator is connected to the suction port for evacuating the atmosphere within the wall member.

Abstract: To provide a glass panel assembly sealing method and sealing process furnace used therewith wherein coordinated control of temperature and pressure enables the removal of impure gas and the like from the glass panel assembly and reduces the amount of residual impure gas and the liked remaining in the glass panel assembly after the sealing process is complete. Means A seal frit is applied between two mutually overlaid glass substrates comprising a glass panel assembly. The internal temperature of the glass panel assembly is raised, through a forcefully circulated environment, to a preliminary temperature T1 which is near the initial melting temperature of the seal frit. The pressure (P1) of the internal environment is then reduced while the preliminary temperature is maintained. The temperature is then increased from the preliminary temperature up to the sealing temperature T2 by the forcefully circulated environment, after which the glass panel assembly is cooled by the forceful circulated environment.

Abstract: A gas-cooled single-chamber type heat-treating furnace T in which cooling gas vents 9A and 9B opened and closed by doors 11A and 11B are provided on each of mutually opposed walls of an inner chamber 5 forming a processing room and cooling gas is circulated by opening the cooling gas vents 9A and 9B during gas cooling, wherein the cooling gas vents 9A and 9B of the inner chamber 5 are provided with lattice-shaped flow uniforming members 19 made of heat-resisting materials.

Abstract: A gas-cooled single-chamber type heat-treating furnace T in which cooling gas vents 9A and 9B opened and closed by doors 11A and 11B are provided on each of mutually opposed walls of an inner chamber 5 forming a processing room and cooling gas is circulated by opening the cooling gas vents 9A and 9B during gas cooling, wherein the cooling gas vents 9A and 9B of the inner chamber 5 are provided with lattice-shaped flow uniforming members 19 made of heat-resisting materials.

Abstract: The invention provides a vacuum coating forming device for forming a thin-film coating by a plasma beam on a substrate arranged in a vacuum chamber, the vacuum coating forming device being provided with a pressure gradient type plasma gun for generating the plasma beam toward the vacuum chamber and a converging coil which is provided so as to surround a short-tube portion of the vacuum chamber projecting toward an outlet of the plasma gun and which reduces a cross section of the plasma beam. This vacuum coating forming device further comprises an insulating tube provided at the outlet so as to surround the plasma beam and project in electric floating state, and an electron return electrode which surrounds the insulating tube within the short-tube portion and which is higher in electric potential than the outlet.