Patents by Inventor Kiraku Kozuka

Kiraku Kozuka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for producing non-monocrystalline semiconductor device and apparatus therefor
    Patent number: 5324360
    Abstract: An apparatus for producing a non-monocrystalline semiconductor device having two film forming chambers. The apparatus has means for transferring a substrate from one film forming chamber to the other film forming chamber while maintaining the first film forming chamber in a plasma atmosphere.
    Type: Grant
    Filed: May 20, 1992
    Date of Patent: June 28, 1994
    Assignee: Canon Kabushiki Kaisha
    Inventor: Kiraku Kozuka