Patents by Inventor Kiran Giriyapura

Kiran Giriyapura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Carrier head with composite plastic portions
    Patent number: 10052739
    Abstract: A chemical mechanical polishing head includes a base assembly that includes at least one component formed of a composite plastic having a tensile modulus approximately equal to or greater than aluminum, a retaining ring secured to the base assembly, and a flexible membrane secured to the base assembly to form a pressurizable chamber between the base assembly and an upper surface of the flexible membrane. A lower surface of the flexible membrane provides a substrate mounting surface.
    Type: Grant
    Filed: July 27, 2012
    Date of Patent: August 21, 2018
    Assignee: Applied Materials, Inc.
    Inventors: Manoj A. Gajendra, Kiran Giriyapura
  • CARRIER HEAD WITH COMPOSITE PLASTIC PORTIONS
    Publication number: 20130065495
    Abstract: A chemical mechanical polishing head includes a base assembly that includes at least one component formed of a composite plastic having a tensile modulus approximately equal to or greater than aluminum, a retaining ring secured to the base assembly, and a flexible membrane secured to the base assembly to form a pressurizable chamber between the base assembly and an upper surface of the flexible membrane. A lower surface of the flexible membrane providing a substrate mounting surface.
    Type: Application
    Filed: July 27, 2012
    Publication date: March 14, 2013
    Inventors: Manoj A. Gajendra, Kiran Giriyapura