Patents by Inventor Kirk Liebscher

Kirk Liebscher has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Small batch polishing fluid delivery for CMP
    Patent number: 11772234
    Abstract: In one embodiment, a fluid delivery apparatus includes a vessel body having a first chamber and a second chamber disposed therein, a plurality of first delivery lines fluidly coupled to the first chamber, a dispense nozzle fluidly coupled to the second chamber, a second delivery line fluidly coupled to the second chamber, and a valve disposed between the first and second chambers. Here, fluid communication between the first chamber and the second chamber is controlled by the valve disposed therebetween. Polishing fluid components are flowed into the first chamber through the plurality of first delivery lines fluidly coupled thereto to form a batch of polishing fluid. Once formed, the batch of polishing fluid is transferred to the second chamber by opening the valve.
    Type: Grant
    Filed: February 27, 2020
    Date of Patent: October 3, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Robert D. Tolles, Kirk Liebscher
  • SMALL BATCH POLISHING FLUID DELIVERY FOR CMP
    Publication number: 20210122008
    Abstract: In one embodiment, a fluid delivery apparatus includes a vessel body having a first chamber and a second chamber disposed therein, a plurality of first delivery lines fluidly coupled to the first chamber, a dispense nozzle fluidly coupled to the second chamber, a second delivery line fluidly coupled to the second chamber, and a valve disposed between the first and second chambers. Here, fluid communication between the first chamber and the second chamber is controlled by the valve disposed therebetween. Polishing fluid components are flowed into the first chamber through the plurality of first delivery lines fluidly coupled thereto to form a batch of polishing fluid. Once formed, the batch of polishing fluid is transferred to the second chamber by opening the valve.
    Type: Application
    Filed: February 27, 2020
    Publication date: April 29, 2021
    Inventors: Robert D. TOLLES, Kirk LIEBSCHER
  • Laser system for processing solar wafers in a carrier
    Patent number: 8173473
    Abstract: An apparatus and method for processing the solar cell substrates is provided. In one embodiment, a laser firing chamber for processing solar cell substrates placed in a carrier, comprising a laser module located at a side of the carrier, the laser module being adapted to generate and direct multiple laser beams over an entire surface of a plurality of solar cell substrates, and a transport adapted to convey the carrier through an outputting region of the laser beams.
    Type: Grant
    Filed: September 27, 2010
    Date of Patent: May 8, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Derek Aqui, Steven M. Zuniga, Venkateswaran Subbaraman, Kirk Liebscher, John Alexander, Zhenhua Zhang, Virendra V. S. Rana
  • LASER SYSTEM FOR PROCESSING SOLAR WAFERS IN A CARRIER
    Publication number: 20110076847
    Abstract: An apparatus and method for processing the solar cell substrates is provided. In one embodiment, a laser firing chamber for processing solar cell substrates placed in a carrier, comprising a laser module located at a side of the carrier, the laser module being adapted to generate and direct multiple laser beams over an entire surface of a plurality of solar cell substrates, and a transport adapted to convey the carrier through an outputting region of the laser beams.
    Type: Application
    Filed: September 27, 2010
    Publication date: March 31, 2011
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Derek Aqui, Steven M. Zuniga, Venkateswaran Subbaraman, Kirk Liebscher, John Alexander, Zhenhua Zhang, Virendra V.S. Rana