Patents by Inventor Kirkwood H. Rough
Kirkwood H. Rough has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 8427185Abstract: A method of inline inspection of photovoltaic material for electrical anomalies. A first electrical connection is formed to a first surface of the photovoltaic material, and a second electrical connection is formed to an opposing second surface of the photovoltaic material. A localized current is induced in the photovoltaic material and properties of the localized current in the photovoltaic material are sensed using the first and second electrical connections. The properties of the sensed localized current are analyzed to detect the electrical anomalies in the photovoltaic material.Type: GrantFiled: February 10, 2011Date of Patent: April 23, 2013Assignee: KLA-Tencor CorporationInventors: George H. Zapalac, Jr., Kirk J. Bertsche, David L. Brown, J. Kirkwood H. Rough, David A. Soltz, Yehiel Gotkis
-
Publication number: 20110133750Abstract: A method of inline inspection of photovoltaic material for electrical anomalies. A first electrical connection is formed to a first surface of the photovoltaic material, and a second electrical connection is formed to an opposing second surface of the photovoltaic material. A localized current is induced in the photovoltaic material and properties of the localized current in the photovoltaic material are sensed using the first and second electrical connections. The properties of the sensed localized current are analyzed to detect the electrical anomalies in the photovoltaic material.Type: ApplicationFiled: February 10, 2011Publication date: June 9, 2011Applicant: KLA-TENCOR CORPORATIONInventors: George H. Zapalac, JR., Kirk J. Bertsche, David L. Brown, J. Kirkwood H. Rough, David A. Soltz, Yehiel Gotkis
-
Patent number: 7906972Abstract: A method of inline inspection of photovoltaic material for electrical anomalies. A first electrical connection is formed to a first surface of the photovoltaic material, and a second electrical connection is formed to an opposing second surface of the photovoltaic material. A localized current is induced in the photovoltaic material and properties of the localized current in the photovoltaic material are sensed using the first and second electrical connections. The properties of the sensed localized current are analyzed to detect the electrical anomalies in the photovoltaic material.Type: GrantFiled: December 4, 2009Date of Patent: March 15, 2011Assignee: KLA-Tencor CorporationInventors: George H. Zapalac, Jr., Kirk J. Bertsche, David L. Brown, J. Kirkwood H. Rough, David A. Soltz, Yehiel Gotkis
-
Publication number: 20100079147Abstract: A method of inline inspection of photovoltaic material for electrical anomalies. A first electrical connection is formed to a first surface of the photovoltaic material, and a second electrical connection is formed to an opposing second surface of the photovoltaic material. A localized current is induced in the photovoltaic material and properties of the localized current in the photovoltaic material are sensed using the first and second electrical connections. The properties of the sensed localized current are analyzed to detect the electrical anomalies in the photovoltaic material.Type: ApplicationFiled: December 4, 2009Publication date: April 1, 2010Applicant: KLA-TENCOR CORPORATIONInventors: George H. Zapalac, Jr., Kirk J. Bertsche, David L. Brown, J. Kirkwood H. Rough, David A. Soltz, Yehiel Gotkis
-
Patent number: 7649365Abstract: A method of inline inspection of photovoltaic material for electrical anomalies. A first electrical connection is formed to a first surface of the photovoltaic material, and a second electrical connection is formed to an opposing second surface of the photovoltaic material. A localized current is induced in the photovoltaic material and properties of the localized current in the photovoltaic material are sensed using the first and second electrical connections. The properties of the sensed localized current are analyzed to detect the electrical anomalies in the photovoltaic material.Type: GrantFiled: March 24, 2007Date of Patent: January 19, 2010Assignee: KLA-Tencor CorporationInventors: George H. Zapalac, Jr., Kirk J. Bertsche, David L. Brown, J. Kirkwood H. Rough, David A. Soltz, Yehiel Gotkis
-
Patent number: 6225744Abstract: An induction plasma source for integrated circuit fabrication includes an induction coil which defines a generally convex surface. The convex surface may be in the form of a spherical section less than a hemisphere, a paraboloid, or some other smooth convex surface. The windings of the induction coil may be spaced at different intervals in different sections of the coil and may be in multiple layers in at least a portion of the coil. Varying the shape of the coil and the distribution of the coil windings allows the plasma to be shaped in a desired manner.Type: GrantFiled: February 24, 1997Date of Patent: May 1, 2001Assignee: Novellus Systems, Inc.Inventors: Jeffrey A. Tobin, Jeffrey C. Benzing, Eliot K. Broadbent, J. Kirkwood H. Rough
-
Patent number: 6037618Abstract: An integrated transistor device operates with a linear triode vacuum tube like characteristic with a very low output impedance and a large interaction between the gate and drain potentials. The drain current of a first transistor is connected directly to the source of a second transistor which has a low input impedance matching the output impedance of the first transistor. The gate of the second transistor is held at a positive potential and functions to provide isolation of the varying drain signal from the drain of the first transistor and to provide a high impedance at the output terminal. This device structure provides high input impedance, high current gain, high output impedance and a linear operating characteristic.Type: GrantFiled: February 17, 1998Date of Patent: March 14, 2000Assignee: Linear Integrated Systems, Inc.Inventors: John H. Hall, J. Kirkwood H. Rough
-
Patent number: 5648664Abstract: A BIFET vacuum tube replacement structure includes a plurality of devices that replicate the characteristics of a vacuum tube. The vacuum tube replacement structure has the same pin-out as the vacuum tube being replaced and so can be exchanged directly for a vacuum tube in an audio amplifier. The vacuum tube replacement structure is suitable for use in a wide range of audio amplifier applications without modification to the audio amplifiers. Further, there is no noticeable degradation to the human ear in the sound quality when the vacuum tube replacement structure is used in an audio amplifier in place of a vacuum tube. A unitary device that is a combination of a high impedance bipolar like transistor and a unipolar junction field effect transistor, that is referred to as a BIFET, is used in the vacuum tube replacement structure. In one embodiment, the bipolar like transistor is formed in combination with the gate of the unipolar junction field effect transistor.Type: GrantFiled: January 20, 1995Date of Patent: July 15, 1997Inventors: J. Kirkwood H. Rough, Adrian I. Cogan, Neill R. Thornton
-
Patent number: 5605599Abstract: An induction plasma source for integrated circuit fabrication includes a hemispherically shaped induction coil in an expanding spiral pattern about the vacuum chamber containing a semiconductor wafer supported by a platen. The windings of the induction coil follow the contour of a hemispherically shaped quartz bell jar, which holds the vacuum. The power source is a low frequency rf source having a frequency of about 450 KHz and a power in the range of 200-2000 Watts, and the pressure is a low pressure of about 0.1-100 mTorr. A high frequency rf source independently adjusts the bias voltage on the wafer.Type: GrantFiled: February 17, 1995Date of Patent: February 25, 1997Assignee: Novellus Systems, Inc.Inventors: Jeffrey C. Benzing, Eliot K. Broadbent, J. Kirkwood H. Rough
-
Patent number: 5578821Abstract: A method and apparatus for a charged particle scanning system and an automatic inspection system, including wafers and masks used in microcircuit fabrication. A charged particle beam is directed at the surface of a substrate for scanning that substrate and a selection of detectors are included to detect at least one of the secondary charged particles, back-scattered charged particles and transmitted charged particles from the substrate. The substrate is mounted on an x-y stage to provide at least one degree of freedom while the substrate is being scanned by the charged particle beam. The substrate is also subjected to an electric field on it's surface to accelerate the secondary charged particles. The system facilitates inspection at low beam energies on charge sensitive insulating substrates and has the capability to accurately measure the position of the substrate with respect to the charged particle beam.Type: GrantFiled: January 11, 1995Date of Patent: November 26, 1996Assignee: KLA Instruments CorporationInventors: Dan Meisberger, Alan D. Brodie, Anil A. Desai, Dennis G. Emge, Zhong-Wei Chen, Richard Simmons, Dave E. A. Smith, April Dutta, J. Kirkwood H. Rough, Leslie A. Honfi, Henry Pearce-Percy, John McMurtry, Eric Munro
-
Patent number: 5405480Abstract: An induction plasma source for integrated circuit fabrication includes a hemispherically shaped induction coil in an expanding spiral pattern about the vacuum chamber containing a semiconductor wafer supported by a platen. The windings of the induction coil follow the contour of a hemispherically shaped quartz bell jar, which holds the vacuum. The power source is a low frequency rf source having a frequency of about 450 KHz and a power in the range of 200-2000 watts, and the pressure is a low pressure of about 0.1-100 mTorr. A high frequency rf source independently adjusts the bias voltage on the wafer.Type: GrantFiled: July 11, 1994Date of Patent: April 11, 1995Assignee: Novellus Systems, Inc.Inventors: Jeffrey C. Benzing, Eliot K. Broadbent, J. Kirkwood H. Rough
-
Patent number: 5346578Abstract: An induction plasma source for integrated circuit fabrication includes a hemispherically shaped induction coil in an expanding spiral pattern about the vacuum chamber containing a semiconductor wafer supported by a platen. The windings of the induction coil follow the contour of a hemispherically shaped quartz bell jar, which holds the vacuum. The power source is a low frequency rf source having a frequency of about 450 KHz and a power in the range of 200-2000 watts, and the pressure is a low pressure of about 0.1-100 mTorr. A high frequency rf source independently adjusts the bias voltage on the wafer.Type: GrantFiled: November 4, 1992Date of Patent: September 13, 1994Assignee: Novellus Systems, Inc.Inventors: Jeffrey C. Benzing, Eliot K. Broadbent, Kirkwood H. Rough
-
Patent number: 4994637Abstract: A single turn induction coil which provides uniform sealing of lids to plastic containers. A first end of the coil overlaps a second end of the coil with the ends being tapered to form a single complete ring. An electrical current is coupled to the overlapped portions of the first and second end of the coil so the electrical current flows for more than 360.degree. around the coil. This provides an induced electrical current around a container lid adjacent to the coil and provides heating of the complete circumference of the lid. A variety of shapes of containers and matching lids can be used with the present invention.Type: GrantFiled: October 30, 1989Date of Patent: February 19, 1991Assignee: FMC CorporationInventors: Jin-Liou Fang, J. Kirkwood H. Rough
-
Patent number: 4887005Abstract: A multiple electrode plasma reactor power circuit that utilizes a power splitting device, such as a center-tapped coil, to deliver balanced power to a plurality of powered electrodes. Balanced plasmas are thereby created between powered electrodes and grounded electrodes. In a preferred embodiment a plurality of center-tapped coils are connected to deliver balanced power to several powered electrodes located in a plurality of reactor chambers.Type: GrantFiled: September 15, 1987Date of Patent: December 12, 1989Inventors: J. Kirkwood H. Rough, Peter W. Rose
-
Patent number: 4691239Abstract: The processing of video signal information derived from scanning the characters or marks on a background sheet includes normalizing the signal levels against changes in operating conditions and dynamically altering the threshold level of the video signal in response to the changes in levels of video signal.Type: GrantFiled: December 23, 1982Date of Patent: September 1, 1987Inventors: Martin N. Nelson, J. Kirkwood H. Rough
-
Patent number: 4654573Abstract: Apparatus for transferring electrical power between a power supplying apparatus and power consuming apparatus and having a separable high frequency transformer with a primary permanently mounted to the power supply apparatus and a secondary mounted about the power consuming apparatus. A charging control circuit mounted on the consuming apparatus, e.g. a mobile vehicle includes means for detecting current and voltage delivered through the transformer, and also for monitoring storage batteries within the vehicle. The power supply apparatus includes a power supply circuit comprising a ferrite core transformer and capacitor forming a parallel resonant circuit. The primaries of the transformer are alternately driven by a driver about opposing polarities. The drivers are controlled by a voltage-controlled pulse-width modulator which provides a square wave input to the drivers to cause them to alternatively energize the ferrite core transformer.Type: GrantFiled: May 17, 1985Date of Patent: March 31, 1987Assignee: Flexible Manufacturing Systems, Inc.Inventors: J. Kirkwood H. Rough, Michael Krolak, Michael R. Biche
-
Patent number: 4329049Abstract: A lensmeter is disclosed for determining the refractive properties of a test lens, including an optical system to produce an ellipse of light at a detecting plane having information of such properties, a scanning linear photodiode array at the detecting plane for producing video output signals, a first integrator to integrate the video output signal from each photodiode, a compensator to compensate each video output signal for the light sensitivity of each photodiode, a second integrator to integrate the compensated video signals over the range of the distribution of light of an area of the ellipse being scanned, a circuit, connected to the second integrator, to detect the median point of the distribution, and a microprocessor to provide data identifying the median point in response to the detection.Type: GrantFiled: March 6, 1980Date of Patent: May 11, 1982Assignee: Rodenstock Instruments CorporationInventors: George P. Rigg, Tom N. Cornsweet, J. Kirkwood H. Rough, H. Malcolm Ogle, Wallace R. Prunella, Lawrence H. Schiller
-
Patent number: 4247793Abstract: There is disclosed an improvement on the electric motor shown in applicant's Application Ser. No. 538,979. According to the present invention, the electrical energy is supplied to serpentine armature conductors by brush or commutator assemblies juxtaposed at the ends of the active portion of an incremented pole magnetic field assembly.Type: GrantFiled: May 2, 1975Date of Patent: January 27, 1981Assignee: Jim ZeegerInventor: J. Kirkwood H. Rough
-
Patent number: 4187453Abstract: There is disclosed a low mass, low inertia, low inductance armature motor having infinite point resolution and a high force to mass ratio. The basic configuration is a plurality of phase displaced armature windings 90.degree. phase displacement for even spaced increments and optimized linear force preferably on a non-conductive, non-magnetic substrate and sandwiched between an incremental, alternately polarized magnetic field or castellated single polarity pole structure. Each of the phase displaced windings is preferably driven by a simplified totem pole type switching circuit.Type: GrantFiled: May 11, 1976Date of Patent: February 5, 1980Assignee: Jim ZegeerInventor: J. Kirkwood H. Rough