Abstract: A microelectromechanical (MEMS) accelerometer senses linear acceleration perpendicular to a MEMS device plane of the MEMS accelerometer based on a rotation of a proof mass out-of-plane about a rotational axis. A symmetry axis is perpendicular to the rotational axis. The proof mass includes a symmetric portion that is symmetric about the symmetry axis and that is contiguous with an asymmetric portion that is asymmetric about the symmetry axis.

Abstract: A MEMS sensor includes a MEMS layer, a cap layer, and a substrate layer. The MEMS layer includes a suspended spring-mass system that moves in response to a sensed inertial force. The suspended spring-mass system is suspended from one or more anchors. The anchors are coupled to each of the cap layer and the substrate layer by anchoring components. The anchoring components are offset such that a force applied to the cap layer or the substrate layer causes a rotation of the anchor and such that the suspended spring-mass system substantially remains within the original MEMS layer.

Abstract: A MEMS sensor includes a MEMS layer, a cap layer, and a substrate layer. The MEMS layer includes a suspended spring-mass system that moves in response to a sensed inertial force. The suspended spring-mass system is suspended from one or more anchors. The anchors are coupled to each of the cap layer and the substrate layer by anchoring components. The anchoring components are offset such that a force applied to the cap layer or the substrate layer causes a rotation of the anchor and such that the suspended spring-mass system substantially remains within the original MEMS layer.

Abstract: A microelectromechanical (MEMS) accelerometer senses linear acceleration perpendicular to a MEMS device plane of the MEMS accelerometer based on a rotation of a proof mass out-of-plane about a rotational axis. A symmetry axis is perpendicular to the rotational axis. The proof mass includes a symmetric portion that is symmetric about the symmetry axis and that is contiguous with an asymmetric portion that is asymmetric about the symmetry axis.

Abstract: An internet gaming system includes a core platform, and a vertical extension functionality configured with the core platform and having a first application programming interface. A plurality of game specific modules are provided with a hardware and software configuration to conduct different respective Internet-based games with players via an Internet lottery site, with each game specific module including a dedicated second application programming interface. Input/output data between the core platform and the game specific modules occurs only through the first and second application programming interfaces. A secure game outcome generator has a hardware and software configuration to determine a game outcome for each game played via the system and is linked to the core platform via a secure interface with the vertical extension.

Abstract: An internet gaming system includes a core platform, and a vertical extension functionality configured with the core platform and having a first application programming interface. A plurality of game specific modules are provided with a hardware and software configuration to conduct different respective Internet-based games with players via an Internet lottery site, with each game specific module including a dedicated second application programming interface. Input/output data between the core platform and the game specific modules occurs only through the first and second application programming interfaces. A secure game outcome generator has a hardware and software configuration to determine a game outcome for each game played via the system and is linked to the core platform via a secure interface with the vertical extension.

Abstract: The present invention provides a proportional microvalve having a first, second and third layer, and having high aspect ratio geometries. The first layer defines a cavity with inlet and outlet ports. The second layer, doped to have a low resistivity and bonded between the first and third layers, defines a cavity having a flow area to permit fluid flow between the inlet and outlet ports. The second layer further defines an actuatable displaceable member, and one or more thermal actuators for actuating the displaceable member to a position between and including an open and a closed position to permit or occlude fluid flow. The third layer provides one wall of the cavity and provides electrical contacts for electrically heating the thermally expandable actuators. The thermal actuators and the displaceable member have high aspect ratios and are formed by deep reactive ion etching such that they are displaceable in the plane of the second layer while being very stiff out of the plane.

Abstract: A device includes first and second supports, a rotatable body and first and second flexible members. The first flexible member extends between the first support and a first position on the rotatable body. The second flexible member extends between the second support and a second position on the rotatable body. At least one of the supports is capable of linear movement in a first direction with respect to the other. The first position is offset from the second position in a second direction orthogonal to the first direction.

Abstract: A semiconductor structure with electrically isolated sidewall electrodes on one or more sides of the structure and a method for fabricating the structure are disclosed. The electrically isolated sidewall electrodes are composed of silicon-based conductive material, e.g., doped polysilicon, which allows the electrodes to be formed on one or more sides of the semiconductor structure by using stop-on-oxide deep reactive-ion etching (DRIE). The electrically isolated sidewall electrodes allow the semiconductor structure to generate electrostatic forces between a side surface of the semiconductor structure and a side surface of a similar semiconductor structure. Thus, the semiconductor structure may be used as a part of an electrostatic actuator in a microelectromechanical system (MEMS) device.