Abstract: A method for adjusting a position of a substrate, includes: acquiring primary positional data indicating the positions of the edge portions (S31); acquiring secondary positional data indicating the positions of the edge portions after a stage has been moved (S33); calculating, using the primary positional data and the secondary positional data, difference amounts between the positions of the edge portions before the stage has been moved and the positions of the edge portions after the stage has been moved; and calculating an optical magnification ratio of each of the edge portions from each of the difference amounts and an amount of movement of the stage and correcting each of the positions of the edge portions of the primary positional data based on the calculated optical magnification ratio of each of the edge portions, thereby acquiring corrected positional data (S34).