Abstract: A humidity control device in a process space allows each process space to satisfy a unique humidity condition and includes an injection module arranged in a second process space maintained at second humidity lower than first humidity within a first process space in which processing for a wafer is performed and configured to inject a gas for forming an air curtain onto a first door through which the wafer enters and exits and which is connected to the second process space, a signal generation module configured to generate an injection signal for the injection module to inject the gas, and an injection control module configured to, when the injection signal is generated, control the injection module to form the air curtain lowering an amount of humidity flowing into the second process space through a space opened by the first door by injecting the gas.

Abstract: A transfer part may move the first substrate and the second substrate such that the first substrate and the second substrate are overlapped with each other when the transport transfers the first substrate and the second substrate. The detection part may detect a first position of the first substrate and a first position of the second substrate at points apart from a reference point where the first substrate and the second substrate are overlapped by first distances, and may detect respective second positions at points apart from the reference point by second distances. A control part may control movements of the first and the second substrates by the transfer part based on output of the detection part.

Abstract: An apparatus for transporting a substrate includes an actuator, a robot arm, operation of which is controlled by the actuator, a robot hand including at least one intake vent having a predetermined separation distance from the supported substrate, a fixing unit that fixes the substrate supported on the robot hand, and an intake unit connected with the intake vent.

Abstract: An apparatus for transferring a substrate is provided. A unit for transferring a substrate, includes a support structure, a first hand to place the substrate, a second hand stacked with the first hand and placing the substrate, a first guide rail guiding movement of a first support rod to support the first hand in the support structure, a second guide rail guiding movement of a second support rod in the support structure to support the second hand, and a pressure reducing member reducing pressure of an exhaust fluid passage provided in the support structure. The exhaust fluid passage includes a first fluid passage communicating with the first guide rail, a second fluid passage communicating with the second guide rail, and a third fluid passage formed by combining the first fluid passage with the second fluid passage. The pressure reducing member reduces pressure of the third fluid passage.

Abstract: An apparatus for treating a substrate includes a transfer part, a first transfer robot and a second transfer robot disposed in a longitudinal direction of the transfer part, a liquid treating part disposed at one side of the transfer part to apply a liquid onto the substrate by supplying the liquid to the substrate, and a heat treating part disposed at an opposite side of the transfer part to face a first process treating part, to perform heat-treatment with respect to the substrate. The heat treating part includes a cooling transfer module to transfer the substrate between the first transfer robot and the second transfer robot and to cool the substrate.

Abstract: An apparatus for transporting a substrate includes an actuator, a robot arm, operation of which is controlled by the actuator, a robot hand including at least one intake vent having a predetermined separation distance from the supported substrate, a fixing unit that fixes the substrate supported on the robot hand, and an intake unit connected with the intake vent.

Abstract: There is disclosed a mobile terminal including a first case comprising a battery loading portion, a battery loaded in the battery loading portion, a second case coupled to the first case and configured to cover the battery, a coil antenna module arranged between the second case and the battery, and a controller electrically connected to the coil antenna module and configured to transmit and receive a signal or receive an electric power, wherein the coil antenna module includes an insulating sheet, a first coil arranged in a surface of the insulating sheet, a second coil arranged in the first coil, a third coil arranged in the second coil, and a magnetic sheet disposed on the surface of the insulating sheet, and ends of the first, second and third coils are arranged in the surface of the insulating sheet or dividedly arranged in both surfaces of the insulating sheet.

Abstract: An apparatus for transferring a substrate is provided. A unit for transferring a substrate, includes a support structure, a first hand to place the substrate, a second hand stacked with the first hand and placing the substrate, a first guide rail guiding movement of a first support rod to support the first hand in the support structure, a second guide rail guiding movement of a second support rod in the support structure to support the second hand, and a pressure reducing member reducing pressure of an exhaust fluid passage provided in the support structure. The exhaust fluid passage includes a first fluid passage communicating with the first guide rail, a second fluid passage communicating with the second guide rail, and a third fluid passage formed by combining the first fluid passage with the second fluid passage. The pressure reducing member reduces pressure of the third fluid passage.

Abstract: There is disclosed a mobile terminal including a first case comprising a battery loading portion, a battery loaded in the battery loading portion, a second case coupled to the first case and configured to cover the battery, a coil antenna module arranged between the second case and the battery, and a controller electrically connected to the coil antenna module and configured to transmit and receive a signal or receive an electric power, wherein the coil antenna module includes an insulating sheet, a first coil arranged in a surface of the insulating sheet, a second coil arranged in the first coil, a third coil arranged in the second coil, and a magnetic sheet disposed on the surface of the insulating sheet, and ends of the first, second and third coils are arranged in the surface of the insulating sheet or dividedly arranged in both surfaces of the insulating sheet.

Abstract: The present invention relates to a wireless power transmission device formed so as to wirelessly transmit power to a wireless power reception device, wherein the wireless power transmission device comprises: a first coil formed so as to transform a current into a magnetic field; and a first metal member formed so as to cover at least a portion of the first coil, and, in the present invention, the first metal member changes an emission direction of a magnetic field formed in the first coil so as to allow the power to reach the wireless power reception device which is positioned on a side surface of the wireless power transmission device.

Abstract: The present invention relates to a wireless power transmission device formed so as to wirelessly transmit power to a wireless power reception device, wherein the wireless power transmission device comprises: a first coil formed so as to transform a current into a magnetic field; and a first metal member formed so as to cover at least a portion of the first coil, and, in the present invention, the first metal member changes an emission direction of a magnetic field formed in the first coil so as to allow the power to reach the wireless power reception device which is positioned on a side surface of the wireless power transmission device.

Abstract: There is disclosed a mobile terminal including a first case comprising a battery loading portion, a battery loaded in the battery loading portion, a second case coupled to the first case and configured to cover the battery, a coil antenna module arranged between the second case and the battery, and a controller electrically connected to the coil antenna module and configured to transmit and receive a signal or receive an electric power, wherein the coil antenna module includes an insulating sheet, a first coil arranged in a surface of the insulating sheet, a second coil arranged in the first coil, a third coil arranged in the second coil, and a magnetic sheet disposed on the surface of the insulating sheet, and ends of the first, second and third coils are arranged in the surface of the insulating sheet or dividedly arranged in both surfaces of the insulating sheet.

Abstract: There is disclosed a mobile terminal including a first case comprising a battery loading portion, a battery loaded in the battery loading portion, a second case coupled to the first case and configured to cover the battery, a coil antenna module arranged between the second case and the battery, and a controller electrically connected to the coil antenna module and configured to transmit and receive a signal or receive an electric power, wherein the coil antenna module includes an insulating sheet, a first coil arranged in a surface of the insulating sheet, a second coil arranged in the first coil, a third coil arranged in the second coil, and a magnetic sheet disposed on the surface of the insulating sheet, and ends of the first, second and third coils are arranged in the surface of the insulating sheet or dividedly arranged in both surfaces of the insulating sheet.

Abstract: There is disclosed a mobile terminal including a first case comprising a battery loading portion, a battery loaded in the battery loading portion, a second case coupled to the first case and configured to cover the battery, a coil antenna module arranged between the second case and the battery, and a controller electrically connected to the coil antenna module and configured to transmit and receive a signal or receive an electric power, wherein the coil antenna module includes an insulating sheet, a first coil arranged in a surface of the insulating sheet, a second coil arranged in the first coil, a third coil arranged in the second coil, and a magnetic sheet disposed on the surface of the insulating sheet, and ends of the first, second and third coils are arranged in the surface of the insulating sheet or dividedly arranged in both surfaces of the insulating sheet.

Abstract: There is disclosed a mobile terminal including a first case comprising a battery loading portion, a battery loaded in the battery loading portion, a second case coupled to the first case and configured to cover the battery, a coil antenna module arranged between the second case and the battery, and a controller electrically connected to the coil antenna module and configured to transmit and receive a signal or receive an electric power, wherein the coil antenna module includes an insulating sheet, a first coil arranged in a surface of the insulating sheet, a second coil arranged in the first coil, a third coil arranged in the second coil, and a magnetic sheet disposed on the surface of the insulating sheet, and ends of the first, second and third coils are arranged in the surface of the insulating sheet or dividedly arranged in both surfaces of the insulating sheet.

Abstract: Disclosed is a wireless charger for a mobile terminal, by which charging can be raised irrespective of a location of a mobile terminal mounted on the wireless charger. The present invention includes a housing, a power transmitting coil provided within the housing in a manner of being spirally wound plural times, a power supply module configured to externally supply a power to the power transmitting coil, a driving unit connected to a spiral center of the power transmitting coil, a sensing unit configured to sense a location of the mobile terminal mounted on a topside of the housing, and a control unit controlling the driving unit to shift the spiral center of the power transmitting coil to the location of the mobile terminal sensed by the sensing unit.

Abstract: There is disclosed a mobile terminal including a first case comprising a battery loading portion, a battery loaded in the battery loading portion, a second case coupled to the first case and configured to cover the battery, a coil antenna module arranged between the second case and the battery, and a controller electrically connected to the coil antenna module and configured to transmit and receive a signal or receive an electric power, wherein the coil antenna module includes an insulating sheet, a first coil arranged in a surface of the insulating sheet, a second coil arranged in the first coil, a third coil arranged in the second coil, and a magnetic sheet disposed on the surface of the insulating sheet, and ends of the first, second and third coils are arranged in the surface of the insulating sheet or dividedly arranged in both surfaces of the insulating sheet.

Abstract: There is disclosed a mobile terminal including a first case comprising a battery loading portion, a battery loaded in the battery loading portion, a second case coupled to the first case and configured to cover the battery, a coil antenna module arranged between the second case and the battery, and a controller electrically connected to the coil antenna module and configured to transmit and receive a signal or receive an electric power, wherein the coil antenna module includes an insulating sheet, a first coil arranged in a surface of the insulating sheet, a second coil arranged in the first coil, a third coil arranged in the second coil, and a magnetic sheet disposed on the surface of the insulating sheet, and ends of the first, second and third coils are arranged in the surface of the insulating sheet or dividedly arranged in both surfaces of the insulating sheet.

Abstract: There is disclosed a mobile terminal including a first case comprising a battery loading portion, a battery loaded in the battery loading portion, a second case coupled to the first case and configured to cover the battery, a coil antenna module arranged between the second case and the battery, and a controller electrically connected to the coil antenna module and configured to transmit and receive a signal or receive an electric power, wherein the coil antenna module includes an insulating sheet, a first coil arranged in a surface of the insulating sheet, a second coil arranged in the first coil, a third coil arranged in the second coil, and a magnetic sheet disposed on the surface of the insulating sheet, and ends of the first, second and third coils are arranged in the surface of the insulating sheet or dividedly arranged in both surfaces of the insulating sheet.

Abstract: The present invention provides a mobile terminal which, when wireless (contactless) charging of a battery is performed by approximating a transmission coil of a charging unit (charging pad) and a reception coil provided in a wireless charging module of a mobile terminal, can adjust the saturation magnetic flux density and eddy currents of a shield sheet to which the reception coil is attached, the shield sheet being provided in the wireless charging module. When the reception coil is placed on the shield sheet to perform wireless charging, the saturation magnetic flux density and eddy current generation in the shield sheet are adjusted for wireless charging purpose because a part of the region in which the magnetic flux density is most quickly saturated was clipped off from the shield sheet. Thus, charging efficiency can be increased, and the problem of heat generation of the shield sheet can be effectively.