Abstract: A stage apparatus includes a mover having a holding part that holds a substrate, and a first mechanism and a control apparatus. The mover is capable of moving between a first position and a second position. At the first position, the substrate is held by the holding part, and, at the second position, the substrate is released from the holding part. The first mechanism can adjust a gap between the substrate and the holding part. The control apparatus simultaneously executes the movement of the mover between the first position and the second position, and with the adjustment of the gap by the first mechanism.