Patents by Inventor Kiyohito Iljima

Kiyohito Iljima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cluster tool and method for controlling transport
    Patent number: 6970770
    Abstract: At a time Tp when a wafer W is transferred into either a load lock chamber LL1 or LL2, periods PSL for the load lock chambers LL1 and LL2 to get ready to permit a transfer of a next wafer W thereinto are calculated based on a timing for exchange of wafers W between the load lock chamber LL1 or LL2 and a loader module LM. When the periods PSL are calculated, a loader arm LA1 or LA2 selects a next wafer W having the shortest period to get ready to be transferable into the load lock chamber LL1 or LL2, from load ports LP1 to LP3. This improves transfer delay in a cluster tool provided with the load lock chambers.
    Type: Grant
    Filed: April 2, 2002
    Date of Patent: November 29, 2005
    Assignee: Tokyo Electron Limited
    Inventors: Kiyohito Iljima, Seiichi Kaise, Keiko Takahashi, Akira Obi