Abstract: A multiple electron beam image acquisition apparatus includes an electromagnetic lens to receive multiple electron beams and refract them, a beam selection mechanism, in the magnetic field of the electromagnetic lens, to individually correct the trajectory of each of the multiple electron beams and select a variable desired number of beams from the multiple electron beams, a limiting aperture substrate to block beams which were not selected from the multiple electron beams, a magnification adjustment system to change magnification of the beams selected, depending on the number of beams, being the desired number, selected from the multiple electron beams, an objective lens to focus the beams selected onto the target object surface, a beam separator to separate, from the beams selected, secondary electrons emitted because of the target object surface being irradiated with the beams selected, and a detector to detect the secondary electrons separated by the beam separator.

Abstract: The present invention relates to a method for producing a hollow fiber membrane sheet-like object including: a connecting process of forming a ring-shaped section by winding a hollow fiber membrane capable of being continuously supplied, around two or more rolls so as to surround the two or more rolls and connecting a leading end portion of the wound hollow fiber membrane and an adjacent hollow fiber membrane, or of putting a ring-shaped section created in advance, on two or more rolls, and connecting a leading end portion of a hollow fiber membrane capable of being continuously supplied, to the ring-shaped section; a winding process of winding the hollow fiber membrane around the rolls by moving the leading end portion of the hollow fiber membrane by rotating at least one roll of the two or more rolls; a fixing process of forming a fixed section by fixing the hollow fiber membrane wound around the two or more rolls, into the form of a sheet in a width direction; and a cutting process of performing cutting-ou

Abstract: The present invention relates to a method for producing a hollow fiber membrane sheet-like object including: a connecting process of forming a ring-shaped section by winding a hollow fiber membrane capable of being continuously supplied, around two or more rolls so as to surround the two or more rolls and connecting a leading end portion of the wound hollow fiber membrane and an adjacent hollow fiber membrane, or of putting a ring-shaped section created in advance, on two or more rolls, and connecting a leading end portion of a hollow fiber membrane capable of being continuously supplied, to the ring-shaped section; a winding process of winding the hollow fiber membrane around the rolls by moving the leading end portion of the hollow fiber membrane by rotating at least one roll of the two or more rolls; a fixing process of forming a fixed section by fixing the hollow fiber membrane wound around the two or more rolls, into the form of a sheet in a width direction; and a cutting process of performing cutting-ou

Abstract: A method for correcting drifts of an electron beam, includes periodically correcting drift of the electron beam once per time period while varying the time period in length, and correcting, in addition to the correction per time period, the drift of the electron beam regardless of elapse of said time period when a change in value of a specified disturbance factor occurs with a prespecified change amount.

Abstract: A charged particle beam writing apparatus includes a stage on which a target object is placed; an emitting unit configured to emit a charged particle beam to the stage side; a blocking unit arranged between the emitting unit and the stage and configured to block the charged particle beam emitted; a deflector having electrodes through which a current flows by applying a voltage and configured to deflect the charged particle beam passing between the electrodes onto the blocking unit by applying a predetermined voltage across the electrodes; an optical axis adjusting unit configured to correct optical axis deviation of the charged particle beam generated by continuously repeating irradiation (beam-ON) of the charged particle beam on a target object and blocking (beam-OFF) of the beam by applying a two-step voltage to the deflector; and a control unit configured to control the optical axis adjusting unit such that an amount of the optical axis deviation is corrected.

Abstract: A timing control circuit controls the timing for applying a voltage to a sub deflector when changing a position to be irradiated with the charged-particle beam. A control computer compares a target line width and a line width of a pattern written with the timing for applying voltage to the sub deflector changed, and determines appropriate timing for applying voltage to the sub deflector from a timing range corresponding to a predetermined allowable range of the difference between the target line width and the line width of the written pattern. The control computer then controls the timing control circuit based on the determined timing.

Abstract: A charged particle beam writing apparatus includes a stage on which a target object is placed; an emitting unit configured to emit a charged particle beam to the stage side; a blocking unit arranged between the emitting unit and the stage and configured to block the charged particle beam emitted; a deflector having electrodes through which a current flows by applying a voltage and configured to deflect the charged particle beam passing between the electrodes onto the blocking unit by applying a predetermined voltage across the electrodes; an optical axis adjusting unit configured to correct optical axis deviation of the charged particle beam generated by continuously repeating irradiation (beam-ON) of the charged particle beam on a target object and blocking (beam-OFF) of the beam by applying a two-step voltage to the deflector; and a control unit configured to control the optical axis adjusting unit such that an amount of the optical axis deviation is corrected.

Abstract: A position measurement apparatus includes a movable stage structure, a measurement unit using a laser to measure a moved position of the stage and to output a corresponding measured value, a first filter configured to attenuate a first component of a certain frequency region of the measured value outputted by the measurement unit, a second filter connected in parallel with the first filter configured to attenuate a second component other than the certain frequency region of the measured value outputted by the measurement unit, a third filter connected in series to the second filter with the series connection of the second and third filters connected in parallel with the first filter, configured to attenuate the first component of the certain frequency region of the measured value outputted by the measurement unit, and a processing unit configured to combine an output of the first filter and an output of the series connection of the second and third filters and to thereby output a first combined value.

Abstract: A charged particle beam pattern writing apparatus in accordance with one preferred form of this invention includes an atmospheric pressure measuring unit which measures the value of an atmosphere air pressure, a coordinate value corrector which corrects three-dimensional (3D) coordinate values by use of the value of the air pressure measured, a deflection amount computing unit which calculates the deflection amount of a charged particle beam by using the 3D coordinate values corrected, an irradiator for irradiation of the charged particle beam, and a deflector for deflection of the charged particle beam based on the deflection amount.

Abstract: A timing control circuit controls the timing for applying a voltage to a sub deflector when changing a position to be irradiated with the charged-particle beam. A control computer compares a target line width and a line width of a pattern written with the timing for applying voltage to the sub deflector changed, and determines appropriate timing for applying voltage to the sub deflector from a timing range corresponding to a predetermined allowable range of the difference between the target line width and the line width of the written pattern. The control computer then controls the timing control circuit based on the determined timing.

Abstract: There is provided a charged beam drawing apparatus which includes main/sub two-stage deflectors, divides a main deflection drawing region on a sample into sub deflection drawing regions determined by the deflection width of the sub deflector, selects one of the sub deflection drawing regions by use of the main deflector and draws shots in the selected sub deflection drawing region by use of the sub deflector. A sub deflection driving unit includes a sub deflection sensitivity correction circuit, a sub deflection astigmatic correction circuit, an adder circuit which adds an output of the sub deflection sensitivity correction circuit and an output of the sub deflection astigmatic correction circuit, and a deflection amplifier which additionally applies an output of the adder circuit to the sub deflector.

Abstract: In a mobile communication terminal connectable to a first base station using a first communication mode and a second base station using a second communication mode that is different from the first communication mode, a control message coming from an acquired one of the first and second base stations is received. Based on the received control message, the communication mode used in the base station is recognized, and information indicative of the recognized communication mode is informed to the user.

Abstract: A charged particle beam pattern writing apparatus in accordance with one preferred form of this invention includes an atmospheric pressure measuring unit which measures the value of an atmosphere air pressure, a coordinate value corrector which corrects three-dimensional (3D) coordinate values by use of the value of the air pressure measured, a deflection amount computing unit which calculates the deflection amount of a charged particle beam by using the 3D coordinate values corrected, an irradiator for irradiation of the charged particle beam, and a deflector for deflection of the charged particle beam based on the deflection amount.

Abstract: There is provided a charged beam drawing apparatus which includes main/sub two-stage deflectors, divides a main deflection drawing region on a sample into sub deflection drawing regions determined by the deflection width of the sub deflector, selects one of the sub deflection drawing regions by use of the main deflector and draws shots in the selected sub deflection drawing region by use of the sub deflector. A sub deflection driving unit includes a sub deflection sensitivity correction circuit, a sub deflection astigmatic correction circuit, an adder circuit which adds an output of the sub deflection sensitivity correction circuit and an output of the sub deflection astigmatic correction circuit, and a deflection amplifier which additionally applies an output of the adder circuit to the sub deflector.

Abstract: A method for correcting drifts of an electron beam, includes periodically correcting drift of the electron beam once per time period while varying the time period in length, and correcting, in addition to the correction per time period, the drift of the electron beam regardless of elapse of said time period when a change in value of a specified disturbance factor occurs with a prespecified change amount.

Abstract: A position measurement apparatus includes a movable stage structure, a measurement unit using a laser to measure a moved position of the stage and to output a corresponding measured value, a first filter configured to attenuate a first component of a certain frequency region of the measured value outputted by said measurement unit, a second filter connected in parallel with said first filter configured to attenuate a second component other than the certain frequency region of the measured value outputted by said measurement unit, a third filter connected in series to said second filter with the series connection of said second and third filters connected in parallel with the first filter, configured to attenuate the first component of said certain frequency region of the measured value outputted by said measurement unit, and a synthetic unit configured to combine an output of said first filter and an output of the series connection of the second and third filters and to thereby output a first combined value.

Abstract: In a mobile communication terminal connectable to a first base station using a first communication mode and a second base station using a second communication mode that is different from the first communication mode, a control message coming from an acquired one of the first and second base stations is received. Based on the received control message, the communication mode used in the base station is recognized, and information indicative of the recognized communication mode is informed to the user.

Abstract: In a mobile communication terminal connectable to a first base station using a first communication mode and a second base station using a second communication mode that is different from the first communication mode, a control message coming from an acquired one of the first and second base stations is received. Based on the received control message, the communication mode used in the base station is recognized, and information indicative of the recognized communication mode is informed to the user.

Abstract: A charged particle beam system includes a chamber having an opening in a ceiling, a table placed immediately below the opening and movable in one direction, a laser interferometer set in the chamber, including a laser oscillator placed along the moving direction of the table, a movable mirror placed on the table side opposing the oscillator, a beam splitter placed to cross the laser beam and a fixed mirror fixed, immediately above the beam splitter, on the ceiling of the chamber, an optical lens barrel having an opening communicating with the opening of the chamber, and a beam gun set on a ceiling of the optical lens barrel to irradiate a specimen placed on the table with a charged particle beam through the first and second openings. At least an upper wall portion from the opening to the fixed mirror of the chamber is made of an invar alloy.

Abstract: In a mobile communication terminal connectable to a first base station using a first communication mode and a second base station using a second communication mode that is different from the first communication mode, a control message coming from an acquired one of the first and second base stations is received. Based on the received control message, the communication mode used in the base station is recognized, and information indicative of the recognized communication mode is informed to the user.