Abstract: A verification method and apparatus for do-not-inspect region rules include storing information specifying do-not-inspect regions, and storing a pixel unit size which defines a length of a single pixel unit. A minimum size verification process includes calculating sizes of do-not-inspect regions, and verifying whether a minimum size rule is obeyed, the minimum size rule requiring that a size of a do-not-inspect region is equal to or greater than a single pixel unit size while referring to the stored pixel unit size. A distance verification process includes calculating distances between pairs of do-not-inspect regions from among the do-not-inspect regions, and verifying whether a distance rule is obeyed, the distance rule requiring that the distance is in a range of greater than zero and less than a predetermined distance.

Abstract: The verification method of do-not-inspect region rules includes: an information storage process which includes storing information of a plurality of do-not-inspect regions which specifies each of the plurality of do-not-inspect regions, and storing a pixel size which defines a length of a single pixel; a minimum size verification process which includes, calculating a size of each of the plurality of do-not-inspect regions, and verifying whether a minimum size rule is obeyed, the minimum size rule requiring that the size of each of the plurality of do-not-inspect regions is equal to or greater than a single unit of the pixel size while referring to the pixel size; and a distance verification process which includes, calculating distances between every pair among the plurality of do-not-inspect regions by referring to the information of the plurality of do-not-inspect regions, and verifying whether a distance rule is obeyed when a distance between a pair among the plurality of do-not-inspect regions is greater t