Abstract: A lightning current measuring device is provided with: a polarized light separation element which separates light output from a sensor fiber into horizontal and vertical components having orthogonal planes of polarization, a Faraday rotation angle calculation unit calculating a Faraday rotation angle through arc-sine processing of a digitized signal of the difference between the horizontal and vertical components converted to a signal through photoelectric conversion after separation by the polarized light separation element, amplifiers which amplify the horizontal and vertical components converted to a signal through photoelectric conversion after separation by the polarized light separation element, a Faraday rotation angle calculating unit which calculates a Faraday rotation angle based on a digitized signal of the difference between the amplified horizontal and vertical components, and current value conversion units converting current values based on the calculated Faraday rotation angles.

Abstract: A lightning current measuring device is provided with: a polarized light separation element which separates light output from a sensor fiber into horizontal and vertical components having orthogonal planes of polarization, a Faraday rotation angle calculation unit calculating a Faraday rotation angle through arc-sine processing of a digitized signal of the difference between the horizontal and vertical components converted to a signal through photoelectric conversion after separation by the polarized light separation element, amplifiers which amplify the horizontal and vertical components converted to a signal through photoelectric conversion after separation by the polarized light separation element, a Faraday rotation angle calculating unit which calculates a Faraday rotation angle based on a digitized signal of the difference between the amplified horizontal and vertical components, and current value conversion units converting current values based on the calculated Faraday rotation angles.

Abstract: An optical fiber electric current sensor includes a polarization-splitter (13) that splits light outputted from a sensor fiber (11) into two polarization planes of which polarization directions are perpendicular to each other, a depolarizer (17) that depolarizes each of the polarization components from the polarization-splitter (13), light receiving element that converts the two lights that were depolarized by the depolarizer (17) to a first signal (S1) and a second signal (S2) respectively, and a signal processing unit (15) that, based on the first signal (S1) and the second signal (S2), determines the magnitude of a Faraday rotation applied to the linearly-polarized light, and thereby calculates a value of the current to be measured.

Abstract: An object of the present invention is to provide a fluid mixing system able to mix the fluids of different lines by any ratio and control the flow rates of even pulsating fluids, able to control the flow rate of even a pulsating fluid, compact in configuration and able to be installed in a narrow space, and enabling easy pipe laying and pipe connection at the time of installation. In the system of the present invention, its two feed lines are provided with first and second fluid control valves, flow rate measuring devices measuring the actual flow rates of the lines and outputting signals, and control units outputting command signals for controlling the fluid control valves and mixing the fluids flowing through the two feed lines by any ratio. The first fluid control valve controls the pressure of the fluid by the pressure operation of the control fluid, while the second fluid control valve changes the opening area of the channel to control the flow rate of the fluid.

Abstract: An optical fiber electric current sensor includes a polarization splitter (13) that splits output light from a sensor fiber (11) into two polarization components of which polarization planes intersect with each other; and a signal processing unit (15) that converts the two split polarization components into first and second signals (Px) and (Py) by opto-electric conversion, multiplies a ratio (Sx) between direct current component and alternating current component of the first signal (Px) and a ratio (Sy) between direct current component and alternating current component of the second signal (Py) by different coefficients, and calculates a difference value therebetween.

Abstract: A simple constitution together with an easy calibration of output by realizing a fast light intensity detection method is realized without using the carrier signal. An optical sensor, including: a sensor to which light from a light source is lead, and by which light intensity of the light is modulated based on a physical value; light receiving elements 61 and 62 receiving two elements of divided light PA and PB having polarized waves which are orthogonally crossing each other; a variable optical attenuator operating light which is received by the light receiving elements 61 and 62; and a variable amplifier operating output signals from the light receiving elements 61 and 62, wherein both a zero point of a sensor output and sensitivity are calibrated based on a light attenuation factor or an amplification factor which is adjusted when a physical value is detected by calculating a ratio between a sum and a difference of outputs of the light receiving elements 61 and 62.

Abstract: In a reflection type optical fiber electric current measurement apparatus, a standardization reference signal (Xr), which is defined by the intensity (Pr) of the optical reference signal transmitted through a partial transmission mirror by using a reflector (111B) provided in one end of a sensor fiber as the partial transmission mirror, is subtracted from a standardization detection signal (Xs), which is defined by the intensity (Ps) of the optical detection signal obtained from the light reflected at the partial transmission mirror. Thereby, it is possible to remove noise caused by fluctuation in the polarization state (B) as well as fluctuation in the luminescence intensity (A) of the light source.

Abstract: An influence on a sensor output is suppressed to a minimum degree even in the case when there is a ripple in a light source, thereby improving the measurement accuracy. In an intensity modulation type optical sensor, light from a light source 1 is guided to a sensor head 6, the intensity of the light is modulated on the basis of an alternating current (AC) measured object (for example, a current i) changing with time, the modulated light is received in a light receiving element 81 and converted into an electrical signal, and a normalized received signal Xs indicating a degree of modulation is acquired from a ratio of an AC component As and a DC component Ds of the electrical signal to thereby acquiring a value of the AC measured object.

Abstract: [Problem] To permit reduction in the temperature dependence of a sensor, which is ascribable to the temperature dependence of the Verdet constant of a sensor fiber, at a low cost. [Means for Resolution] In a prior-art optical sensor fiber of reflection type, reduction in the temperature dependence of a sensor is coped with by, e.g., duplexing a signal processing circuit and a receiving optical system, so as to execute the mean processing of modulation signals, whereas in this invention, the elimination of the temperature dependence of a modulation signal is realized by selecting a ferromagnetic Faraday rotor 13 so that a modulation degree (Sout) expressed by the ratio between an AC component and a DC component may become constant or within a certain range, so as to especially simplify a configuration and to attain a lower cost.

Abstract: [Object] A simple constitution together with an easy calibration of output by realizing a fast light intensity detection method is realized without using the carrier signal. [Solution] An optical sensor, including: a sensor to which light from a light source is lead, and by which light intensity of the light is modulated based on a physical value; light receiving elements 61 and 62 receiving two elements of divided light PA and PB having polarized waves which are orthogonally crossing each other; a variable optical attenuator operating light which is received by the light receiving elements 61 and 62; and a variable amplifier operating output signals from the light receiving elements 61 and 62, wherein both a zero point of a sensor output and sensitivity are calibrated based on a light attenuation factor or an amplification factor which is adjusted when a physical value is detected by calculating a ratio between a sum and a difference of outputs of the light receiving elements 61 and 62.

Abstract: An influence on a sensor output is suppressed to a minimum degree even in the case when there is a ripple in a light source, thereby improving the measurement accuracy. In an intensity modulation type optical sensor, light from a light source 1 is guided to a sensor head 6, the intensity of the light is modulated on the basis of an alternating current (AC) measured object (for example, a current i) changing with time, the modulated light is received in a light receiving element 81 and converted into an electrical signal, and a normalized received signal Xs indicating a degree of modulation is acquired from a ratio of an AC component As and a DC component Ds of the electrical signal to thereby acquiring a value of the AC measured object.

Abstract: [Problem] To permit reduction in the temperature dependence of a sensor, which is ascribable to the temperature dependence of the Verdet constant of a sensor fiber, at a low cost. [Means for Resolution] In a prior-art optical sensor fiber of reflection type, reduction in the temperature dependence of a sensor is coped with by, e.g., duplexing a signal processing circuit and a receiving optical system, so as to execute the mean processing of modulation signals, whereas in this invention, the elimination of the temperature dependence of a modulation signal is realized by selecting a ferromagnetic Faraday rotor 13 so that a modulation degree (Sout) expressed by the ratio between an AC component and a DC component may become constant or within a certain range, so as to especially simplify a configuration and to attain a lower cost.

Abstract: An object of the present invention is to provide a fluid mixing system able to mix the fluids of different lines by any ratio and control the flow rates of even pulsating fluids, able to control the flow rate of even a pulsating fluid, compact in configuration and able to be installed in a narrow space, and enabling easy pipe laying and pipe connection at the time of installation. In the system of the present invention, its two feed lines are provided with first and second fluid control valves, flow rate measuring devices measuring the actual flow rates of the lines and outputting signals, and control units outputting command signals for controlling the fluid control valves and mixing the fluids flowing through the two feed lines by any ratio. The first fluid control valve controls the pressure of the fluid by the pressure operation of the control fluid, while the second fluid control valve changes the opening area of the channel to control the flow rate of the fluid.

Abstract: A current measuring apparatus comprises a current detection unit 10 and a photoelectric converter 20. The current detection unit 10 comprises an optical fiber sensor 11 extended or looped around a conductor 30. A reflective film 12 is attached to one end of the sensor 11 so that light can be reflected by the end of the sensor. The current detection unit 10 further comprises a first Faraday element 13, a light-transmitting birefringent member 14, a first optical fiber 15, a second optical fiber 16 and a lens 17. The Faraday element 13 rotates a plane of polarization of the incident light through about 22.5°. The birefringent member 14 functions to separate the light emitted from the sensor 11 into an ordinary ray L1 and an extraordinary ray L2 that are orthogonal to each other, and to transmit linearly polarized light L0 emitted from a light source. The lens 17 is provided between the element 13 and the birefringent member 14.

Abstract: This synthetic resin pallet has a load portion 1 and a plurality of leg portions 2 protruding downward from the load portion 1 with fork inserting portions 4 provided between the leg portions 2. The load portion 1 comprises a horizontal plate portion and a grating portion 6 formed by intersection of a plurality of vertical ribs 6a, 7a and a plurality of horizontal ribs 6b, 7b, provided at a bottom of the horizontal plate portion. The leg portions 2 are so formed as to protrude downward from a lower end of the grating portion 6. Each of the leg portions 2 comprises a plurality of small leg portions 3 that are separated by a plurality of parallel vertical ribs 7a and/or a plurality of parallel horizontal ribs 7b. Engagement holes 22 are formed in the small leg portions 3 and plate-like link portions 20 are attached by fitting engagement portions 24 in the engagement holes. Recesses in which the small leg portions 3 are to be fitted are formed in the plate-like link portions 20.

Abstract: A current measuring apparatus comprises a current detection unit 10 and a photoelectric converter 20. The current detection unit 10 comprises an optical fiber sensor 11 extended or looped around a conductor 30. A reflective film 12 is attached to one end of the sensor 11 so that light can be reflected by the end of the sensor. The current detection unit 10 further comprises a first Faraday element 13, a light-transmitting birefringent member 14, a first optical fiber 15, a second optical fiber 16 and a lens 17. The Faraday element 13 rotates a plane of polarization of the incident light through about 22.5°. The birefringent member 14 functions to separate the light emitted from the sensor 11 into an ordinary ray L1 and an extraordinary ray L2 that are orthogonal to each other, and to transmit linearly polarized light L0 emitted from a light source. The lens 17 is provided between the element 13 and the birefringent member 14.

Abstract: A chemical treatment apparatus including a treatment tank filled with chemical with which wafers are treated, and a jet pipe having chemical jetting holes which is provided at the bottom portion of the treatment tank and jets the chemical from the jetting holes thereof, the jetting holes containing at least first jetting holes for jetting the chemical upwardly and second jetting holes for jetting the chemical in a direction different from that of the first holes. The second direction is set to a direction within the range from the horizontal direction of the jet pipe to the obliquely downward direction at 45 degrees with respect to the horizontal direction.

Abstract: A chemical treatment apparatus including a treatment tank filled with chemical with which wafers are treated, and a jet pipe having chemical jetting holes which is provided at the bottom portion of the treatment tank and jets the chemical from the jetting holes thereof, the jetting holes containing at least first jetting holes for jetting the chemical upwardly and second jetting holes for jetting the chemical in a direction different from that of the first holes. The second direction is set to a direction within the range from the horizontal direction of the jet pipe to the obliquely downward direction at 45 degrees with respect to the horizontal direction.

Abstract: With a synthetic resin pallet provided with large open portions in an under surface portion for handling with a hand lifter, the aim is to improve the strength of the under surface portion. Therefore there is provided a synthetic resin pallet having an upper surface portion and an under surface portion which is provided with large open portions, the upper surface portion and the under surface portion being connected by columns, with fork insertion apertures formed between the columns, the synthetic resin pallet being integrally formed by connecting a pallet upper part integrally formed with the upper surface portion and column main portions, and a strengthened pallet lower part integrally formed with the under surface portion and column lower end portions, by the respective columns.

Abstract: Composite units of an optical semiconductor device and a supporting substrate are disclosed, in which the rear surface of the optical semiconductor device is provided with one or more electrode patterns and the top surface of the supporting substrate is provided with one or more electrode patterns. The optical semiconductor device and the supporting substrate are fixed to each other by once melting and solidifying one or more solder bumps which intervene between the one or more electrode patterns provided on the rear surface of the optical semiconductor device and the one or more electrode patterns provided on the top surface of the supporting substrate. A good grade of accuracy in the mutual geometric position of the optical semiconductor device and the supporting substrate is obtained in a horizontal direction due to a phenomenon called "the self alignment results" in this specification, in which a molten metal is inclined to become a ball based on surface tension.