Patents by Inventor Kiyoshi Mito

Kiyoshi Mito has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sputtering apparatus capable of changing distance between substrate and deposition preventing plate used for film formation
    Patent number: 6309525
    Abstract: A sputtering apparatus for forming a sputtered film on a substrate held on a substrate holder in a vacuum chamber includes a target, a deposition preventing plate provided between the target and the substrate holder, a substrate holder carrying mechanism, and a moving mechanism for moving the substrate holder carrying mechanism to change a distance between the substrate and the deposition preventing plate.
    Type: Grant
    Filed: February 17, 1999
    Date of Patent: October 30, 2001
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Masayasu Futagawa, Kiyoshi Mito
  • SPUTTERING APPARATUS CAPABLE OF CHANGING DISTANCE BETWEEN SUBSTRATE AND DEPOSITION PREVENTING PLATE USED FOR FILM FORMATION
    Publication number: 20010008208
    Abstract: A sputtering apparatus for forming a sputtered film on a substrate held on a substrate holder in a vacuum chamber includes a target, a deposition preventing plate provided between the target and the substrate holder, a substrate holder carrying mechanism, and a moving mechanism for moving the substrate holder carrying mechanism to change a distance between the substrate and the deposition preventing plate.
    Type: Application
    Filed: February 17, 1999
    Publication date: July 19, 2001
    Inventors: MASAYASU FUTAGAWA, KIYOSHI MITO