Patents by Inventor Kiyoshi Ogata
Kiyoshi Ogata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11969276Abstract: A sample inspection system is described. The system comprises at least first and second inspection units positioned above a sample region. Each of said at least first and second inspection unit comprises at least one X-ray radiation source and respective detector arrangement and configured for X-ray fluorescent inspection of a sample. Wherein the first and second x-ray inspection units provide first and second inspection properties different in at least one of: bandwidth of emitted X-ray energies, energy of emitted X-rays, spot size of X-ray beam generated on a sample.Type: GrantFiled: May 2, 2023Date of Patent: April 30, 2024Assignee: Xwinsys Technology Development Ltd.Inventors: Kiyoshi Ogata, Avishai Shklar, Doron Reinis, Ofek Oiknine
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Publication number: 20230384248Abstract: A transmission type small-angle scattering device of the present invention includes a goniometer 10 including a rotation arm 11. The rotation arm 11 is freely turnable around a ?-axis extending in a horizontal direction from an origin with a vertical arrangement state of the rotation arm 11 being defined as the origin, and has a vertical arrangement structure in which an X-ray irradiation unit 20 is installed on a lower-side end portion of the rotation arm 11, and a two-dimensional X-ray detector 30 is installed on an upper-side end portion of the rotation arm 11 to form a vertical arrangement structure.Type: ApplicationFiled: July 31, 2023Publication date: November 30, 2023Applicant: RIGAKU CORPORATIONInventors: Naoki Matsushima, Kiyoshi Ogata, Sei Yoshihara, Yoshiyasu Ito, Kazuhiko Omote, Hiroshi Motono, Shigematsu Asano, Katsutaka Horada, Sensui Yasuda
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Publication number: 20230375485Abstract: A transmission type small-angle scattering device of the present invention includes a goniometer 10 including a rotation arm 11. The rotation arm 11 is freely turnable around a ?-axis extending in a horizontal direction from an origin with a vertical arrangement state of the rotation arm 11 being defined as the origin, and has a vertical arrangement structure in which an X-ray irradiation unit 20 is installed on a lower-side end portion of the rotation arm 11, and a two-dimensional X-ray detector 30 is installed on an upper-side end portion of the rotation arm 11 to form a vertical arrangement structure.Type: ApplicationFiled: July 31, 2023Publication date: November 23, 2023Applicant: RIGAKU CORPORATIONInventors: Naoki Matsushima, Kiyoshi Ogata, Sei Yoshihara, Yoshiyasu Ito, Kazuhiko Omote, Hiroshi Motono, Shigematsu Asano, Katsutaka Horada, Sensui Yasuda
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Patent number: 11754515Abstract: A transmission type small-angle scattering device of the present invention includes a goniometer 10 including a rotation arm 11. The rotation arm 11 is freely turnable around a ?-axis extending in a horizontal direction from an origin with a vertical arrangement state of the rotation arm being defined as the origin, and has a vertical arrangement structure in which an X-ray irradiation unit 20 is installed on a lower-side end portion of the rotation arm 11, and a two-dimensional X-ray detector 30 is installed on an upper-side end portion of the rotation arm 11 to form a vertical arrangement structure.Type: GrantFiled: January 8, 2020Date of Patent: September 12, 2023Assignee: RIGAKU CORPORATIONInventors: Naoki Matsushima, Kiyoshi Ogata, Sei Yoshihara, Yoshiyasu Ito, Kazuhiko Omote, Hiroshi Motono, Shigematsu Asano, Katsutaka Horada, Sensui Yasuda
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Patent number: 11733185Abstract: This fluorescent X-ray analysis apparatus is provided with an X-ray irradiation unit 20 for irradiating a sample S with: X-rays, having an energy that exceeds the energy absorption edge value of Ag which is selected as a measurement target element, and that is no greater than the energy absorption edge value of Sn which is an adjacent element having a higher energy absorption edge value than Ag; and X-rays having an energy exceeding the energy absorption edge value of Sn which is selected as a measurement target element.Type: GrantFiled: December 29, 2020Date of Patent: August 22, 2023Assignee: RIGAKU CORPORATIONInventors: Kiyoshi Ogata, Sei Yoshihara, Shuichi Kato, Kazuhiko Omote, Hiroshi Motono, Naoki Matsushima
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Publication number: 20220170869Abstract: A transmission type small-angle scattering device of the present invention includes a goniometer 10 including a rotation arm 11. The rotation arm 11 is freely turnable around a ?-axis extending in a horizontal direction from an origin with a vertical arrangement state of the rotation arm being defined as the origin, and has a vertical arrangement structure in which an X-ray irradiation unit 20 is installed on a lower-side end portion of the rotation arm 11, and a two-dimensional X-ray detector 30 is installed on an upper-side end portion of the rotation arm 11 to form a vertical arrangement structure.Type: ApplicationFiled: January 8, 2020Publication date: June 2, 2022Applicant: RIGAKU CORPORATIONInventors: Naoki Matsushima, Kiyoshi Ogata, Sei Yoshihara, Yoshiyasu Ito, Kazuhiko Omote, Hiroshi Motono, Shigematsu Asano, Katsutaka Horada, Sensui Yasuda
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Patent number: 11079345Abstract: An X-ray inspection device of the present invention includes a sample placement unit 11 for placing a sample as an inspection target therein, a sample placement unit positioning mechanism 30 for moving the sample placement unit 11, a goniometer 20 including first and second rotation members 22, 23 that rotate independently of each other, an X-ray irradiation unit 40 installed on the first rotation member 22, and a two-dimensional X-ray detector 50 installed on the second rotation member 23. The sample placement unit positioning mechanism 30 includes a ? rotation mechanism 35 for rotating the sample placement unit 11 and a ?-axis about a ?-axis that is orthogonal to a ?s-axis and a ?d-axis at a measurement point P and extends horizontally.Type: GrantFiled: September 5, 2018Date of Patent: August 3, 2021Assignee: RIGAKU CORPORATIONInventors: Naoki Matsushima, Kiyoshi Ogata, Kazuhiko Omote, Sei Yoshihara, Yoshiyasu Ito, Hiroshi Motono, Hideaki Takahashi, Akifusa Higuchi, Shiro Umegaki, Shigematsu Asano, Ryotaro Yamaguchi, Katsutaka Horada
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Publication number: 20210116399Abstract: This fluorescent X-ray analysis apparatus is provided with an X-ray irradiation unit 20 for irradiating a sample S with: X-rays, having an energy that exceeds the energy absorption edge value of Ag which is selected as a measurement target element, and that is no greater than the energy absorption edge value of Sn which is an adjacent element having a higher energy absorption edge value than Ag; and X-rays having an energy exceeding the energy absorption edge value of Sn which is selected as a measurement target element.Type: ApplicationFiled: December 29, 2020Publication date: April 22, 2021Applicant: RIGAKU CORPORATIONInventors: Kiyoshi Ogata, Sei Yoshihara, Shuichi Kato, Kazuhiko Omote, Hiroshi Motono, Naoki Matsushima
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Patent number: 10983073Abstract: A hybrid inspection system of the present invention is an inspection system including a first inspection device (1) for inspecting a sample (11) based on X-ray measurement data obtained by irradiating the sample (11) with X-rays, and a second inspection device (2) for inspecting the sample (11) by a measuring method using no X-rays. The X-ray measurement data obtained by the first inspection device or an analysis result of the X-ray measurement data is output to the second inspection device (2). In the second inspection device (2), the structure of the sample (11) is analyzed by using the X-ray measurement data input from the first inspection device (1) or the analysis result of the X-ray measurement data.Type: GrantFiled: July 14, 2017Date of Patent: April 20, 2021Assignee: RIGAKU CORPORATIONInventors: Kiyoshi Ogata, Kazuhiko Omote, Yoshiyasu Ito
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Publication number: 20210063326Abstract: An X-ray inspection device of the present invention includes a sample placement unit 11 for placing a sample as an inspection target therein, a sample placement unit positioning mechanism 30 for moving the sample placement unit 11, a goniometer 20 including first and second rotation members 22, 23 that rotate independently of each other, an X-ray irradiation unit 40 installed on the first rotation member 22, and a two-dimensional X-ray detector 50 installed on the second rotation member 23. The sample placement unit positioning mechanism 30 includes a ? rotation mechanism 35 for rotating the sample placement unit 11 and a ?-axis about a ?-axis that is orthogonal to a ?s-axis and a ?d-axis at a measurement point P and extends horizontally.Type: ApplicationFiled: September 5, 2018Publication date: March 4, 2021Applicant: RIGAKU CORPORATIONInventors: Naoki Matsushima, Kiyoshi Ogata, Kazuhiko Omote, Sei Yoshihara, Yoshiyasu Ito, Hiroshi Motono, Hideaki Takahashi, Akifusa Higuchi, Shiro Umegaki, Shigematsu Asano, Ryotaro Yamaguchi, Katsutaka Horada
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Patent number: 10876978Abstract: In an X-ray inspection device according to the present invention, an X-ray irradiation unit 40 includes a first X-ray optical element 42 for focusing characteristic X-rays in a vertical direction, and a second X-ray optical element 43 for focusing the characteristic X-rays in a horizontal direction. The first X-ray optical element 42 is constituted by a crystal material having high crystallinity. The second X-ray optical element includes a multilayer mirror.Type: GrantFiled: July 12, 2017Date of Patent: December 29, 2020Assignee: RIGAKU CORPORATIONInventors: Kiyoshi Ogata, Kazuhiko Omote, Sei Yoshihara, Yoshiyasu Ito, Hiroshi Motono, Hideaki Takahashi, Takao Kinefuchi, Akifusa Higuchi, Shiro Umegaki, Shigematsu Asano, Ryotaro Yamaguchi, Katsutaka Horada, Makoto Kambe, Licai Jiang, Boris Verman
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Patent number: 10514345Abstract: An X-ray thin film inspection device according to the present invention has an X-ray irradiation unit 40 mounted in a first rotation arm 32, an X-ray detector 50 mounted in a second rotation arm 33, a fluorescence X-ray detector 60 for detecting fluorescent X-ray occurring from an inspection target due to irradiation of X-ray, a temperature measuring unit 110 for measuring the temperature corresponding to the temperature of the X-ray thin film inspection device, and a temperature correcting system (central processing unit 100) for correcting an inspection position on the basis of the temperature measured by the temperature measuring unit 110.Type: GrantFiled: October 14, 2014Date of Patent: December 24, 2019Assignee: RIGAKU CORPORATIONInventors: Kiyoshi Ogata, Kazuhiko Omote, Yoshiyasu Ito, Hiroshi Motono, Muneo Yoshida, Hideaki Takahashi
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Patent number: 10473598Abstract: An X-ray thin film inspection device of the present invention includes an X-ray irradiation unit 40 installed on a first rotation arm 32, an X-ray detector 50 installed on a second rotation arm 33, and a fluorescence X-ray detector 60 for detecting fluorescence X-rays generated from an inspection target upon irradiation of X-rays. The X-ray irradiation unit 40 includes an X-ray optical element 43 comprising a confocal mirror for receiving X-rays radiated from an X-ray tube 42, reflects plural focused X-ray beams monochromatized at a specific wavelength and focuses the plural focused X-ray beams to a preset focal point, and a slit mechanism 46 for passing therethrough any number of focused X-ray beams out of the plural focused X-ray beams reflected from the X-ray optical element 43.Type: GrantFiled: October 14, 2014Date of Patent: November 12, 2019Assignee: RIGAKU CORPORATIONInventors: Kiyoshi Ogata, Sei Yoshihara, Takao Kinefuchi, Shiro Umegaki, Shigematsu Asano, Katsutaka Horada, Muneo Yoshida, Hiroshi Motono, Hideaki Takahashi, Akifusa Higuchi, Kazuhiko Omote, Yoshiyasu Ito, Naoki Kawahara, Asao Nakano
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Publication number: 20190227005Abstract: In an X-ray inspection device according to the present invention, an X-ray irradiation unit 40 includes a first X-ray optical element 42 for focusing characteristic X-rays in a vertical direction, and a second X-ray optical element 43 for focusing the characteristic X-rays in a horizontal direction. The first X-ray optical element 42 is constituted by a crystal material having high crystallinity. The second X-ray optical element includes a multilayer mirror.Type: ApplicationFiled: July 12, 2017Publication date: July 25, 2019Inventors: Kiyoshi Ogata, Kazuhiko Omote, Sei Yoshihara, Yoshiyasu Ito, Hiroshi Motono, Hideaki Takahashi, Takao Kinefuchi, Akifusa Higuchi, Shiro Umegaki, Shigematsu Asano, Ryotaro Yamaguchi, Katsutaka Horada, Makoto Kambe, Licai Jiang, Boris Verman
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Publication number: 20190227006Abstract: A hybrid inspection system of the present invention is an inspection system including a first inspection device (1) for inspecting a sample (11) based on X-ray measurement data obtained by irradiating the sample (11) with X-rays, and a second inspection device (2) for inspecting the sample (11) by a measuring method using no X-rays. The X-ray measurement data obtained by the first inspection device or an analysis result of the X-ray measurement data is output to the second inspection device (2). In the second inspection device (2), the structure of the sample (11) is analyzed by using the X-ray measurement data input from the first inspection device (1) or the analysis result of the X-ray measurement data.Type: ApplicationFiled: July 14, 2017Publication date: July 25, 2019Inventors: Kiyoshi Ogata, Kazuhiko Omote, Yoshiyasu Ito
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Publication number: 20170299528Abstract: An X-ray thin film inspection device according to the present invention has an X-ray irradiation unit 40 mounted in a first rotation arm 32, an X-ray detector 50 mounted in a second rotation arm 33, a fluorescence x-ray detector 60 for detecting fluorescent X-ray occurring from an inspection target due to irradiation of X-ray, a temperature measuring unit 110 for measuring the temperature corresponding to the temperature of the X-ray thin film inspection device, and a temperature correcting system (central processing unit 100) for correcting an inspection position on the basis of the temperature measured by the temperature measuring unit 110.Type: ApplicationFiled: October 14, 2014Publication date: October 19, 2017Applicant: RIGAKU CORPORATIONInventors: Kiyoshi Ogata, Kazuhiko Omote, Yoshiyasu Ito, Hiroshi Motono, Muneo Yoshida, Hideaki Takahashi
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Publication number: 20170234814Abstract: An X-ray thin film inspection device of the present invention includes an X-ray irradiation unit 40 installed on a first rotation arm 32, an X-ray detector 50 installed on a second rotation arm 33, and a fluorescence X-ray detector 60 for detecting fluorescence X-rays generated from an inspection target upon irradiation of X-rays. The X-ray irradiation unit 40 includes an X-ray optical element 43 comprising a confocal mirror for receiving X-rays radiated from an X-ray tube 42, reflects plural focused X-ray beams monochromatized at a specific wavelength and focuses the plural focused X-ray beams to a preset focal point, and a slit mechanism 46 for passing therethrough any number of focused X-ray beams out of the plural focused X-ray beams reflected from the X-ray optical element 43.Type: ApplicationFiled: October 14, 2014Publication date: August 17, 2017Applicant: RIGAKU CORPORATIONInventors: Kiyoshi Ogata, Sei Yoshihara, Takao Kinefuchi, Shiro Umegaki, Shigematsu Asano, Katsutaka Horada, Muneo Yoshida, Hiroshi Motono, Hideaki Takahashi, Akifusa Higuchi, Kazuhiko Omote, Yoshiyasu Ito, Naoki Kawahara, Asao Nakano
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Patent number: 8873715Abstract: An industrial X-ray tube formed by accommodating a cathode and anode in a container having an evacuated interior, in which electrons emitted from the cathode are caused to strike the anode and X-rays are emitted from the anode. The cathode is formed from graphite. The graphite is a layered crystal obtained by layering a plurality of carbon hexagonal planes. The graphite is cut based on crystal axes of the carbon hexagonal planes. The resulting cut surface is caused to function as an electron-emitting surface. For example, directions of an a- and b-crystal axis may be set so as to be arbitrary between each of the layers of the carbon hexagonal planes, the graphite may be cut along a surface parallel to the c-axis, and the resulting cut surface may be caused to function as an electron-emitting surface. The graphite may also be cut along a surface orthogonal to the c-axis.Type: GrantFiled: July 29, 2011Date of Patent: October 28, 2014Assignee: Rigaku CorporationInventors: Kiyoshi Ogata, Yoshihiro Takeda, Tetsuo Kani, Makoto Kanbe, Naohisa Osaka, Takahisa Sato
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Patent number: 8712013Abstract: A motion control system comprising a servo motor for moving a rotary stage; a scale provided on the rotary stage or on an object that moves integrally with the rotary stage; a plurality of reading heads for detecting the scale and outputting a signal; a data processing part for calculating an average value of rotation angle data based on each of the output signals from the reading heads and outputting the average value as a signal; and a servo amplifier for controlling the motor based on the signal representing the average value of the rotation angle. The motion control system can cause the rotary stage to rotate to a desired rotation angle to a high degree of accuracy using the reading heads.Type: GrantFiled: August 29, 2011Date of Patent: April 29, 2014Assignee: Rigaku CorporationInventors: Tetsuo Kani, Tomoyasu Ueda, Kiyoshi Ogata, Kazuhiko Omote, Kenji Wakasaya
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Patent number: 8675817Abstract: An X-ray generator includes a booster circuit formed by sequentially connecting a plurality of boosting steps extending from a low-voltage terminal to a high-voltage terminal of its own. The booster circuit is arranged in a lateral region of the X-ray tube so as to make the low-voltage terminal of its own correspond to the anode of the X-ray tube and the high-voltage terminal of its own correspond to the cathode of the X-ray tube. A lead wire extending from the cathode to the outside of the X-ray tube is connected to the high-voltage terminal of the booster circuit. A molded member containing insulating resin is formed to shield at least a cathode side end part of the X-ray tube, the lead wire outwardly extending from the cathode side end part and a high-voltage terminal side end part of the booster circuit.Type: GrantFiled: July 29, 2011Date of Patent: March 18, 2014Assignee: Rigaku CorporationInventors: Kiyoshi Ogata, Tetsuo Kani, Makoto Kanbe, Yoshihiro Takeda, Takahisa Sato