Abstract: A method for reviewing a defect including a light capturing step that illuminates a sample with light under plural optical conditions, while varying only at least one of illumination conditions, sample conditions, or detection conditions, and detects plural lights scattering from the sample; a signal obtaining step that obtains plural signals based on the lights detected; and a processing step that discriminates a defect from noise according to a waveform characteristic quantity, an image characteristic quantity, or a value characteristic quantity created using the signals and derives the coordinates of defect.

Abstract: Standing wave-generating planar wave illumination units generate two light-wave planar waves using light from a light source assembly and irradiate a sample surface with a standing wave produced by interference of the planar waves on the sample surface. A bias planar wave illumination unit generates a bias planar wave using light from the light source assembly and irradiates the sample surface with the wave. The bias planar wave is synchronized with the standing wave to alternately oscillate to positive and negative with an equal electric field displacement irrespective of the position on the sample surface across a reference time specified in advance when the displacement of the standing wave has a value “0” at the respective positions on the sample surface, and oscillates at a bias amplitude specified in advance to raise the displacement of the standing wave on the sample surface to only a positive or negative displacement.

Abstract: detect a fine defect in reviewing To review a fine defect detected by another inspection apparatus, there is disclosed a method for reviewing a defect including a light capturing step that illuminates a sample with light under plural optical conditions, while varying only at least one of illumination conditions, sample conditions, or detection conditions, and detects plural lights scattering from the sample; a signal obtaining step that obtains plural signals based on the lights detected; and a processing step that discriminates a defect from noise according to a waveform characteristic quantity, an image characteristic quantity, or a value characteristic quantity created using the signals and derives the coordinates of defect.

Abstract: Disclosed is a distance measuring device using an optical comb. In order for the absolute distance to an object to be measured which has a surface with low reflection ratio or a scattering surface and is approximately 10 m apart, to be easily measured with accuracy of 0.1 mm or more using an optical and contactless method, the distance measuring device which measures the distance to the object to be measured is configured such that the distance to the object to be measured is measured by comparing the phase of the beat signal between a light source and a plurality of CW lasers which are reflected or scattered by the object with the phase of the beat signal between the light source and a plurality of CW lasers prior to being irradiated onto the object.

Abstract: Standing wave-generating planar wave illumination units generate two light-wave planar waves using light from a light source assembly and irradiate a sample surface with a standing wave produced by interference of the planar waves on the sample surface. A bias planar wave illumination unit generates a bias planar wave using light from the light source assembly and irradiates the sample surface with the wave. The bias planar wave is synchronized with the standing wave to alternately oscillate to positive and negative with an equal electric field displacement irrespective of the position on the sample surface across a reference time specified in advance when the displacement of the standing wave has a value “0” at the respective positions on the sample surface, and oscillates at a bias amplitude specified in advance to raise the displacement of the standing wave on the sample surface to only a positive or negative displacement.

Abstract: Disclosed is a distance measuring device using an optical comb. In order for the absolute distance to an object to be measured which has a surface with low reflection ratio or a scattering surface and is approximately 10 m apart, to be easily measured with accuracy of 0.1 mm or more using an optical and contactless method, the distance measuring device which measures the distance to the object to be measured is configured such that the distance to the object to be measured is measured by comparing the phase of the beat signal between a light source and a plurality of CW lasers which are reflected or scattered by the object with the phase of the beat signal between the light source and a plurality of CW lasers prior to being irradiated onto the object.

Abstract: Method of evaluating precision of output data using error propagation includes performing numerical differentiation using input data in data processing, and thereby obtaining a Jacobian matrix J of the data processing; estimating variance-covariance of errors of the input data, and thereby obtaining an error matrix D of the input data; and calculating an error matrix from the Jacobian matrix J and the error matrix D of the input data, the error matrix R representing variance-covariance of errors of output data.

Abstract: Method of evaluating precision of output data using error propagation includes performing numerical differentiation using input data in data processing, and thereby obtaining a Jacobian matrix J of the data processing; estimating variance-covariance of errors of the input data, and thereby obtaining an error matrix D of the input data; and calculating an error matrix from the Jacobian matrix J and the error matrix D of the input data, the error matrix R representing variance-covariance of errors of output data.