Patents by Inventor Kiyoshi Yuasa

Kiyoshi Yuasa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cleaning fluid and cleaning method for component of semiconductor-treating apparatus
    Patent number: 6805135
    Abstract: A cleaning solution is used to remove a byproduct derived from a decomposed substance of a process gas containing C and F. The cleaning solution contains 75 wt % N-methyl-2-pyrrolidone, 15 wt % ethylene glycol monobutyl ether, 0.5 wt % surfactant, and 9.5 wt % water. The content of an alkali metal in the cleaning solution is set to be less than 10 ppb.
    Type: Grant
    Filed: November 24, 2000
    Date of Patent: October 19, 2004
    Assignees: Nittou Chemical Industries, Ltd., Tokyo Electron Limited
    Inventors: Kenichi Hirota, Hitoshi Yamada, Kiyoshi Yuasa, Eiji Yamaguchi, Shinichi Kawaguchi, Takahiro Shimoda, Nobuyuki Nagayama