Abstract: A liquid supply system that can be cooled efficiently. The liquid supply system 10 includes a container having an inlet 131b and an outlet 131c for liquid and provided with pump chambers P1, P2 inside it, supply passages 131e, 131Xc through which the liquid flowing in from the inlet 131b is supplied to the pump chambers P1, P2, and a discharge passage 190 through which the liquid discharged from the pump chambers P1, P2 is brought to the outlet 131c. A thermal resistance layer 500 is provided on a surface 180, 181 of a wall that is in contact with the liquid in the pump chamber P1, P2. The thermal resistance layer is made of a material (e.g. PTFE) having a thermal conductivity lower than the material of the wall 180, 181.

Abstract: A liquid supply system providing a stable pump operation even when ultra-low temperature liquid including slurry is set as a liquid feed target. The liquid supply system that supplies ultra-low temperature liquid including a slurry component by expansion and contraction of bellows 41 and 42. At least a region in the bellows 41 and 42 that is in contact with the liquid is coated with resin having a low temperature brittle temperature that is equal to or lower than an operating temperature of the liquid supply system.

Abstract: A liquid supply system that can be cooled efficiently. The liquid supply system 10 includes a container 130 having an inlet 131b and an outlet 131c for liquid and provided with a pump chamber P1, P2 inside it, an outlet pipe 320 through which liquid discharged from the outlet 131c is brought to outside, a fluid channel through which liquid flows, the fluid channel leading out of the inlet 131b, passing through the pump chamber P1, P2, and extending vertically downward from the pump chamber P1, P2 to the outlet 131c, and a gas vent pipe 602 connecting a first orifice 601 and a second orifice 604, the first orifice 601 being disposed in the fluid channel and the second orifice 604 being disposed in the fluid channel downstream of the first orifice 601. The second orifice 604 is located at vertically higher level than the first orifice 601.

Abstract: A liquid supply system that can prevent or reduce the occurrence of cavitation without an increase in the overall size of the apparatus. The liquid supply system includes a first pump chamber P1 formed by a space surrounding the outer circumference of a first bellows 141, a second pump chamber P2 formed by a space surrounding the outer circumference of a second bellows 142, a first check valve 160A provided in a fluid passage passing through the first pump chamber P1 to block backflow of fluid, and a second check valve 160B provided in a fluid passage passing through the second pump chamber P2 to block backflow of fluid. The first check valve 160A and the second check valve 160B are both provided in the container 130 and disposed on the side opposite to an actuator 110 that drives a shaft member 120, with respect to the shaft member 120.

Abstract: A liquid supply system that can be cooled efficiently. The liquid supply system 10 includes a container having an inlet 131b and an outlet 131c for liquid and provided with pump chambers P1, P2 inside it, supply passages 131e, 131Xc through which the liquid flowing in through the inlet 131b is supplied to the pump chambers P1, P2, and a discharge passage 131Xd through which the liquid discharged from the pump chambers P1, P2 is brought to the outlet 131c. Portions 180, 181 of an inner surface of the liquid supply system 10 that are in contact with the liquid are each provided with an increased surface structure 400 having an increased liquid contact area and extending along the direction L1, L2 of flow of the liquid.

Abstract: A heat insulation structure and a liquid supply system that can prevent breakage of a heat insulation member while providing satisfactory heat insulation. The heat insulation structure includes heat insulation members 520 provided between two components and having heat conductivity lower than the two components and a slidable member 530 slidable on the heat insulation member 520. At least two of the heat insulation members 520 are arranged along the direction of compression by the two components, and at least one of the slidable member 530 is disposed between the heat insulation members which are adjacent to each other. The heat insulation members 520 and the slidable member 530 are allowed to be displaced in directions perpendicular to the direction of compression.

Abstract: A liquid supply system that can supply liquid efficiently with reduced time needed for precooling. The liquid supply system includes a first fluid channel through which cryogenic liquid flows from an inlet 130b to an outlet 130c via a first pump chamber P1 and a second fluid channel through which cryogenic liquid flows from the inlet 130b to the outlet 130c via a second pump chamber P2. The height of the location at which the direction of the first fluid channel changes from the vertically upward direction to the vertically downward direction and the location at which the direction of the second fluid channel changes from the vertically upward direction to the vertically downward direction are the same.

Abstract: A liquid supply system that enables a reduction in time required for precooling to reduce the time taken to make a pump operable. A container 130 includes a first casing 131 in which fluid passages passing through a first pump chamber P1 and a second pump chamber P2 are provided and a second casing 132 that surrounds the outer wall of the first casing 131. A space (fourth space K4) between the first casing 131 and the second casing 132 is configured to allow a cryogenic liquid for precooling to flow through it.

Abstract: A liquid supply system includes first and second bellows 41 and 42 arranged in series in an expanding/contracting direction thereof in a vessel 12 and having first end portions respectively, which are close to each other and fixed to an inner wall of the vessel 12, and also having second end portions respectively, which are distant from each other and movable in the expanding/contracting direction. An inner space of the vessel 12 located outside the first bellows 41 serves as a first pump chamber P1. An inner space of the vessel 12 located outside the second bellows 42 serves as a second pump chamber P2. An inner space of the vessel 12 located inside the first and second bellows 41 and 42 serves as a sealed space R1. A shaft 15 to which the respective second end portions of the first and second bellows 41 and 42 are fixed is reciprocally moved to expand/contract the first and second bellows 41 and 42.

Abstract: Provided is a liquid supply system that can suppress a functional decline of relief valves and improve cooling efficiency. The system includes a sealed container (110), a pump (120) disposed in a cryogenic liquid (L) contained inside the sealed container (110) and driven by a linear actuator (130), a first conduit (K1) for directing the cryogenic liquid (L) pumped out by the pump (120) to a cooled device (300) provided outside the sealed container (110), a second conduit (K2) for returning the cryogenic liquid (L) from the cooled device (300) into the sealed container (110), and a relief valve (170) that is connected to the first conduit (K1) within the sealed container (110) and releases the cryogenic liquid (L) into the sealed container (110).

Abstract: A liquid supply system providing a stable pump operation even when ultra-low temperature liquid including slurry is set as a liquid feed target. The liquid supply system that supplies ultra-low temperature liquid including a slurry component by expansion and contraction of bellows 41 and 42. At least a region in the bellows 41 and 42 that is in contact with the liquid is coated with resin having a low temperature brittle temperature that is equal to or lower than an operating temperature of the liquid supply system.

Abstract: A liquid supply system includes first and second bellows 41 and 42 arranged in series in an expanding/contracting direction thereof in a vessel 12 and having first end portions respectively, which are close to each other and fixed to an inner wall of the vessel 12, and also having second end portions respectively, which are distant from each other and movable in the expanding/contracting direction. An inner space of the vessel 12 located outside the first bellows 41 serves as a first pump chamber P1. An inner space of the vessel 12 located outside the second bellows 42 serves as a second pump chamber P2. An inner space of the vessel 12 located inside the first and second bellows 41 and 42 serves as a sealed space R1. A shaft 15 to which the respective second end portions of the first and second bellows 41 and 42 are fixed is reciprocally moved to expand/contract the first and second bellows 41 and 42.

Abstract: Provided is a liquid supply system that can suppress a functional decline of relief valves and improve cooling efficiency. The system includes a sealed container (110), a pump (120) disposed in a cryogenic liquid (L) contained inside the sealed container (110) and driven by a linear actuator (130), a first conduit (K1) for directing the cryogenic liquid (L) pumped out by the pump (120) to a cooled device (300) provided outside the sealed container (110), a second conduit (K2) for returning the cryogenic liquid (L) from the cooled device (300) into the sealed container (110), and a relief valve (170) that is connected to the first conduit (K1) within the sealed container (110) and releases the cryogenic liquid (L) into the sealed container (110).