Abstract: A substrate processing method is provided. The method comprises a first step of supplying a processing gas containing a halogen-containing gas and a basic gas to a substrate, which a silicon film is formed on and has a first temperature, and generating a reaction product by deforming a surface of the silicon film; and a second step of removing the reaction product by setting the substrate to a second temperature after the first step.

Abstract: A TCP/IP (Transmission Control Protocol/Internet Protocol) communication system includes a provider side unit to which a first communication terminal is operatively connected through a line network; and a mobile switching controller to which a second communication terminal is operatively connected. The mobile switching controller includes first and second termination circuits, a detecting unit, a line signal circuit and a switch. The first termination circuit is connected between the mobile switching controller and the provider side unit to transfer data on a first channel from the second communication terminal to the first communication terminal. The second termination circuit is connected between the mobile switching controller and the provider side unit to transfer data on a second channel from the first communication terminal to the second communication terminal.

Abstract: A selection method of a handoff system in a CDMA radio data communication system, which is capable of selecting one of a hard handoff system and a soft handoff system depending on situations of a call, is provided. The mobile station informs presence or absence of own agent for application to be used in the communication to a radio base station control equipment when sending a call connection request signal. The radio base station control equipment recognizes the kind of the agent in the mobile station and confirms if a corresponding agent is provided in an agent server. The mobile station determines a handoff system depending on a condition that the agent can be used in the communication or not. The hard handoff system is selected when the agent can be used, and the soft handoff is selected when the agent cannot be used.

Abstract: In a base station controller 20, each of header addition/deletion units 250 through 252 corresponding to base stations serially connected to a shared communication line 60 adds to a communication signal transmitted to a particular base station a header having an address identifier specific to the particular base station to produce a communication signal cell. A cell collection/distribution unit 260 cell-multiplexes the communication signal cells to produce a cell-multiplexed signal which is transmitted through a transmission unit 270 to the base stations serially connected. Each base station checks the headers of the communication signal cells supplied thereto and acquires the communication cell having the address identifier specific to the base station itself. The remaining cells are transferred through the shared communication line to the next base station serially connected.

Abstract: A TCP/IP (Transmission Control Protocol/Internet Protocol) communication system includes a provider side unit to which a first communication terminal is operatively connected through a line network; and a mobile switching controller to which a second communication terminal is operatively connected. The mobile switching controller includes first and second termination circuits, a detecting unit, a line signal circuit and a switch. The first termination circuit is connected between the mobile switching controller and the provider side unit to transfer data on a first channel from the second communication terminal to the first communication terminal. The second termination circuit is connected between the mobile switching controller and the provider side unit to transfer data on a second channel from the first communication terminal to the second communication terminal.

Abstract: In a data communication system, the controller of a mobile switching center is initially responsive to a request message from a mobile user for supplying a single-bit setup message to an interworking unit via a signaling channel exclusively associated with a data channel. In response, the interworking unit activates an associated network DCE within the mobile switching center and returns a single-bit first response message to the controller. In response, the controller returns an ACK message to the mobile user to allow the data channel to be established between the mobile user and the local DCE. When the data channel is established, the interworking unit returns a single-bit second response message to the controller to allow the data channel to extend to a destination DCE and allow handshaking to proceed between the network DCE and the destination DCE via the interworking unit, using the network DCE as a local DCE of the mobile user.

Abstract: The present invention provides an apparatus of stuff synchronization frame control which can realize great improvement in the power of error resistance of the stuff synchronization control bit when there occur so many erroneous stuff synchronization control bits that cannot be repaired even by the majority process in a radio section. Radio-side and network-side clocks from the clock counters 11 and 12 are compared by the comparator 13, and the comparison result is inputted into the register 14. On an entry of a new stuff synchronization control bit into the register 14, the stuff synchronization control bit in the frame immediately before the entry is stored in the register 15. The multiplexer 16 multiplexes the stuff synchronization control bit together with transmission data for transmission. The separator 21 receives the data separated from the received data, in the received data buffer 22.

Abstract: Each of a terminal adapter and a switching equipment ancillary device has a protocol controller for analyzing and controlling a communication protocol control signal transmitted from a data terminal, so that a modem interface can directly be set to an originate mode or an answer mode. As a mobile station has no modem function, the switching equipment ancillary device and a modem terminal are synchronized with each other by a clock signal, and transmit and receive data therebetween. A transmission delay caused by a retransmission effected under error correction control on a communication line is adjusted by flow control between the modem interface and the modem terminal.