Abstract: A method for manufacturing a bimorph type piezoelectric element including a first step of providing a first piezoelectric single-crystal plate having a first surface and a second surface; a second step of providing a second piezoelectric single-crystal plate having a third surface and a fourth surface; a third step of directly bonding the third surface of the second piezoelectric single-crystal plate to the first surface of the first piezoelectric single-crystal plate without using any adhesives; a fourth step of forming a freely vibrating part by grinding away the second surface of the first piezoelectric single-crystal plate to a first depth and with a first spacing; and a fifth step of producing an element having a supporting member and the freely vibrating part by cutting the first piezoelectric single-crystal plate and second piezoelectric single-crystal plate with the freely vibrating part included, which have been prepared in the fourth step, with a predetermined spacing and at least in one of the dire

Abstract: The present invention relates to a bimorph type piezoelectric acceleration sensor used in detecting vibrations of a variety of equipment such as a hard disk, CD-ROM and the like and has the objective of providing a bimorph type piezoelectric element for acceleration sensor of a small size, high sensitivity, a narrow range of sensitivity variation and a low cost by forming a freely vibrating part and a supporting means at the same time in single-piece construction through a grinding away process applied to lithium niobate. One section of a structure formed of two of a lithium niobate single-crystal plate directly bonded together with the polarization directions thereof reversed each other is applied with a grinding away process to produce a freely vibrating part (32a) and the remaining section, where no grinding away process has been applied, serves as a supporting member (33a), thus both being formed simultaneously and made integral with each other, and electrodes (31a, 31b) are formed by electroless plating.

Abstract: The present invention relates to a bimorph type piezoelectric acceleration sensor used in detecting vibrations of a variety of equipment such as a hard disk, CD-ROM and the like and has the objective of providing a bimorph type piezoelectric element for acceleration sensor of a small size, high sensitivity, a narrow range of sensitivity variation and a low cost by forming a freely vibrating part and a supporting means at the same time in single-piece construction through a grinding away process applied to lithium niobate. One section of a structure formed of two of a lithium niobate single-crystal plate directly bonded together with the polarization directions thereof reversed each other is applied with a grinding away process to produce a freely vibrating part (32a) and the remaining section, where no grinding away process has been applied, serves as a supporting member (33a), thus both being formed simultaneously and made integral with each other, and electrodes (31a, 31b) are formed by electroless plating.