Patents by Inventor Kl-HO BAE

Kl-HO BAE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CHEMICAL MECHANICAL POLISHING MACHINE AND POLISHING HEAD ASSEMBLY
    Publication number: 20160129549
    Abstract: A chemical mechanical polishing machine includes a polishing head assembly including a polishing head body and a membrane disposed at a bottom of the polishing head body. The bottom surface of the membrane includes a hydrophobic area and a hydrophilic area.
    Type: Application
    Filed: January 5, 2016
    Publication date: May 12, 2016
    Inventors: IN-KWON KIM, KYUNG-HYUN KIM, Kl-JONG PARK, Kl-HO BAE, JONG-HEUN LIM