Patents by Inventor Klaas Peter Boonstra

Klaas Peter Boonstra has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Earthquake protection for semiconductor processing equipment
    Patent number: 6573198
    Abstract: A wafer processing apparatus is provided with a wafer carrier comprising a doorplate, a pedestal including one or more legs to support the pedestal on the doorplate, and a wafer rack positionable on the pedestal. A pedestal lock is connected to the doorplate and is selectively engageable with at least one of the legs to lock the pedestal to the doorplate. A lock is further provided to selectively engage at least one of the wafer rack and the pedestal to lock the wafer rack to the pedestal. The pedestal is thereby prevented from falling off of the doorplate, and the wafer rack is prevented from falling off of the pedestal, during earthquake-induced vibrations and accelerations.
    Type: Grant
    Filed: October 10, 2001
    Date of Patent: June 3, 2003
    Assignee: ASM International N.V.
    Inventors: Klaas Peter Boonstra, Christianus Gerardus Maria de Ridder
  • Earthquake protection for semiconductor processing equipment
    Publication number: 20030068219
    Abstract: A wafer processing apparatus is provided with a wafer carrier comprising a doorplate, a pedestal including one or more legs to support the pedestal on the doorplate, and a wafer rack positionable on the pedestal. A pedestal lock is connected to the doorplate and is selectively engageable with at least one of the legs to lock the pedestal to the doorplate. A lock is further provided to selectively engage at least one of the wafer rack and the pedestal to lock the wafer rack to the pedestal. The pedestal is thereby prevented from falling off of the doorplate, and the wafer rack is prevented from falling off of the pedestal, during earthquake-induced vibrations and accelerations.
    Type: Application
    Filed: October 10, 2001
    Publication date: April 10, 2003
    Inventors: Klaas Peter Boonstra, Christianus Gerardus Maria de Ridder