Patents by Inventor Klaus Brunwinkel

Klaus Brunwinkel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Anamorphotic solid-sate laser
    Patent number: 7573930
    Abstract: A laser system, which is used in material processing to produce a radiation line of small width and uniform high intensity in the longitudinal direction, produces radiation that has different mode numbers M2 perpendicular to the propagation direction.
    Type: Grant
    Filed: June 14, 2007
    Date of Patent: August 11, 2009
    Assignee: Innovavent GmbH
    Inventors: Günter Hollemann, Peter Heist, Peter Oesterlin, Berthold Burghardt, Hans-Jürgen Kahlert, Klaus Brunwinkel, Henning Schmidt, Thomas Gabler, Ulf Krause
  • Anamorphotic solid-sate laser
    Publication number: 20080310462
    Abstract: A laser system, which is used in material processing to produce a radiation line of small width and uniform high intensity in the longitudinal direction, produces radiation that has different mode numbers M2 perpendicular to the propagation direction.
    Type: Application
    Filed: June 14, 2007
    Publication date: December 18, 2008
    Inventors: Gunter Hollemann, Peter Heist, Peter Oesterlin, Berthold Burghardt, Hans-Jurgen Kahlert, Klaus Brunwinkel, Henning Schmidt, Thomas Gabler, Ulf Krause
  • Device and method for homogenising laser radiation and laser system using such a device and such a method
    Publication number: 20060062127
    Abstract: In a device and a method for homogenising laser radiation with a homogeniser, the relative position and/or direction between the laser radiation and the homogeniser or an effect of the homogeniser is measured in order to adjust the said relative position and/or direction as a function of the measurement signal.
    Type: Application
    Filed: August 19, 2005
    Publication date: March 23, 2006
    Inventors: Berthold Burghardt, Herning Schmidt, Peter Oesterlin, Klaus Brunwinkel
  • Means and method for controlling the intensity distribution of a laser beam
    Patent number: 6548781
    Abstract: An apparatus and a method for controlling the intensity distribution of a laser beam for processing a substrate provide that the laser radiation passes a homogenizing device, subsequent to which partial beams of the laser beam superimpose one another so that a homogenization of the intensity distribution of the laser beam is achieved. By arrangement of a diaphragm at a position in the radiation path of the laser beam, radiation is cut out off the partial beams superimposing one another in such a way that varied portions of at least some of the partial beams are cut out.
    Type: Grant
    Filed: March 30, 2000
    Date of Patent: April 15, 2003
    Assignee: Microlas Lasersystem GmbH
    Inventor: Klaus Brunwinkel
  • Very stable excimer or molecular fluorine laser
    Patent number: 6243405
    Abstract: A technique of stabalizing during operation a gas mixture with a gas composition initially provided within a discharge chamber of an excimer or molecular fluorine gas discharge laser includes monitoring a temporal pulse shape of the laser beam and adjusting and/or determining the status of the gas mixture based on the monitored temporal pulse shape. The monitored temporal pulse shape is preferably compared with a reference temporal pulse shape. The difference or deviation between the monitored temporal pulse shape and a reference temporal pulse shape is calculated. The amount of and intervals between gas replenishment actions are determined based on the calculated deviation. The energy of the beam is also monitored and the driving voltage and gas actions are adjusted to stabilize the energy, energy stability and/or energy dose.
    Type: Grant
    Filed: January 18, 2000
    Date of Patent: June 5, 2001
    Assignee: Lambda Physik AG
    Inventors: Stefan Borneis, Klaus Brunwinkel, Uwe Stamm, Frank Voss