Patents by Inventor Klaus H. Pfeifer

Klaus H. Pfeifer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Deplating contacts in an electrochemical plating apparatus
    Patent number: 8500968
    Abstract: An electroplating apparatus having improved contact deplating features includes a bowl assembly having a bowl for holding an electroplating solution. A head having a rotor including a contact ring and a head motor for rotating the rotor cooperates with the bowl assembly during plating operations. A lift/rotate actuator may be used to move the head to position a sector of the contact ring in a ring slot or opening of a deplating module. Since the deplating is performed within the deplating module, and not within the bowl assembly, the electroplating solution in the bowl assembly is not affected by the deplating process.
    Type: Grant
    Filed: August 13, 2010
    Date of Patent: August 6, 2013
    Assignee: Applied Materials, Inc.
    Inventors: Daniel J. Woodruff, Nolan L. Zimmerman, John L. Klocke, Klaus H. Pfeifer, Kyle M. Hanson, Matthew Herset
  • DEPLATING CONTACTS IN AN ELECTROCHEMICAL PLATING APPARATUS
    Publication number: 20120037495
    Abstract: An electroplating apparatus having improved contact deplating features includes a bowl assembly having a bowl for holding an electroplating solution. A head having a rotor including a contact ring and a head motor for rotating the rotor cooperates with the bowl assembly during plating operations. A lift/rotate actuator may be used to move the head to position a sector of the contact ring in a ring slot or opening of a deplating module. Since the deplating is performed within the deplating module, and not within the bowl assembly, the electroplating solution in the bowl assembly is not affected by the deplating process.
    Type: Application
    Filed: August 13, 2010
    Publication date: February 16, 2012
    Inventors: Daniel J. Woodruff, Nolan L. Zimmerman, John L. Klocke, Klaus H. Pfeifer, Kyle M. Hanson