Patents by Inventor Klaus Hessenauer

Klaus Hessenauer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Multipole lens, charged-particle beam instrument fitted with multipole lenses, and method of fabricating multipole lens
    Patent number: 7012261
    Abstract: A multipole lens producing less magnetic field variations is offered. Also, a charged-particle beam instrument fitted with such multipole lenses is offered. The multipole lens has plural polar elements, an annular holding member, and an annular yoke disposed outside the holding member. Each polar element has a held portion and a base-end portion. The held portions of the polar elements are held by the holding member. The yoke is magnetically coupled to the base-end portions of the polar elements. The yoke is provided with openings extending circumferentially. The base-end portions of the polar elements are positioned in the openings.
    Type: Grant
    Filed: June 23, 2004
    Date of Patent: March 14, 2006
    Assignee: JEOL, Ltd.
    Inventors: Eiji Kawai, Joachim Zach, Klaus Hessenauer
  • Multipole lens, charged-particle beam instrument fitted with multipole lenses, and method of fabricating multipole lens
    Publication number: 20050029466
    Abstract: A multipole lens producing less magnetic field variations is offered. Also, a charged-particle beam instrument fitted with such multipole lenses is offered. The multipole lens has plural polar elements, an annular holding member, and an annular yoke disposed outside the holding member. Each polar element has a held portion and a base-end portion. The held portions of the polar elements are held by the holding member. The yoke is magnetically coupled to the base-end portions of the polar elements. The yoke is provided with openings extending circumferentially. The base-end portions of the polar elements are positioned in the openings.
    Type: Application
    Filed: June 23, 2004
    Publication date: February 10, 2005
    Applicant: JEOL Ltd.
    Inventors: Eiji Kawai, Joachim Zach, Klaus Hessenauer