Abstract: A substrate-treating apparatus includes: a plurality of modules disposed along a first direction, each of the plurality of modules having an inner space for containing a substrate; a transfer unit transferring the substrate among the plurality of modules, the transfer unit including at least one track disposed along the first direction and at least one movable transfer chamber moving along the at least one track; and a gate valve fixed to each of the plurality of modules and combined with the at least one movable transfer chamber. The at least one movable transfer chamber is isolated from an exterior atmosphere while moving.

Abstract: A substrate-treating apparatus including: a plurality of modules disposed along a first direction, each of the plurality of modules having an inner space for containing a substrate; and a transfer unit transferring the substrate among the plurality of modules, the transfer unit including at least one track disposed along the first direction and at least one movable transfer chamber moving along the at least one track, wherein the at least one movable transfer chamber is atmospherically isolated from an exterior while moving.

Abstract: A substrate-treating apparatus includes: a plurality of modules disposed along a first direction, each of the plurality of modules having an inner space containable a substrate; a transfer unit transferring the substrate among the plurality of modules, the transfer unit including at least one track disposed along the first direction and at least one movable transfer chamber moving along the at least one track; and a gate valve fixed to each of the plurality of modules and combined with the at least one movable transfer chamber, wherein the at least one movable transfer chamber is atmospherically isolated from an exterior while moving.

Abstract: A substrate-treating apparatus includes: a plurality of modules disposed along a first direction, each of the plurality of modules having an inner space containable a substrate; a transfer unit transferring the substrate among the plurality of modules, the transfer unit including at least one track disposed along the first direction and at least one movable transfer chamber moving along the at least one track; and a gate valve fixed to each of the plurality of modules and combined with the at least one movable transfer chamber, wherein the at least one movable transfer chamber is atmospherically isolated from an exterior while moving.

Abstract: A substrate-treating apparatus including: a plurality of modules disposed along a first direction, each of the plurality of modules having an inner space containable a substrate; and a transfer unit transferring the substrate among the plurality of modules, the transfer unit including at least one track disposed along the first direction and at least one movable transfer chamber moving along the at least one track, wherein the at least one movable transfer chamber is atmospherically isolated from an exterior while moving.

Abstract: A substrate-treating apparatus includes: a plurality of modules disposed along a first direction, each of the plurality of modules having an inner space containable a substrate; a transfer unit transferring the substrate among the plurality of modules, the transfer unit including at least one track disposed along the first direction and at least one movable transfer chamber moving along the at least one track; and a gate valve fixed to each of the plurality of modules and combined with the at least one movable transfer chamber, wherein the at least one movable transfer chamber is atmospherically isolated from an exterior while moving.

Abstract: A magnetic valve for liquid and gaseous media having a flatbody slide valve which can slide with the aid of electromagnetic force between two planar-parallel slide surfaces. The slide surfaces include control openings. The slide valve comprises a core polarized by at least one stationary permanent magnet with at least one opening in the core being perpendicular to the planar-parallel slide surfaces. A pressure chamber is formed in the core with ends at both sides of the chamber. A cover surface borders an end wall of the chamber. At least two pair of corresponding control openings are inversely disposed. A connection bore having an opening at either end is in fluid communication with the pressure chamber. The edges of the bore openings serve to form control edges for the at least two pairs of control openings.

Abstract: A solenoid-operated pressure-fluid valve for reversible control of both supply and exhaust functions of a double-acting fluid-pressure device. A valve body has an inlet port communicating with an inlet chamber and an exhaust-outlet port communicating with an outlet chamber. The valve body has first and second control-port connections for connection to the respective control ports of the double-acting device, and each of these connections communicates with a valve seat in each of the chambers. A rocker arm is pivoted between the two chambers and carries two valve members in each of the two chambers.

Abstract: A solenoid valve for liquid and gaseous media whose valve closure piece or pieces (24) can be actuated by an armature (20') which is movable relative to the valve seat or seats (18, 19) is disclosed. The armature lies in the magnetic field of at least one electromagnet (4, 5) and of at least one permanent magnet (10) arranged outside the field of the electromagnet. The valve is closed via the armature (20') and has operating air gaps which change in opposite directions upon a movement of the armature. The electromagnet is provided with a core (4) whose ends form three magnet poles (10, 11, 12). The armature (20') which contains the permanent magnet (21) has two pole pieces (20') which extend between the three magnet poles (10, 11, 12) of the electromagnet to form four operating air gaps, the pole pieces being combined with the permanent magnet and connected with them to form as assembly.