Abstract: Fourier Transformation Spectrometer, FT Spectrometer, comprising: Michelson-Type Interferometer (601, 602, 603, 604, 605, 606, 607, 608, 609) comprising: at least one beam splitter unit designed to split an incident light beam (EB) of a spatially expanded object into a first partial beam (TB1) and a second partial beam (TB2); and for at least partially overlaying the first partial beam (TB1) and the second partial beam (TB2) with a lateral shear (s); a first beam deflection unit designed to deflect the first partial beam (TB1) at least once; a second beam deflection unit designed to deflect the second partial beam (TB2) at least once; wherein at least one among the first beam deflection unit and the second beam deflection unit represents a (2n+1) periscope group with (2n+1) mirror surfaces, and all (2n+1) mirror surfaces are arranged vertically in relation to a common reference plane, in order to respectively deflect the first partial beam (TB1) and/or the second partial beam (TB2) (2n+1) times, and wherein t

Abstract: Fourier Transformation Spectrometer, FT Spectrometer, comprising: A double beam interferometer, comprising: At least one beam splitter unit (622; 623; 624, 625, 626, 627; 636; 673, 674, 675) for splitting an incident light beam (EB) of a spatially expanded object into a first partial beam (TB1) and a second partial beam (TB2); at least a first beam deflection unit (630; 641; 651; 661; 697) designed to deflect the first partial beam (TB1) at least a first and a second time, wherein the second beam deflection unit (630) is designed to also deflect the second partial beam (TB2) at least at first and a second time; or the double beam interferometer comprises a second beam deflection unit (642; 652; 662) designed to deflect the second partial beam (TB2) at least a first and a second time, wherein the beam deflection unit is also designed to at least partially spatially overlay the first partial beam (TB1) and the second partial beam (TB2), and the respectively first and second deflection of the first partial beam

Abstract: The present invention relates to a method and an assembly for chromatic confocal spectral interferometery, in particular also for spectral domain OCT (SD-OCT) using multi-spectral light. A multiple (e.g. two, three, four, etc.) axial splitting of foci in the interferometric object arm is performed using a multifocal (e.g. bifocal, trifocal, quattro-focal, etc.) optical component, forming thereby at least two, three or even several groups of chromatically split foci in the depth direction. The multifocal optical component is made of a diffractive optical element (712) and a Schwarzschild objective (5). At least two, three, four or even more differently colored foci of different groups of foci coincide in at least one confocal point in the object space of the setup.

Abstract: The present invention relates to an arrangement and a method for single-shot interferometry which can be used for detecting distance, profile, shape, undulation, roughness or the optical path length in or on optically rough or smooth objects or else for optical coherence tomography (OCT). The arrangement comprises a light source, an interferometer, in which an end reflector is arranged in the reference beam path, and also a detector for detecting an interferogram. In the reference beam path of the interferometer, the end reflector can be embodied with three plane reflecting surfaces as a prism mirror or air mirror assembly in order to generate between reference and object beams a lateral shear of magnitude delta_q for obtaining a spatial interferogram. The embodiment of said assembly with regard to the angles and the arrangement of the reflecting surfaces makes possible a large aperture angle for a high numerical aperture.

Abstract: Fourier Transformation Spectrometer, FT Spectrometer, comprising: A double beam interferometer, comprising: At least one beam splitter unit (622; 623; 624, 625, 626, 627; 636; 673, 674, 675) for splitting an incident light beam (EB) of a spatially expanded object into a first partial beam (TB1) and a second partial beam (TB2); at least a first beam deflection unit (630; 641; 651; 661; 697) designed to deflect the first partial beam (TB1) at least a first and a second time, wherein the second beam deflection unit (630) is designed to also deflect the second partial beam (TB2) at least at first and a second time; or the double beam interferometer comprises a second beam deflection unit (642; 652; 662) designed to deflect the second partial beam (TB2) at least a first and a second time, wherein the beam deflection unit is also designed to at least partially spatially overlay the first partial beam (TB1) and the second partial beam (TB2), and the respectively first and second deflection of the first partial beam

Abstract: Fourier Transformation Spectrometer, FT Spectrometer, comprising: Michelson-Type Interferometer (601, 602, 603, 604, 605, 606, 607, 608, 609) comprising: at least one beam splitter unit designed to split an incident light beam (EB) of a spatially expanded object into a first partial beam (TB1) and a second partial beam (TB2); and for at least partially overlaying the first partial beam (TB1) and the second partial beam (TB2) with a lateral shear (s); a first beam deflection unit designed to deflect the first partial beam (TB1) at least once; a second beam deflection unit designed to deflect the second partial beam (TB2) at least once; wherein at least one among the first beam deflection unit and the second beam deflection unit represents a (2n+1) periscope group with (2n+1) mirror surfaces, and all (2n+1) mirror surfaces are arranged vertically in relation to a common reference plane, in order to respectively deflect the first partial beam (TB1) and/or the second partial beam (TB2) (2n+1) times, and wherein t

Abstract: The present invention relates to an arrangement and a method for single-shot interferometry which can be used for detecting distance, profile, shape, undulation, roughness or the optical path length in or on optically rough or smooth objects or else for optical coherence tomography (OCT). The arrangement comprises a light source, an interferometer, in which an end reflector is arranged in the reference beam path, and also a detector for detecting an interferogram. In the reference beam path of the interferometer, the end reflector can be embodied with three plane reflecting surfaces as a prism mirror or air mirror assembly in order to generate between reference and object beams a lateral shear of magnitude delta_q for obtaining a spatial interferogram. The embodiment of said assembly with regard to the angles and the arrangement of the reflecting surfaces makes possible a large aperture angle for a high numerical aperture.

Abstract: Proposed are an arrangement and a method for depth-scanning strip triangulation with internal or external depth scan, particularly also for the 3D shape measurement in microscopy and mesoscopy. The robustness of the measurement with wavelet signal generation from an image stack is to be increased. The occurrence of the known and very undesirable 2Pi phase jumps in the phase map is to be avoided as much as possible. To do this, with a measurement instead of a wavelet at least two wavelets with contrast envelope are generated. This is done by a concurrent—then preferably with spectral separation—or by a sequential projection of two strip images with different triangulation wavelengths on the measured object.

Abstract: The present invention relayes to a method and an assembly for chromatic confocal spectral interferometery, in particular also for spectral domain OCT (SD-OCT) using multi-spectral light. A multiple (e.g. two, three, four, etc.) axial splitting of foci in the interferometric object arm is performed using a multifocal (e.g. bifocal, trifocal, quattro-focal, etc.) optical component, forming thereby at least two, three or even several groups of chromatically split foci in the depth direction. The multifocal optical component is made of a diffractive optical element (712) and a Schwarzschild objective (5). At least two, three, four or even more differently colored foci of different groups of foci coincide in at least one confocal point in the object space of the setup.

Abstract: Proposed are an arrangement and a method for depth-scanning strip triangulation with internal or external depth scan, particularly also for the 3D shape measurement in microscopy and mesoscopy. The robustness of the measurement with wavelet signal generation from an image stack is to be increased. The occurrence of the known and very undesirable 2Pi phase jumps in the phase map is to be avoided as much as possible. To do this, with a measurement instead of a wavelet at least two wavelets with contrast envelope are generated. This is done by a concurrent—then preferably with spectral separation—or by a sequential projection of two strip images with different triangulation wavelengths on the measured object.

Abstract: The present invention relates to a method and an apparatus for establishing residual stresses in objects, in particular in coated objects, and to a method and an apparatus for coating objects. The method comprises: impinging a surface (8) of the object (5) with laser light and generating a hole or a pattern of holes and/or locally heated points in the object (5); establishing the surface deformations by an optical deforming measuring method after the object (5) is impinged by laser light; establishing the residual stresses present in the object (5) from the measured surface deformations, wherein the generation of the hole pattern is carried out by an optical scanning apparatus which comprises an optical deflection and/or modulation arrangement for controllable deflection and/or modulation of the laser light, and/or a focusing arrangement for controllable focusing of the laser light.

Abstract: The invention relates to methods and to devices for generating multispectral illuminating light having an addressable spectrum, for adaptive multispectral imaging and for capturing structural and/or topographical information of an object or of the distance to an object. The illuminating device comprises a multispectral light source and a modulator for temporal modulation of the individual spectral components of the multispectral light source having modulation frequencies. The multispectral light source comprises at least one light source having a continuous, quasi-continuous, or frequency comb spectrum and wavelength-dispersive means, or an assembly or array of monochromatic or quasi-monochromatic light sources having emission wavelengths or emission wavelength bands which are different from one another in each case.

Abstract: The present invention relates to a method and an apparatus for establishing residual stresses in objects, in particular in coated objects, and to a method and an apparatus for coating objects. The method comprises: impinging a surface (8) of the object (5) with laser light and generating a hole or a pattern of holes and/or locally heated points in the object (5); establishing the surface deformations by an optical deforming measuring method after the object (5) is impinged by laser light; establishing the residual stresses present in the object (5) from the measured surface deformations, wherein the generation of the hole pattern is carried out by an optical scanning apparatus which comprises an optical deflection and/or modulation arrangement for controllable deflection and/or modulation of the laser light, and/or a focusing arrangement for controllable focusing of the laser light.

Abstract: Disclosed herein is a measuring probe and an arrangement for measuring spectral absorption, preferably in the infrared. Furthermore, the invention relates to a method for spectroscopically measuring absorption. The measuring probe may comprise a cutting apparatus configured to cut a slice or respectively flap off of a sample to be measured; a measuring gap configured to accommodate the sample slice; an optical window element for coupling measuring light into, or respectively out of the measuring gap; and an end reflector designed and arranged to reflect the measuring light propagated through the measuring gap back into the measuring gap. The arrangement for measuring spectral absorption may comprise the measuring probe, a light source and an apparatus for the spectral analysis of the measuring light coupled out of the measuring gap.

Abstract: Disclosed are methods and an assembly for robust one-shot interferometry, in particular for optical coherence tomography according to the spatial domain approach (SD-OCT) and/or according to the light-field approach. In one embodiment, the method and the assembly may be used for measurements on material and living tissue, for distance measurement, for 2D or 3D measurement with a finely structured light source imaged onto the object in a diffraction-limited way, or with spots thereof. The assembly may comprise an interferometer having object and reference arms and a detector for electromagnetic radiation. In other embodiments, during a detection process, a plurality of spatial interferograms may be formed by making an inclined and/or curved reference wavefront interfere with an object wavefront for each measurement point. The resulting spatial interferograms may be detected in a single detector frame and may be further evaluated via a computer program.

Abstract: The invention relates to methods and to devices for generating multispectral illuminating light having an addressable spectrum, for adaptive multispectral imaging and for capturing structural and/or topographical information of an object or of the distance to an object. The illuminating device comprises a multispectral light source and a modulator for temporal modulation of the individual spectral components of the multispectral light source having modulation frequencies. The multispectral light source comprises at least one light source having a continuous, quasi-continuous, or frequency comb spectrum and wavelength-dispersive means, or an assembly or array of monochromatic or quasi-monochromatic light sources having emission wavelengths or emission wavelength bands which are different from one another in each case.

Abstract: Disclosed herein is an apparatus for spectroscopic ellipsometry, preferably for infrared spectroscopic ellipsometry, and a method for spectroscopic ellipsometry employing the apparatus. In some embodiments, the apparatus may comprise a light source (12), a detector (30), a polarizer (40), an analyzer (41), and a measuring probe (10). In one embodiment, the measuring probe may comprise an ATR prism (50) having at least one first surface having at least one measuring portion (M) configured to be brought in optical contact with a measured object (72), and at least one second surface having at least one reflective portion (RX).

Abstract: Disclosed herein is an apparatus for spectroscopic ellipsometry, preferably for infrared spectroscopic ellipsometry, and a method for spectroscopic ellipsometry employing the apparatus. In some embodiments, the apparatus may comprise a light source (12), a detector (30), a polarizer (40), an analyzer (41), and a measuring probe (10). In one embodiment, the measuring probe may comprise an ATR prism (50) having at least one first surface having at least one measuring portion (M) configured to be brought in optical contact with a measured object (72), and at least one second surface having at least one reflective portion (RX).

Abstract: Disclosed herein is a measuring probe, an apparatus, and a method for infrared spectroscopy. In some embodiments the measuring probe may have an elongated form with a first end for coupling and decoupling infrared light into and out of the measuring probe and a second end. In other embodiments, the measuring probe may comprise an attenuated total reflection (ATR) prism arranged at the second end of the measuring probe. The ATR prism may include at least a first surface having at least one measuring portion configured to be brought in optical contact with a measured object. The ATR prism may include at least a second surface having at least one reflective portion. In some embodiments, the ATR prism may include a cutting portion for cutting through the measured object.

Abstract: Disclosed herein is a measuring probe and an arrangement for measuring spectral absorption, preferably in the infrared. Furthermore, the present disclosure relates to a method for spectroscopically measuring absorption. In some embodiments, the measuring probe may comprise a cutting apparatus configured to cut a slice or respectively flap off of a sample to be measured; a measuring gap configured to accommodate the sample slice; an optical window element for coupling measuring light into, or respectively out of the measuring gap; and an end reflector designed and arranged to reflect the measuring light propagated through the measuring gap back into the measuring gap. The arrangement for measuring spectral absorption may comprise the measuring probe, a light source and an apparatus for the spectral analysis of the measuring light coupled out of the measuring gap.