Abstract: Degradation of the reflectivity of one or more reflective optical elements in a system for generating EUV radiation is reduced by the controlled introduction of a gas into a vacuum chamber containing the optical element. The gas may be added to the flow of another gas such as hydrogen or alternated with the introduction of hydrogen radicals.

Abstract: An extreme ultraviolet radiation (EUV) source, including: a vessel having an inner vessel wall and an intermediate focus (IF) region; an EUV collector disposed inside the vessel, the EUV collector including a reflective surface configured to reflect EUV radiation toward the intermediate focus region, the reflective surface configured to directionally face the IF region of the vessel; a showerhead disposed along at least a portion of the inner vessel wall, the showerhead including a plurality of nozzles configured to introduce gas into the vessel; and one or more exhausts configured to remove gas introduced into the vessel, the one or more exhausts being oriented along at least a portion of the inner vessel wall so that the gas is caused to flow away from the EUV collector.

Abstract: A device for treating a product with microwaves includes a treatment chamber, in which the product can be transported along a transport path in a transport direction through the treatment chamber, and a microwave radiation device arranged in the treatment chamber, by means of which microwaves coupled into the microwave radiation device can be radiated, which act on the product, wherein the microwave radiation device includes at least one coaxial conductor which protrudes into the treatment chamber, or is arranged therein, with an electrically-conductive internal conductor and an electrically-conductive external conductor, wherein the external conductor, arranged coaxially, surrounds the internal conductor in a spaced manner and includes at least one opening, which enables an emission of microwaves from the coaxial conductor through the opening on to the product.

Abstract: Degradation of the reflectivity of one or more reflective optical elements in a system for generating EUV radiation is reduced by the controlled introduction of a gas into a vacuum chamber containing the optical element. The gas may be added to the flow of another gas such as hydrogen or alternated with the introduction of hydrogen radicals.

Abstract: An extreme ultraviolet radiation (EUV) source, including: a vessel having an inner vessel wall and an intermediate focus (IF) region; an EUV collector disposed inside the vessel, the EUV collector including a reflective surface configured to reflect EUV radiation toward the intermediate focus region, the reflective surface configured to directionally face the IF region of the vessel; a showerhead disposed along at least a portion of the inner vessel wall, the showerhead including a plurality of nozzles configured to introduce gas into the vessel; and one or more exhausts configured to remove gas introduced into the vessel, the one or more exhausts being oriented along at least a portion of the inner vessel wall so that the gas is caused to flow away from the EUV collector.

Abstract: A method for determining a usability of a household appliance includes scanning operating information of the household appliance, determining stresses of different components of the household appliance on the basis of the operating information, and of determining the usability of the household appliance on the basis of the stresses determined and of predetermined stress functions for the components. Wherein a stress function maps a stress determined to a remaining stress capacity.

Abstract: Systems and methods for communication between heterogenous processors via a virtual network interface implemented via programmable hardware and one or more buses. The programmable hardware may be configured with a multi-function bus such that the programmable hardware appears as both a network device and a programmable device to a host system. Additionally, the programmable hardware may be configured with a second bus to appear as a network device to an embedded system. Each system may implement network drivers to allow access to direct memory access engines configured on the programmable hardware. The configured programmable hardware and the network drivers may enable a virtual network connection between the systems to allow for information transfer via one or more network communication protocols.

Abstract: In a method for operating a household appliance, a communications connection is established between an external operating facility and the household appliance. An application is executed on the external operating facility and configured so as to receive data from and/or to transmit data to the household appliance via the communications connection. An interaction of a user with the application of the external operating facility is detected and the communications connection between the external operating facility and the household appliance is terminated in dependence upon an expiration of a predetermined time interval since a last detected interaction of the user with the application of the external operating facility.

Abstract: Degradation of the reflectivity of one or more reflective optical elements in a system for generating EUV radiation is reduced by the controlled introduction of a gas into a vacuum chamber containing the optical element. The gas may be added to the flow of another gas such as hydrogen or alternated with the introduction of hydrogen radicals.

Abstract: Provided is an optical element for a lithographic apparatus. The optical element includes a capping layer that includes oxygen vacancies therein. The oxygen vacancies prevent attack of the capping layer by preventing hydrogen and other species from penetrating the capping layer and underlying layers. The capping layer provides a low hydrogen recombination rate enabling hydrogen to clean the surface of the optical element. The capping layer may include an alloyed metal, a mixed metal oxide or a doped metal oxide and it may be a ruthenium capping layer that includes one or more dopants therein.

Abstract: Degradation of the reflectivity of one or more reflective optical elements in a system (SO) for generating EUV radiation is reduced by the controlled introduction of a gas into a vacuum chamber (26) containing the optical element. The gas may be added to the flow of another gas such as hydrogen or alternated with the introduction of hydrogen radicals.

Abstract: An amplified optical beam is provided to a region that receives a target including target material, an interaction between the amplified optical beam and the target converting at least some of the target material from a first form to a second form to form a light-emitting plasma; first data comprising information related to the amplified optical beam is accessed; second data comprising information related to the light-emitting plasma is accessed; and an amount of the target material converted from the first form to the second form is determined. The determination is based on at least the first data and the second data, and the second form of the target material is less dense than the first form of the target material.

Abstract: An amplified optical beam is provided to a region that receives a target including target material, an interaction between the amplified optical beam and the target converting at least some of the target material from a first form to a second form to form a light-emitting plasma; first data comprising information related to the amplified optical beam is accessed; second data comprising information related to the light-emitting plasma is accessed; and an amount of the target material converted from the first form to the second form is determined. The determination is based on at least the first data and the second data, and the second form of the target material is less dense than the first form of the target material.

Abstract: A method for determining a usability of a household appliance includes scanning operating information of the household appliance, determining stresses of different components of the household appliance on the basis of the operating information, and of determining the usability of the household appliance on the basis of the stresses determined and of predetermined stress functions for the components. Wherein a stress function maps a stress determined to a remaining stress capacity.

Abstract: Systems and methods for communication between heterogenous processors via a virtual network interface implemented via programmable hardware and one or more buses. The programmable hardware may be configured with a multi-function bus such that the programmable hardware appears as both a network device and a programmable device to a host system. Additionally, the programmable hardware may be configured with a second bus to appear as a network device to an embedded system. Each system may implement network drivers to allow access to direct memory access engines configured on the programmable hardware. The configured programmable hardware and the network drivers may enable a virtual network connection between the systems to allow for information transfer via one or more network communication protocols.

Abstract: The operating device for a vehicle component, in particular a human machine interface (HMI) for vehicles, is provided with a housing, comprising a front wall having a front face in particular with a display surface and a rear face facing away from the front face, and an operating element unit which is positioned and/or can be positioned on and/or in front of the front wall of the housing for manually triggering operating functions and/or for manually adjusting parameters of operating functions for a vehicle component. The operating element unit comprises at least one operating element, a display element and/or a display device, an evaluating and control unit assigned to the at least one operating element and to the display element or the display device, and an energy supply unit.

Abstract: An extreme ultraviolet radiation (EUV) source, including: a vessel having an inner vessel wall and an intermediate focus (IF) region; an EUV collector disposed inside the vessel, the EUV collector including a reflective surface configured to reflect EUV radiation toward the intermediate focus region, the reflective surface configured to directionally face the IF region of the vessel; a showerhead disposed along at least a portion of the inner vessel wall, the showerhead including a plurality of nozzles configured to introduce gas into the vessel; and one or more exhausts configured to remove gas introduced into the vessel, the one or more exhausts being oriented along at least a portion of the inner vessel wall so that the gas is caused to flow away from the EUV collector.

Abstract: Degradation of the reflectivity of one or more reflective optical elements in a system (SO) for generating EUV radiation is reduced by the controlled introduction of a gas into a vacuum chamber (26) containing the optical element. The gas may be added to the flow of another gas such as hydrogen or alternated with the introduction of hydrogen radicals.

Abstract: An extreme ultraviolet radiation (EUV) source, including: a vessel having an inner vessel wall and an intermediate focus (IF) region; an EUV collector disposed inside the vessel, the EUV collector including a reflective surface configured to reflect EUV radiation toward the intermediate focus region, the reflective surface configured to directionally face the IF region of the vessel; a showerhead disposed along at least a portion of the inner vessel wall, the showerhead including a plurality of nozzles configured to introduce gas into the vessel; and one or more exhausts configured to remove gas introduced into the vessel, the one or more exhausts being oriented along at least a portion of the inner vessel wall so that the gas is caused to flow away from the EUV collector.

Abstract: The invention relates to an electrically operatable kitchen device for preparing food by means of one or more effective devices. An effective device can be activated and/or adjusted by a rotary knob and/or push button, and the kitchen device can be deactivated in terms of one or simultaneously more or all of the activated effective devices. The aim of the invention is to provide an electrically operatable kitchen device with an advantageously deactivatable effective device. According to the invention, this is achieved in that the deactivation of the effective device can be triggered depending on the speed at which the rotary knob is moved in the direction of the rotational axis of the rotary knob, in the rotational direction, or in the opposite rotational direction.