Patents by Inventor Klaus Reinhard Freischlad

Klaus Reinhard Freischlad has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Back quartersphere scattered light analysis
    Patent number: 8330947
    Abstract: A surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features back collectors disposed in the back quartersphere, outside the incident plane, for collecting light scattered from the surface of the workpiece. The back collectors are disposed at a relative minimum in the portion of scattered light attributable to haze relative to the portion of scattered light attributable to defect scatter portion, or, alternatively, at a relative minimum in the Rayleigh scatter.
    Type: Grant
    Filed: September 30, 2009
    Date of Patent: December 11, 2012
    Assignee: KLA-Tencor Corporation
    Inventors: Richard Earl Bills, Neil Judell, Klaus Reinhard Freischlad, James Peter McNiven
  • Front Quartersphere Scattered Light Analysis
    Publication number: 20100110419
    Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features, in the front quartersphere, a light channel assembly for collecting light reflected from the surface of the workpiece, and a front collector and wing collectors for collecting light scattered from the surface, to greatly improve the measurement capabilities of the system. The light channel assembly has a switchable edge exclusion mask and a reflected light detection system for improved detection of the reflected light.
    Type: Application
    Filed: September 30, 2009
    Publication date: May 6, 2010
    Applicant: KLA-TENCOR CORPORATION
    Inventors: Richard Earl Bills, Neil Judell, Klaus Reinhard Freischlad, James Peter McNiven
  • System and method for inspecting a workpiece surface by analyzing scattered light in a front quartersphere region above the workpiece
    Patent number: 7605913
    Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features, in the front quartersphere, a light channel assembly for collecting light reflected from the surface of the workpiece, and a front collector and wing collectors for collecting light scattered from the surface, to greatly improve the measurement capabilities of the system. The light channel assembly has a switchable edge exclusion mask and a reflected light detection system for improved detection of the reflected light.
    Type: Grant
    Filed: December 17, 2005
    Date of Patent: October 20, 2009
    Assignee: KLA-Tencor Corporation
    Inventors: Richard Earl Bills, Neil Judell, Klaus Reinhard Freischlad, James Peter McNiven