Abstract: Method for analysis of samples by means of atomic absorption spectroscopy with electrothermal atomization of sample consists of the method steps: (a) introducing a liquid sample into a furnace, (b) heating the furnace up to a drying temperature for drying the sample, (c) subsequently heating the sample up to an atomizing temperature, in which a cloud of atoms develops in the furnace, in which cloud of atoms the components of the sample are present in atomic state, and (d) measurement of the atomic absorption of a measuring light beam with resonance spectral lines of an element looked for in the sample guided through the cloud of atoms. In this method (e), the vapors formed in the furnace during the heating of the furance up to the drying temperature are sucked off by a vacuum. Also, a device for carrying out this method is described.