Patents by Inventor Klaus Roll

Klaus Roll has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 4652358
    Abstract: The invention relates to a cathode system for sputtering apparatus which includes a target plate of ferromagnetic material. A magnet system is situated behind the target plate and has opposed poles positioned so that at least a portion of the lines of force emerging from the poles passes out through the target and returns thereto. The target is placed on a floor which includes strips of ferromagnetic material in the area of the poles of the magnet system. These strips close the magnetic circuit between the magnet system and the target plate. The remainder of the floor is made of nonmagnetic material.
    Type: Grant
    Filed: August 24, 1984
    Date of Patent: March 24, 1987
    Assignee: Leybold-Heraeus GmbH
    Inventors: Gerd Deppisch, Klaus Roll, Karl-Heinz Schuller