Patents by Inventor Klaus Scheugraf

Klaus Scheugraf has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of making a nonvolatile memory device including forming a pillar shaped semiconductor device and a shadow mask
    Patent number: 7579232
    Abstract: A method of making a semiconductor device includes forming a pillar shaped semiconductor device surrounded by an insulating layer such that a contact hole in the insulating layer exposes an upper surface of the semiconductor device. The method also includes forming a shadow mask layer over the insulating layer such that a portion of the shadow mask layer overhangs a portion of the contact hole, forming a conductive layer such that a first portion of the conductive layer is located on the upper surface of the semiconductor device exposed in the contact hole and a second portion of the conductive layer is located over the shadow mask layer, and removing the shadow mask layer and the second portion of the conductive layer.
    Type: Grant
    Filed: July 11, 2008
    Date of Patent: August 25, 2009
    Assignee: SanDisk 3D LLC
    Inventors: Er-Xuan Ping, Randhir Thakur, Klaus Scheugraf