Patents by Inventor Klaus Schimmanz

Klaus Schimmanz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MEMS and method of manufacturing the same
    Patent number: 11186478
    Abstract: A MEMS includes a substrate having a cavity, and a moveable element arranged in the cavity, the moveable element including a first electrode, a second electrode and a third electrode that is arranged between the first electrode and the second electrode and is fixed in an electrically insulated manner from the same at discrete areas. The moveable element is configured to perform a movement along a movement direction in a substrate plan in response to an electric potential between the first electrode and the third electrode or in response to an electric potential between the second electrode and the third electrode. A dimension of the third electrode perpendicular to the substrate plane is lower than a dimension of the first electrode and a dimension of the second electrode perpendicular to the substrate plane.
    Type: Grant
    Filed: August 26, 2019
    Date of Patent: November 30, 2021
    Assignee: FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
    Inventors: Sergiu Langa, Holger Conrad, Klaus Schimmanz
  • MEMS AND METHOD OF MANUFACTURING THE SAME
    Publication number: 20190382257
    Abstract: A MEMS includes a substrate having a cavity, and a moveable element arranged in the cavity, the moveable element including a first electrode, a second electrode and a third electrode that is arranged between the first electrode and the second electrode and is fixed in an electrically insulated manner from the same at discrete areas. The moveable element is configured to perform a movement along a movement direction in a substrate plan in response to an electric potential between the first electrode and the third electrode or in response to an electric potential between the second electrode and the third electrode. A dimension of the third electrode perpendicular to the substrate plane is lower than a dimension of the first electrode and a dimension of the second electrode perpendicular to the substrate plane.
    Type: Application
    Filed: August 26, 2019
    Publication date: December 19, 2019
    Inventors: Sergiu LANGA, Holger CONRAD, Klaus SCHIMMANZ
  • MEMS transducer for interacting with a volume flow of a fluid and method for manufacturing the same
    Patent number: 10457544
    Abstract: A MEMS transducer for interacting with a volume flow of a fluid includes a substrate including a cavity, and an electromechanical transducer connected to the substrate in the cavity and including an element deformable along a lateral movement direction, wherein a deformation of the deformable element along the lateral movement direction and the volume flow of the fluid are causally related.
    Type: Grant
    Filed: December 15, 2017
    Date of Patent: October 29, 2019
    Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
    Inventors: Harald Schenk, Holger Conrad, Matthieu Gaudet, Klaus Schimmanz, Sergiu Langa, Bert Kaiser
  • MEMS TRANSDUCER FOR INTERACTING WITH A VOLUME FLOW OF A FLUID AND METHOD FOR MANUFACTURING THE SAME
    Publication number: 20180179048
    Abstract: A MEMS transducer for interacting with a volume flow of a fluid includes a substrate including a cavity, and an electromechanical transducer connected to the substrate in the cavity and including an element deformable along a lateral movement direction, wherein a deformation of the deformable element along the lateral movement direction and the volume flow of the fluid are causally related.
    Type: Application
    Filed: December 15, 2017
    Publication date: June 28, 2018
    Inventors: Harald SCHENK, Holger CONRAD, Matthieu GAUDET, Klaus SCHIMMANZ, Sergiu LANGA, Bert KAISER
  • Micromechanical device with an actively deflectable element
    Patent number: 9676607
    Abstract: Micromechanical devices include actively deflectable elements. The activation is performed by a layer stack which causes the deflection responsive to attractive forces acting upon the layers of the layer stack.
    Type: Grant
    Filed: April 13, 2016
    Date of Patent: June 13, 2017
    Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
    Inventors: Matthieu Gaudet, Klaus Schimmanz, Michael Stolz, Sergiu Langa, Holger Conrad, Bert Kaiser
  • MICROMECHANICAL DEVICE WITH AN ACTIVELY DEFLECTABLE ELEMENT
    Publication number: 20160304333
    Abstract: Micromechanical devices include actively deflectable elements. The activation is performed by a layer stack which causes the deflection responsive to attractive forces acting upon the layers of the layer stack.
    Type: Application
    Filed: April 13, 2016
    Publication date: October 20, 2016
    Inventors: Matthieu Gaudet, Klaus Schimmanz, Michael Stolz, Sergiu Langa, Holger Conrad, Bert Kaiser