Patents by Inventor Klaus Wurmbrand

Klaus Wurmbrand has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements
    Publication number: 20080068599
    Abstract: In order to optimize the image properties of several optical elements of which at least one is moved relative to at least one stationary optical element, the overall image defect resulting from the interaction of all optical elements is first of all measured. This is represented as a linear combination of the base functions of an orthogonal function set. The movable element is then moved to a new measurement position and the overall image defect is measured once again. After the linear combination representation of the new overall image defect, the image defects of the movable element and of the stationary element are calculated from the data thereby obtained. With only one movable optical element a target position in which the overall image defect is minimized can be directly calculated and adjusted there from. If several movable optical elements are available, methods are given for the efficient determination of the respective target position.
    Type: Application
    Filed: November 16, 2007
    Publication date: March 20, 2008
    Applicant: Carl Zeiss SMT AG
    Inventors: Bernd Geh, Paul Graupner, Thomas Stammler, Dirk Stenkamp, Jochen Stuhler, Klaus Wurmbrand
  • Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements
    Patent number: 7301622
    Abstract: In order to optimize the image properties of several optical elements of which at least one is moved relative to at least one stationary optical element, the overall image defect resulting from the interaction of all optical elements is first of all measured. This is represented as a linear combination of the base functions of an orthogonal function set. The movable element is then moved to a new measurement position and the overall image defect is measured once again. After the linear combination representation of the new overall image defect, the image defects of the movable element and of the stationary element are calculated from the data thereby obtained. With only one movable optical element a target position in which the overall image defect is minimized can be directly calculated and adjusted there from. If several movable optical elements are available, methods are given for the efficient determination of the respective target position.
    Type: Grant
    Filed: July 22, 2005
    Date of Patent: November 27, 2007
    Assignee: Carl Zeiss SMT AG
    Inventors: Bernd Geh, Paul Gräupner, Thomas Stammler, Dirk Stenkamp, Jochen Stühler, Klaus Wurmbrand
  • Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements
    Publication number: 20050254042
    Abstract: In order to optimize the image properties of several optical elements of which at least one is moved relative to at least one stationary optical element, the overall image defect resulting from the interaction of all optical elements is first of all measured. This is represented as a linear combination of the base functions of an orthogonal function set. The movable element is then moved to a new measurement position and the overall image defect is measured once again. After the linear combination representation of the new overall image defect, the image defects of the movable element and of the stationary element are calculated from the data thereby obtained. With only one movable optical element a target position in which the overall image defect is minimized can be directly calculated and adjusted there from. If several movable optical elements are available, methods are given for the efficient determination of the respective target position.
    Type: Application
    Filed: July 22, 2005
    Publication date: November 17, 2005
    Inventors: Bernd Geh, Paul Graupner, Thomas Stammler, Dirk Stenkamp, Jochen Stuhler, Klaus Wurmbrand
  • Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements
    Patent number: 6934011
    Abstract: In order to optimize the image properties of several optical elements of which at least one is moved relative to at least one stationary optical element, the overall image defect resulting from the interaction of all optical elements is first of all measured. This is represented as a linear combination of the base functions of an orthogonal function set. The movable element is then moved to a new measurement position and the overall image defect is measured once again. After the linear combination representation of the new overall image defect, the image defects of the movable element and of the stationary element are calculated from the data thereby obtained. With only one movable optical element a target position in which the overall image defect is minimized can be directly calculated and adjusted there from. If several movable optical elements are available, methods are given for the efficient determination of the respective target position.
    Type: Grant
    Filed: October 30, 2003
    Date of Patent: August 23, 2005
    Assignee: Carl Zeiss SMT AG
    Inventors: Bernd Geh, Paul Gräupner, Thomas Stammler, Dirk Stenkamp, Jochen Stühler, Klaus Wurmbrand
  • Method for optimising the image properties of at least two optical elements as well as methods for optimising the image properties of at least three optical elements
    Publication number: 20040090617
    Abstract: In order to optimize the image properties of several optical elements of which at least one is moved relative to at least one stationary optical element, the overall image defect resulting from the interaction of all optical elements is first of all measured. This is represented as a linear combination of the base functions of an orthogonal function set. The movable element is then moved to a new measurement position and the overall image defect is measured once again. After the linear combination representation of the new overall image defect, the image defects of the movable element and of the stationary element are calculated from the data thereby obtained. With only one movable optical element a target position in which the overall image defect is minimized can be directly calculated and adjusted there from. If several movable optical elements are available, methods are given for the efficient determination of the respective target position.
    Type: Application
    Filed: October 30, 2003
    Publication date: May 13, 2004
    Inventors: Bernd Geh, Paul Graupner, Thomas Stammler, Dirk Stenkamp, Jochen Stuhler, Klaus Wurmbrand
  • Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements
    Patent number: 6678240
    Abstract: In order to optimize the image properties of several optical elements of which at least one is moved relative to at least one stationary optical element, the overall image defect resulting from the interaction of all optical elements is first of all measured. This is represented as a linear combination of the base functions of an orthogonal function set. The movable element is then moved to a new measurement position and the overall image defect is measured once again. After the linear combination representation of the new overall image defect, the image defects of the movable element and of the stationary element are calculated from the data thereby obtained. With only one movable optical element a target position in which the overall image defect is minimized can be directly calculated and adjusted there from. If several movable optical elements are available, methods are given for the efficient determination of the respective target position.
    Type: Grant
    Filed: September 19, 2002
    Date of Patent: January 13, 2004
    Assignee: Carl Zeiss SMT AG
    Inventors: Bernd Geh, Paul Gräupner, Klaus Wurmbrand, Thomas Stammler, Dirk Stenkamp, Jochen Stühler
  • Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements
    Publication number: 20030071986
    Abstract: In order to optimize the image properties of several optical elements of which at least one is moved relative to at least one stationary optical element, the overall image defect resulting from the interaction of all optical elements is first of all measured. This is represented as a linear combination of the base functions of an orthogonal function set. The movable element is then moved to a new measurement position and the overall image defect is measured once again. After the linear combination representation of the new overall image defect, the image defects of the movable element and of the stationary element are calculated from the data thereby obtained. With only one movable optical element a target position in which the overall image defect is minimized can be directly calculated and adjusted there from. If several movable optical elements are available, methods are given for the efficient determination of the respective target position.
    Type: Application
    Filed: September 19, 2002
    Publication date: April 17, 2003
    Inventors: Bernd Geh, Paul Graupner, Klaus Wurmbrand, Thomas Stammler, Dirk Stenkamp, Jochen Stuhler