Abstract: A microphone module includes an outer housing and a microphone apparatus. The outer housing includes port that extends through the outer housing. The microphone apparatus is disposed in the outer housing and defines an extended back volume with the outer housing. The microphone apparatus includes a microphone apparatus housing, an acoustic sensing element, a front volume, and a back volume. The acoustic sensing element is disposed within the microphone apparatus housing. An opening in the microphone apparatus housing allows the extended back volume to communicate with the back volume.

Abstract: An acoustic sensor includes a back plate; at least one back plate electrode coupled to the back plate; a proof of mass with the proof of mass elastically coupled to the back plate; and a proof of mass electrode coupled to the proof of mass. Movement of the sensor causes a capacitance between the proof of mass electrode and the at least one back plate electrode to vary and the capacitance represents a magnitude of the movement of the sensor.

Abstract: A micro-electromechanical system (MEMS) device includes a housing and a base. The base includes a port opening extending therethrough and the port opening communicates with the external environment. The MEMS die is disposed on the base and over the opening. The MEMS die includes a diaphragm and a back plate and the MEMS die, the base, and the housing form a back volume. At least one vent extends through the MEMS die and not through the diaphragm. The at least one vent communicates with the back volume and the port opening and is configured to allow venting between the back volume and the external environment.