Abstract: An acoustic scanning microscope uses damping of a resonant acoustic oscillator and an acoustic near-field effect. In a preferred embodiment, a 32 KHz tuning fork serving as an acoustic oscillator with a 50 nm point achieves a vertical resolution of 5 nm and a horizontal resolution of 50 nm in the case of a minimum distance of approximately 50 nm. Frequency or amplitude variation of the resonant acoustic oscillator can be used. The acoustic near-field effect is dependent on the coupling medium, e.g., air, and the pressure, e.g., normal pressure.

Abstract: A process for modifying structural profiles produced by polymerization or depolymerization in resist layers. As a function of the acoustic impedance of the substrate carrying the resist layer, the structures are irradiated with an ultrasonic beam. An ultrasonic beam for which the substrate represents a high impedance is used in order to enhance the contrast of the structures. An ultrasonic beam for which the substrate represents a low impedance is used to weaken the contrast. An acoustic microscope is especially suitable for carrying out the process.

Abstract: Polar structures in microscopic object areas, such as, for example, electric or magnetic dipoles, can be locally selectively detected with high resolution if either resonant ultrasonic waves are induced in the object area by a locally effective high-frequency field and are detected by means of a focused acoustic lens arrangement, or electric or magnetic high-frequency oscillations are induced in the object area by focused ultrasonic waves and are detected by an appropriate receiver. By comparing the phases and/or amplitudes of the induced and of the detected waves, these provide information on the existence and the direction of the dipoles. Existing dipole alignments can be made energetically unstable by a critical direct-current electric or magnetic field and locally selectively reversed by the focused ultrasonic beam.

Abstract: A process for the production of structures by the polymerization, or fragmentation of resist layers comprising the steps of effecting an incomplete exposure of the resist layer corresponding to the pattern of the structures, and of fully developing the structure in the resist layer by ultrasonic irradiation.An acoustic microscope is preferably used for the ultrasonic irradiation, whereby the formation of the structure in the resist layer may also be observed.

Abstract: The exposure meter is used in mirror reflex cameras wherein an image of an object projected by a picture taking lens onto an image plane is observed by means of a pentaprism through an ocular. For the purpose of the selective integral or spot exposure metering, a pentaprism (6) is provided at the lower edge of its exit surface with a partly transmitting concave mirror (16). The angles of the pentaprism (6) are selected so that a portion of the light flux leaving the exit pupil (EP) of the picture-taking lens (2) is incident on this concave mirror (16). A first photoelectric detector system is associated with the concave mirror (16) and a second detector system is associated with the prism surface (6c) following the concave mirror in the direction of the beam path, and the output signals from these detectors control a display and/or an exposure control. An additional optical component (13,14a,15b,15) is provided to implement a desired beam path in the pentaprism (6).

Abstract: Disclosed is a reflex camera having a range finder assembly consisting of a focussing disk, field lens, pentaprism and eyepiece and having an electronic range finder wherein the imaging lens of the reflex camera projects an image of the object to be photographed onto a grating which is arranged in an image plane of the imaging objective lens and which acts as a spatial frequency filter. This image is projected through the pentaprism by means of a fully reflecting concave mirror ground onto the lower edge of the exit surface of the pentaprism. A photoelectric receiver system is associated with the grating, and a reflecting grooved grating is provided as the spatial frequency filter. The groove plane is arranged parallel or obliquely with respect to the image plane, so that the partial beams created by the splitting of the principal beam on the reflecting grooved grating are reflected back in the direction of the top edge surfaces of the pentaprism.

Abstract: Apparatus is disclosed for measuring the movement of an object comprising an optical imaging device for producing an image of said object, a grating structure positioned to receive the image of said object produced by said imaging device, drive means for producing a periodic relative movement between said grating structure and the image formed thereon, means for generating reference signals corresponding to said periodic relative movement, photoelectric receiving means positioned for receiving light from said grating structure corresponding to the image thereon, said photoelectric receiving means producing electrical rotating field signals, a control circuit connected for receiving said reference signals and said electrical rotating field signals for producing control signals indicative of the movement of said object with respect to a direction of movement at least approximately parallel to said relative movement, and a bidirectional counter connected to receive said control signals for indicating the movemen

Abstract: System for measuring the relative position and/or velocity of two objects with respect to each other and/or with respect to a common reference system, such as the ground, according to the magnitude and direction thereof, using electro-optical measuring means, the improvement comprising:(1) producing images of the object to be measured in at least two different spatial positions;(2) producing A.C. electrical signals of different frequency proportional to the relative movements of these images to at least one optical correlation system; and(3) evaluating these signals, with the use of the trigonometrical relationships of the perspective imaging, in a computer to determine the measured values.

Abstract: A method and apparatus for the automatic evaluation of stereoscopic images by the determination of the maximum degree of correlation of identical images of an object reproduced by two objectives, for example for a range finder, wherein the two images are superimposed on one and/or two position frequency filters (82, 21, 31, 32) identical in their structures; the respective superimposed signal produced is fed respectively to one photoelectric receiver (13,14,43,44); and the output signals of the photoelectric receivers are used for indicating and/or control purposes. In one embodiment the position frequency filter (82) is moved and the output signals are correlated with each other. In another embodiment the output signals are subtracted from each other.

Abstract: Apparatus to automatically analyze stereoscopic images comprising the determination of the maximum degree of correlation between two similar images of the same object projected by two objectives, for instance in a rangefinder, wherein the two images are superimposed on one or two spatial frequency filters identical in their structures, and wherein the particular generated superimposition signal, is preferably applied to a particular photoelectric detector and wherein the output signals from the latter are used for display and/or control purposes. The apparatus is improved by a system (20,20',21,21',22-25; 30-34) for generating a reference beam indicating mechanical changes affecting the image position of at least one of the measuring beams, at least one photoelectric detector (28,29;40) being associated with the one reference beam, the output signals from the one detector corresponding to the mechanical changes being used to display and/or correct the changes or the effects of same.

Abstract: A system for determining photoelectrically the position of at least one focus plane of an image within an optical apparatus, wherein the object is reproduced at least at one spatial frequency filter of an optical image correlator and there is measurement and/or display of the light fluxes leaving the local frequency filter.In this system light fluxes traversing differing pupil sections of the reproducing optics are modulated in common by a spatial frequency filter and are split up geometrically or physically, or by means of additional modulation in correspondence with the pupil sections. They are consecutively or simultaneously projected on a common photoelectric receiver or on separate photoelectric receivers, the output signals of which are processed further for purposes of controlling display and/or follow-up devices.

Abstract: Apparatus for the photoelectrical determination of the position of at least one focusing plane of an image comprising an imaging optics, at least one spatial frequency filter in the form of a structure or grating mounted in the vicinity of one image plane of said imaging optics, a photoelectric receiver system associated with the filter containing at least one detector and receiving light fluxes leaving this filter, at least one means for generating a relative motion between the structure or grating and the object image, and means for analyzing the output signals from the photoelectric receiver system for distance display and/or focusing of the apparatus. The apparatus is improved by having the imaging optics (10) preceded by wo rhombic prisms (19, 20) so that each pupil half obtains its light through one of the two prisms. A reference beam is provided to show and/or eliminate mechanical changes in the apparatus effecting faultiness of the measuring result.

Abstract: Method for no-contact measurement of the relative velocity, position, or displacement path of objects without special optical markers with respect to a reference position in at least one coordinate direction, or of the degree of image quality of an image wherein the apparatus images the object on a grating and the light fluxes leaving this grating are measured by means of photoelectric elements. The output signals of the photoelectric elements exhibit a frequency component proportional to the velocity of travel. The present invention is distinguished from the prior art by having a physical beam splitter (6,13) inserted in the imaging beam path in front of the grating (5,14), and preferably several polarizing beam splitters (7,30-33) with at least respectively one associated photoelectric receiver pair (10,11,16-19 16'-19') are connected after the grating (5,14).

Abstract: System for monitoring spaces by electro-optical means, using optical imaging means (1) capable of detecting objects present in the monitored spaces and beam splitting means (2) for grating resolution of the object images into geometric, mutually complementary components. The imaging and beam splitting means form a correlation imaging sensor system equipped with photoelectric detectors (4,5) for the purpose of separately converging light fluxes corresponding to the image components into analogue electrical signals, and electrical means for measuring the amplitudes and phases of the signals as well as their variations. The correlation sensor system analyzes these values with respect to presence and/or motion of objects within the monitored spaces.

Abstract: In an apparatus, an imaging system, at least one optically effective grating and a photoelectric receiver system are employed for determining the relative position of the plane of maximum amplitude of a spatial frequency component in the image of an object. The imaging system produces from light fluxes emanating from the object and traversing different regions of the entrance pupil of the imaging system an image of the object in a first, a second and a third intermediate image plane. The focussing screen mounted in the first plane is used for subjectively observing and focussing the object as well as for transmitting light fluxes to the optically effective grating which defines a given spatial frequency component and which is mounted at least in the vicinity of the second intermediate image plane for commonly modulating and splitting the light fluxes. The photoelectric receiver system generates therefrom electrical output signals used in devices for indicating and adjusting the sharp focussing of the object.