Patents by Inventor Knut Hiltawski
Knut Hiltawski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7426024Abstract: A system for inspecting a disc-shaped substrate 5 is disclosed. The system 100 is surrounded by a housing. A table 2 that is movable in at least an X-direction and a Y-direction and is borne by a mounting plate 22 is provided within the housing 50. The mounting plate 22 is vibration isolated in comparison to the housing 50. Equally, an exhaust unit 40 is provided beneath the mounting plate 22 and arranged at a distance from it. The exhaust unit 40 possesses an opening 36 for air entry. The opening 36 for air entry is provided in the exhaust unit between an end of the mounting plate 22 and a wall of the housing 50.Type: GrantFiled: December 22, 2005Date of Patent: September 16, 2008Assignee: Vistec Semiconductor Systems Jena GmbHInventors: Magdalena I. Hiltawski, legal representative, Frank A. Hiltawski, legal representative, René Schenck, Knut Hiltawski
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Publication number: 20070186699Abstract: A system for inspecting a disc-shaped substrate 32 is disclosed. The system 100 is surrounded by a housing. A table 2 that is movable in at least an X-direction and a Y-direction and is borne by a mounting plate 22 is provided within the housing 50. The mounting plate 22 is vibration isolated in comparison to the housing 50. Equally, an exhaust unit 40 is provided beneath the mounting plate 22 and arranged at a distance from it. The exhaust unit 40 possesses an opening 36 for air entry. The opening 36 for air entry is provided in the exhaust unit between an end of the mounting plate 22 and a wall of the housing 50.Type: ApplicationFiled: December 22, 2005Publication date: August 16, 2007Applicant: Leica Microsystems Jena GmbHInventors: Knut Hiltawski, Magdalena Hiltawski, Frank Hiltawski
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Patent number: 7028565Abstract: The invention relates to an arrangement for transporting and inspecting semiconductor substrates (6), having at least three workstations (8, 10, 12), a changer (14), which has at least three arms (14a, 14b, 14c) which are designed to load the individual workstations (8, 10, 12) with semiconductor substrates (6). A measuring device (15) is assigned to the second workstation (10), determines the deviation of the current position of the semiconductor substrate (6) and makes it available to the arrangement (3) for the further inspection of the semiconductor substrate (6). In addition, the changer (14) is not equipped with means for exact positioning of the semiconductor substrates (6) in the workstations (8, 10, 12).Type: GrantFiled: February 2, 2004Date of Patent: April 18, 2006Assignee: Leica Microsystems Jena GmbHInventors: Andreas Birkner, Frank Bernhardt, Knut Hiltawski
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Patent number: 6962471Abstract: The invention is based on a substrate conveying module (1) for conveying substrates into a workstation (3) for inspection, measurement, or processing of the substrates, in which on because of connecting elements (4a, b) in at least two side walls (1a, b, c) of the substrate conveying module (1) and/or in at least two side walls (3a, b, c, d) of the workstation (3), the substrate conveying module (1) can, at the installation location of the workstation (3), be flexibly connected thereto in different orientations with respect to the workstation (3) and/or can be coupled at different points to the workstation (3).Type: GrantFiled: June 14, 2001Date of Patent: November 8, 2005Assignee: Leica Microsystems Jena GmbHInventors: Andreas Birkner, Knut Hiltawski, Karsten Urban, Joachim Wienecke
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Patent number: 6845174Abstract: An arrangement for the identification of a substrate (S) having at least one identification marking (I), comprising a turntable (2) for rotating a substrate (S) placed thereon; an illumination source (4) and a receiving device (5) for evaluating the intensity of the light emerging from the illumination source (4), the edge zone of the substrate (S) placed on the turntable (2), upon rotation thereof, influencing the light intensity striking the receiving device (5); a device (6) for reading the identification marking (I), having a sensing region (E); and a calculation device that calculates a manipulated variable for a correction rotation angle about the rotation axis (A) for alignment of the identification marking (I) with respect to the sensing region (E), and a manipulated variable for a correction motion for changing the position of the sensing region (E) with respect to the rotation axis (A) or with respect to the actual position of the identification marking (I), and outputs them to a positioning deviType: GrantFiled: January 18, 2002Date of Patent: January 18, 2005Assignee: Leica Microsystems Jena GmbHInventors: Dominik Grau, Andreas Birkner, Knut Hiltawski, Frank Bernhardt
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Patent number: 6789436Abstract: The invention relates to an arrangement for transporting and inspecting semiconductor substrates (6), having at least three workstations (8, 10, 12), a changer (14), which has at least three arms (14a, 14b, 14c) which are designed to load the individual workstations (8, 10, 12) with semiconductor substrates (6). A measuring device (15) is assigned to the second workstation (10), determines the deviation of the current position of the semiconductor substrate (6) and makes it available to the arrangement (3) for the further inspection of the semiconductor substrate (6). In addition, the changer (14) is not equipped with means for exact positioning of the semiconductor substrates (6) in the workstations (8, 10, 12).Type: GrantFiled: March 6, 2003Date of Patent: September 14, 2004Assignee: Leica Microsystems Jena GmbHInventors: Andreas Birkner, Frank Bernhardt, Knut Hiltawski
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Publication number: 20040149055Abstract: The invention relates to an arrangement for transporting and inspecting semiconductor substrates (6), having at least three workstations (8, 10, 12), a changer (14), which has at least three arms (14a, 14b, 14c) which are designed to load the individual workstations (8, 10, 12) with semiconductor substrates (6). A measuring device (15) is assigned to the second workstation (10), determines the deviation of the current position of the semiconductor substrate (6) and makes it available to the arrangement (3) for the further inspection of the semiconductor substrate (6). In addition, the changer (14) is not equipped with means for exact positioning of the semiconductor substrates (6) in the workstations (8, 10, 12).Type: ApplicationFiled: February 2, 2004Publication date: August 5, 2004Applicant: LEICA MICROSYSTEMS JENA GmbHInventors: Andreas Birkner, Frank Bernhardt, Knut Hiltawski
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Publication number: 20040046544Abstract: A measurement and/or analytical device (1) comprises a insertable trolley (2) which is insertable into an insertion opening and can be pulled completely out of the insertion opening. The insertable trolley (2) furthermore comprises sliding and/or rolling elements that are provided on a frame (6) in order to brace the latter in a vertical direction against a displacement surface, electrical and/or electronic control components for the measurement and/or analytical device (1) that are detachably mounted on the frame (6), and a flexible conductor bundle (8) for transferring control signals between the measurement and/or analytical device (1) and the control components.Type: ApplicationFiled: June 2, 2003Publication date: March 11, 2004Inventor: Knut Hiltawski
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Publication number: 20030140716Abstract: The invention relates to an arrangement for transporting and inspecting semiconductor substrates (6), having at least three workstations (8, 10, 12), a changer (14), which has at least three arms (14a, 14b, 14c) which are designed to load the individual workstations (8, 10, 12) with semiconductor substrates (6). A measuring device (15) is assigned to the second workstation (10), determines the deviation of the current position of the semiconductor substrate (6) and makes it available to the arrangement (3) for the further inspection of the semiconductor substrate (6). In addition, the changer (14) is not equipped with means for exact positioning of the semiconductor substrates (6) in the workstations (8, 10, 12).Type: ApplicationFiled: March 6, 2003Publication date: July 31, 2003Applicant: LEICA MICROSYSTEMS JENA GmbHInventors: Andreas Birkner, Frank Bernhardt, Knut Hiltawski
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Patent number: 6553850Abstract: The invention relates to an arrangement for transporting and inspecting semiconductor substrates (6), having at least three workstations (8, 10, 12), a changer (14), which has at least three arms (14a, 14b, 14c ) which are designed to load the individual workstations (8, 10, 12) with semiconductor substrates (6). A measuring device (15) is assigned to the second workstation (10), determines the deviation of the current position of the semiconductor substrate (6) and makes it available to the arrangement (3) for the further inspection of the semiconductor substrate (6). In addition, the changer (14) is not equipped with means for exact positioning of the semiconductor substrates (6) in the workstations (8, 10, 12).Type: GrantFiled: January 24, 2002Date of Patent: April 29, 2003Assignee: Leica Microsystems Jena GmbHInventors: Andreas Birkner, Frank Bernhardt, Knut Hiltawski
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Publication number: 20020097905Abstract: An arrangement for the identification of a substrate (S) having at least one identification marking (I), comprisingType: ApplicationFiled: January 18, 2002Publication date: July 25, 2002Applicant: Leica Microsystems Jena GmbHInventors: Dominik Grau, Andreas Birkner, Knut Hiltawski, Frank Bernhardt
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Publication number: 20020095999Abstract: The invention relates to an arrangement for transporting and inspecting semiconductor substrates (6), having at least three workstations (8, 10, 12), a changer (14), which has at least three arms (14a, 14b, 14c) which are designed to load the individual workstations (8, 10, 12) with semiconductor substrates (6). A measuring device (15) is assigned to the second workstation (10), determines the deviation of the current position of the semiconductor substrate (6) and makes it available to the arrangement (3) for the further inspection of the semiconductor substrate (6). In addition, the changer (14) is not equipped with means for exact positioning of the semiconductor substrates (6) in the workstations (8, 10, 12).Type: ApplicationFiled: January 24, 2002Publication date: July 25, 2002Applicant: LEICA MICROSYSTEMS JENA GmbHInventors: Andreas Birkner, Frank Bernhardt, Knut Hiltawski
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Publication number: 20020051698Abstract: The invention is based on a substrate conveying module (1) for conveying substrates into a workstation (3) for inspection, measurement, or processing of the substrates, in which on because of connecting elements (4a, b) in at least two side walls (1a, b, c) of the substrate conveying module (1) and/or in at least two side walls (3a, b, c, d) of the workstation (3), the substrate conveying module (1) can, at the installation location of the workstation (3), be flexibly connected thereto in different orientations with respect to the workstation (3) and/or can be coupled at different points to the workstation (3).Type: ApplicationFiled: June 14, 2001Publication date: May 2, 2002Inventors: Andreas Birkner, Knut Hiltawski, Karsten Urban, Joachim Wienecke