Patents by Inventor Ko-Chi Chen

Ko-Chi Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11706933
    Abstract: A semiconductor memory device includes a substrate, a dielectric layer on the substrate, and a contact plug in the dielectric layer. An upper portion of the contact plug protrudes from a top surface of the dielectric layer. The upper portion of the contact plug acts as a first electrode. A buffer layer is disposed on the dielectric layer and beside the upper portion of the contact plug. A resistive-switching layer is disposed beside the buffer layer. A second electrode is disposed beside the resistive-switching layer.
    Type: Grant
    Filed: April 7, 2021
    Date of Patent: July 18, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Wen-Hsin Hsu, Ko-Chi Chen, Tzu-Yun Chang, Chung-Tse Chen
  • Patent number: 11508783
    Abstract: A method for fabricating memory device is provided. The method includes forming a transistor on a substrate. Further, a contact structure is formed on a source/drain region of the transistor. A conductive layer is formed on the contact structure. Four memory structures are formed on the conductive layer to form a quadrilateral structure.
    Type: Grant
    Filed: April 20, 2021
    Date of Patent: November 22, 2022
    Assignee: UNITED MIICROELECTRONICS CORP.
    Inventors: Chung-Tse Chen, Ko-Chi Chen, Tzu-Yun Chang
  • Publication number: 20220293679
    Abstract: A semiconductor memory device includes a substrate, a dielectric layer on the substrate, and a contact plug in the dielectric layer. An upper portion of the contact plug protrudes from a top surface of the dielectric layer. The upper portion of the contact plug acts as a first electrode. A buffer layer is disposed on the dielectric layer and beside the upper portion of the contact plug. A resistive-switching layer is disposed beside the buffer layer. A second electrode is disposed beside the resistive-switching layer.
    Type: Application
    Filed: April 7, 2021
    Publication date: September 15, 2022
    Inventors: Wen-Hsin Hsu, Ko-Chi Chen, Tzu-Yun Chang, Chung-Tse Chen
  • Publication number: 20210242282
    Abstract: A method for fabricating memory device is provided. The method includes forming a transistor on a substrate. Further, a contact structure is formed on a source/drain region of the transistor. A conductive layer is formed on the contact structure. Four memory structures are formed on the conductive layer to form a quadrilateral structure.
    Type: Application
    Filed: April 20, 2021
    Publication date: August 5, 2021
    Applicant: United Microelectronics Corp.
    Inventors: Chung-Tse Chen, Ko-Chi Chen, Tzu-Yun Chang
  • Patent number: 11024672
    Abstract: A structure of memory device is provided. The structure of memory device includes a transistor formed on a substrate. A contact structure is disposed on a source/drain region of the transistor. A conductive layer is disposed on the contact structure. Four memory structures is disposed on the conductive layer to form a quadrilateral structure.
    Type: Grant
    Filed: May 21, 2019
    Date of Patent: June 1, 2021
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chung-Tse Chen, Ko-Chi Chen, Tzu-Yun Chang
  • Publication number: 20200328255
    Abstract: A structure of memory device is provided. The structure of memory device includes a transistor formed on a substrate. A contact structure is disposed on a source/drain region of the transistor. A conductive layer is disposed on the contact structure. Four memory structures is disposed on the conductive layer to form a quadrilateral structure.
    Type: Application
    Filed: May 21, 2019
    Publication date: October 15, 2020
    Applicant: United Microelectronics Corp.
    Inventors: Chung-Tse Chen, Ko-Chi Chen, Tzu-Yun Chang
  • Patent number: 10090465
    Abstract: A semiconductor device is provided, including a lower conducting layer formed above a substrate, an upper conducting layer, and a memory cell structure formed on the lower conducting layer (such as formed between the lower and upper conducting layers). The memory cell structure includes a bottom electrode formed on the lower conducting layer and electrically connected to the lower conducting layer, a transitional metal oxide (TMO) layer formed on the bottom electrode, a TMO sidewall oxides formed at sidewalls of the TMO layer, a top electrode formed on the TMO layer, and spacers formed on the bottom electrode. The upper conducting layer is formed on the top electrode and electrically connected to the top electrode.
    Type: Grant
    Filed: November 23, 2016
    Date of Patent: October 2, 2018
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chia-Ching Hsu, Liang Yi, Shen-De Wang, Ko-Chi Chen
  • Patent number: 10074692
    Abstract: A semiconductor structure includes a memory unit structure. The memory unit structure includes a transistor, a first electrode, two second electrode, and two resistive random access memory (RRAM) elements. The first electrode and the two second electrodes are disposed in a horizontal plane. The first electrode is disposed between the two second electrodes. The first electrode and the two second electrodes are disposed in parallel. The first electrode is coupled to a source region of the transistor. One of the two RRAM elements is disposed between the first electrode and one of the two second electrodes. The other one of the two RRAM elements is disposed between the first electrode and the other one of the two second electrodes.
    Type: Grant
    Filed: January 31, 2018
    Date of Patent: September 11, 2018
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Wen-Hsin Hsu, Ko-Chi Chen, Tzu-Yun Chang
  • Publication number: 20180205013
    Abstract: A method of forming a Resistive Random Access Memory (RRAM) includes the following steps. A first dielectric layer is formed on a first electrode layer. A second dielectric layer having a first trench is formed on the first dielectric layer. Spacers are formed beside sidewalls of the first trench. Apart of the first dielectric layer exposed by the spacers is removed, thereby forming a second trench in the first dielectric layer. A resistance switching material fills in the second trench. The second dielectric layer and the spacers are removed. A second electrode layer is formed on the resistance switching material and the first dielectric layer. The present invention also provides a RRAM formed by said method.
    Type: Application
    Filed: February 24, 2017
    Publication date: July 19, 2018
    Inventors: Liang Yi, Chia-Ching Hsu, Shen-De Wang, Ko-Chi Chen
  • Publication number: 20180175110
    Abstract: A semiconductor structure includes a memory unit structure. The memory unit structure includes a transistor, a first electrode, two second electrode, and two resistive random access memory (RRAM) elements. The first electrode and the two second electrodes are disposed in a horizontal plane. The first electrode is disposed between the two second electrodes. The first electrode and the two second electrodes are disposed in parallel. The first electrode is coupled to a source region of the transistor. One of the two RRAM elements is disposed between the first electrode and one of the two second electrodes. The other one of the two RRAM elements is disposed between the first electrode and the other one of the two second electrodes.
    Type: Application
    Filed: January 31, 2018
    Publication date: June 21, 2018
    Inventors: Wen-Hsin Hsu, Ko-Chi Chen, Tzu-Yun Chang
  • Patent number: 9978762
    Abstract: A method of fabricating a semiconductor device includes providing a substrate with a memory region and a logic region, forming a recess of the substrate in the memory region, forming a non-volatile gate stack in the recess, and forming a logic gate stack in the logic region after forming the non-volatile gate stack.
    Type: Grant
    Filed: April 13, 2017
    Date of Patent: May 22, 2018
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chia-Ching Hsu, Ko-Chi Chen, Shen-De Wang
  • Patent number: 9966383
    Abstract: A semiconductor structure and a manufacturing method thereof are provided. The semiconductor structure includes a semiconductor substrate, a non-volatile memory cell, and a gate stack. The non-volatile memory cell is formed in the semiconductor substrate, and a top surface of the non-volatile memory cell is coplanar with or below a top surface of the semiconductor substrate. The gate stack is formed on the semiconductor substrate.
    Type: Grant
    Filed: November 24, 2015
    Date of Patent: May 8, 2018
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Liang Yi, Ko-Chi Chen, Shen-De Wang
  • Publication number: 20180108837
    Abstract: A semiconductor device is provided, including a lower conducting layer formed above a substrate, an upper conducting layer, and a memory cell structure formed on the lower conducting layer (such as formed between the lower and upper conducting layers). The memory cell structure includes a bottom electrode formed on the lower conducting layer and electrically connected to the lower conducting layer, a transitional metal oxide (TMO) layer formed on the bottom electrode, a TMO sidewall oxides formed at sidewalls of the TMO layer, a top electrode formed on the TMO layer, and spacers formed on the bottom electrode. The upper conducting layer is formed on the top electrode and electrically connected to the top electrode.
    Type: Application
    Filed: November 23, 2016
    Publication date: April 19, 2018
    Inventors: Chia-Ching Hsu, Liang Yi, Shen-De Wang, Ko-Chi Chen
  • Patent number: 9923028
    Abstract: A semiconductor structure includes a memory unit structure. The memory unit structure includes a transistor, a first electrode, two second electrode, and two resistive random access memory (RRAM) elements. The first electrode and the two second electrodes are disposed in a horizontal plane. The first electrode is disposed between the two second electrodes. The first electrode and the two second electrodes are disposed in parallel. The first electrode is coupled to a source region of the transistor. One of the two RRAM elements is disposed between the first electrode and one of the two second electrodes. The other one of the two RRAM elements is disposed between the first electrode and the other one of the two second electrodes.
    Type: Grant
    Filed: January 10, 2017
    Date of Patent: March 20, 2018
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Wen-Hsin Hsu, Ko-Chi Chen, Tzu-Yun Chang
  • Publication number: 20180033961
    Abstract: A semiconductor device and a manufacturing method thereof are provided. The semiconductor device includes a substrate, a bottom metal layer, a resistive random access memory (ReRAM) cell structure, and an upper metal layer. The bottom metal layer is located above the substrate. The ReRAM cell structure is formed on the bottom metal layer. The ReRAM cell structure includes a bottom electrode, a memory cell layer, a top electrode, and a spacer. The memory cell layer is formed on the bottom electrode. The top electrode is formed on the memory cell layer. The spacer is formed on two sides of the bottom electrode, the memory cell layer and the top electrode. The upper metal layer is electrically connected to and directly contacting the top electrode.
    Type: Application
    Filed: September 9, 2016
    Publication date: February 1, 2018
    Inventors: Liang Yi, Chia-Ching Hsu, Shen-De Wang, Ko-Chi Chen
  • Patent number: 9859335
    Abstract: A semiconductor device includes an interconnection formed above a substrate, and the interconnection comprising interconnect layers respectively buried in dielectric layers; a lower conducting layer formed above the substrate; a memory cell structure formed on the lower conducting layer and buried in one of the dielectric layers; an upper conducting layer formed on the memory cell structure. The memory cell structure includes a bottom electrode formed on and electrically connected to the lower conducting layer; a transitional metal oxide (TMO) layer formed on the bottom electrode; and a top electrode formed on the TMO layer, wherein the upper conducting layer is formed on the top electrode and electrically connected to the top electrode. Also, the lower conducting layer and the upper conducting layer are positioned in the different dielectric layers.
    Type: Grant
    Filed: December 2, 2016
    Date of Patent: January 2, 2018
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chia-Ching Hsu, Liang Yi, Shen-De Wang, Ko-Chi Chen
  • Patent number: 9806255
    Abstract: A resistive random access memory includes a lower electrode, an upper electrode and a resistive layer between the lower electrode and the upper electrode, wherein the resistive layer includes a constant-resistance portion and a variable-resistance portion surrounding the constant-resistance portion.
    Type: Grant
    Filed: March 10, 2017
    Date of Patent: October 31, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chia-Ching Hsu, Liang Yi, Shen-De Wang, Ko-Chi Chen
  • Patent number: 9799705
    Abstract: The present invention provides a semiconductor device. The semiconductor device includes a contact structure disposed in a first dielectric layer, a second dielectric layer disposed on the first dielectric layer and having an opening disposed therein, a spacer disposed in the opening and partially covering the contact structure, and a resistive random-access memory (RRAM) disposed on the contact structure and directly contacting the spacer, wherein the RRAM includes a bottom electrode, a top electrode, and a switching resistance layer disposed between the bottom electrode and the top electrode.
    Type: Grant
    Filed: October 19, 2016
    Date of Patent: October 24, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Liang Yi, Chia-Ching Hsu, Shen-De Wang, Ko-Chi Chen, Guoan Du
  • Patent number: 9761680
    Abstract: The present invention provides a semiconductor device, including a substrate with a memory region and a logic region, the substrate having a recess disposed in the memory region, a logic gate stack disposed in the logic region, and a non-volatile memory disposed in the recess. The non-volatile memory includes at least two floating gates and at least two control gates disposed on the floating gates, where each floating gate has a step-shaped bottom, and the step-shaped bottom includes a first bottom surface and a second bottom surface lower than the first bottom surface.
    Type: Grant
    Filed: October 26, 2015
    Date of Patent: September 12, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Dongdong Li, Ko-Chi Chen, Shen-De Wang
  • Publication number: 20170221913
    Abstract: A method of fabricating a semiconductor device includes providing a substrate with a memory region and a logic region, forming a recess of the substrate in the memory region, forming a non-volatile gate stack in the recess, and forming a logic gate stack in the logic region after forming the non-volatile gate stack.
    Type: Application
    Filed: April 13, 2017
    Publication date: August 3, 2017
    Inventors: Chia-Ching Hsu, Ko-Chi Chen, Shen-De Wang