Patents by Inventor Ko Sang Tae

Ko Sang Tae has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of cleaning metallic films built up within thin film deposition apparatus
    Patent number: 5993679
    Abstract: A method of cleaning metallic films built up within a thin film deposition apparatus is disclosed. The method includes an oxidation step to oxidize the metallic film and produce a film of the oxide thereof, a complexing step to complex the oxide film and produce a complex thereof, and a sublimation step to sublimate the complex. The conditions of these cleaning steps are set so that the oxidation step is the rate-determining step.
    Type: Grant
    Filed: May 5, 1998
    Date of Patent: November 30, 1999
    Assignee: Anelva Corporation
    Inventors: Tomoaki Koide, Akiko Kobayashi, Ko Sang Tae, Atsushi Sekiguchi, Osamu Okada