Patents by Inventor Ko-Ta SHIH

Ko-Ta SHIH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • DIFFUSER FOR UNIFORMITY IMPROVEMENT IN DISPLAY PECVD APPLICATIONS
    Publication number: 20180340257
    Abstract: Embodiments described herein relate to a plasma enhanced chemical vapor deposition (PECVD) chamber and diffuser assembly for processing large area flat panel display substrates. The diffuser includes a first plate having a plurality of first bores formed therein, a second plate having a second plurality of bores formed therein, and a third plate having a third plurality of bores formed therein. The second plate is disposed between the first plate and the second plate. The first plate, second plate, and third plate are brazed to form a diffuser having a unitary body.
    Type: Application
    Filed: July 7, 2017
    Publication date: November 29, 2018
    Inventors: Umesha ACHARY, Sanjay D. YADAV, Lai ZHAO, Gaku FURUTA, Ko-Ta SHIH, Soo Young CHOI