Abstract: An object is set to move back and forth between a first position and a second position in a cylinder. A measurement point between the first position and the second position is preset. A counted period indicating a duration that the object moves from the first position to the first measurement point is obtained. Then a movement behavior parameter is obtained according to the counted period. Whether the movement behavior parameter of the object matches a specified condition is determined. If matching occurs, a warning message is generated.

Abstract: An object is set to move back and forth between a first position and a second position in a cylinder. A measurement point between the first position and the second position is preset. A counted period indicating a duration that the object moves from the first position to the first measurement point is obtained. Then a movement behavior parameter is obtained according to the counted period. Whether the movement behavior parameter of the object matches a specified condition is determined. If matching occurs, a warning message is generated.

Abstract: A method for monitoring a step motor is provided, wherein the step motor rotates from a start position to an end position and then back to the start position repeatedly. The monitoring method includes: detecting a status signal of the step motor and a command signal received by the step motor in real time; recording a variation of the difference between the command signal and the status signal vs. time as an error data; and determining whether the step motor is starting from the start position, in action, reaching the end position, or returning to the start position according to the status signal and the command signal. If it is determined that the step motor is in action, the error data is recorded as a tracking error, and whether an alarm is issued is determined according to the tracking error.

Abstract: A cleaning box used to catch the waste materials from a vacuum pipe of a working machine is provided. The present invention is characterized in that the cleaning box includes a catch inlet and an air outlet wherein the catch inlet is connected to the vacuum pipe of the working machine, and the air outlet is connected to an exhaust pipe of an exhaust apparatus. That the cleaning box has high rigidity can prevent the cleaning box from breaking and the waste materials from leaking out of the cleaning box.

Abstract: A metal etching system has an etching chamber defined by quartz walls. Coils provided around the quartz walls of the etching chamber are used to apply a high frequency electrical field to at least a portion of the etching chamber. Containment walls are provided around the coils. An endpoint detection system is provided for the etching system which includes an optical fiber which extends through the containment wall and the coils, with an end of the optical fiber disposed in fixed relationship to the quartz walls of the etching chamber. A fixture mounts the optical fiber in the containment wall. An air-tight seal, such as an O-ring compressed around the optical fiber and compressed against the containment wall, is provided to limit air flow along the optical fiber to the surface of the etching chamber walls.