Patents by Inventor Kobayashi, Yoshiyuki

Kobayashi, Yoshiyuki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of refining nitrogen trifluoride gas
    Patent number: 5069887
    Abstract: The invention provides a selective adsorption method for refining NF.sub.3 gas containing CF.sub.4 as impurity. At a temperature not higher than 10.degree. C. the NF.sub.3 gas is brought into contact with a crystalline and porous synthetic zeolite, which is substantially uniform in pore size and about 4.9 .ANG. in effective pore size and is commerciallized under the name of molecular sieve 5A, on condition that the content of water of crystallinity in the synthetic zeolite is 1-10 wt. %, and preferably 6-10 wt. %. The synthetic zeolite efficiently adsorbs NF.sub.3 with little adsorption of CF.sub.4.
    Type: Grant
    Filed: January 10, 1991
    Date of Patent: December 3, 1991
    Assignee: Central Glass Company, Limited
    Inventors: Takashi Suenaga, Tukasa Fujii, Kobayashi, Yoshiyuki