Abstract: A filter that is self-locking to a filter manifold includes a flange having a major axis and a minor axis in plan view, and that is longer along the major axis than the minor axis. The filter further includes a stopper on the major axis, that can contact a filter manifold when the filter is inserted into the manifold and rotated. The filter can be used with a filter manifold having a slot with an opening having a width greater than the length of the minor axis and smaller than the length along the major axis of the flange, and past the opening, has sufficient width to accommodate the length of the major axis. This arrangement allows the flange to be inserted into the slot in an insertion orientation, but does not permit the flange to pass through the opening of the slot when it is in a locking position.

Abstract: A purge port assembly for a wafer container includes a purge module configured to allow inlet flow of purge gas and a transition portion disposed over an intermediate outlet of the purge module. The transition portion includes a receiver configured to receive the purge gas discharged from the purge module, an outlet connector configured to attach with a diffuser, and an intermediate conduit. The intermediate conduit connects the receiver to the outlet connector and extends from the receiver at an acute angle relative to an axis of the inlet opening of the receiver. The intermediate conduit has a length that spaces apart the outlet connector from the receiver. A wafer container includes a shell and a purge port assembly. The shell includes an interior space. The purge port assembly extends through an opening in the shell into the interior space.

Abstract: A filter cartridge includes a housing, a filter member disposed within the housing, and an endcap disposed within the housing between the filter member and the housing. The housing includes a first end with an inlet, a second end opposite to the first end, and an outlet. The filter member includes a first axial end that faces the first end of the housing and a second axial end that faces the second end of the housing. The endcap including an outer side that faces the first end of the housing and fins that project from the outer side of the endcap. The fins configured to redirect the fluid flowing into the filter cartridge through the inlet in the housing.

Abstract: A purge port assembly for a wafer container includes a purge module configured to allow inlet flow of purge gas and a transition portion disposed over an intermediate outlet of the purge module. The transition portion includes a receiver configured to receive the purge gas discharged from the purge module, an outlet connector configured to attach with a diffuser, and an intermediate conduit. The intermediate conduit connects the receiver to the outlet connector and extends from the receiver at an acute angle relative to an axis of the inlet opening of the receiver. The intermediate conduit has a length that spaces apart the outlet connector from the receiver. A wafer container includes a shell and a purge port assembly. The shell includes an interior space. The purge port assembly extends through an opening in the shell into the interior space.

Abstract: A filter that is self-locking to a filter manifold includes a flange having a major axis and a minor axis in plan view, and that is longer along the major axis than the minor axis. The filter further includes a stopper on the major axis, that can contact a filter manifold when the filter is inserted into the manifold and rotated. The filter can be used with a filter manifold having a slot with an opening having a width greater than the length of the minor axis and smaller than the length along the major axis of the flange, and past the opening, has sufficient width to accommodate the length of the major axis. This arrangement allows the flange to be inserted into the slot in an insertion orientation, but does not permit the flange to pass through the opening of the slot when it is in a locking position.