Abstract: A composition for forming a film capable of effectively functioning as a resist underlayer film exhibiting resistance to a solvent in a composition for forming a resist film serving as an upper layer, favorable etching property to a fluorine-containing gas, and favorable lithographic property.

Abstract: A method of manufacturing a tubular member for an exhaust gas treatment device according to at least one embodiment of the present invention, the tubular member including a tubular main body made of a metal and an insulating layer formed on at least an inner peripheral surface of the tubular main body, the insulating layer containing glass, includes steps of: forming a coating film by spraying a coating liquid for insulating layer formation onto the inner peripheral surface of the tubular main body; and firing the coating film to obtain the insulating layer. The spraying is performed while the tubular main body is rotated with a length direction thereof being a rotation axis.

Abstract: A film-forming composition includes a solvent and hydrolysis condensate prepared through hydrolysis and condensation of a hydrolyzable silane compound by using an acidic compound containing two or more acidic groups. The hydrolyzable silane compound contains an amino-group-containing silane with formula (1). R1 is an organic group containing an amino group. R2 is a substitutable alkyl, substitutable aryl, substitutable aralkyl, substitutable halogenated alkyl, substitutable halogenated aryl, substitutable halogenated aralkyl, substitutable alkoxyalkyl, substitutable alkoxyaryl, substitutable alkoxyaralkyl, or substitutable alkenyl group, or an organic group containing an epoxy, acryloyl, methacryloyl, mercapto, or a cyano group. R3 is an alkoxy, aralkyloxy, or acyloxy group or halogen atom. a is an integer of 1 or 2, b of 0 or 1; and a and b satisfy a relation of a+b?2.

Abstract: A film-forming composition for forming a resist underlayer film for a solvent development type resist that is capable of forming a good resist pattern which contains a hydrolysis-condensation product of a hydrolyzable silane compound, at least one substance that is selected from the group consisting of an aminoplast crosslinking agent and a phenoplast crosslinking agent, and a solvent, and wherein the hydrolyzable silane compound contains a hydrolyzable silane represented by formula (1).

Abstract: Provided is an acoustic signal encoding method capable of encoding an acoustic signal having a large number of channels at a sufficient bit rate. In this acoustic signal encoding method, the acoustic signal of a plurality of channels are encoded by executing encoding device. Firstly, the masking threshold corresponding to the spatial masking effect of hearing is calculated. Then, the amount of information for allocating the acoustic signal of the plurality of channels to each channel is determined by the calculated masking threshold. Then, the acoustic signal of the plurality of channels are encoded with the amount of information allocated to each. This makes it possible to encode the acoustic signal of the plurality of channels at a sufficient bit rate.

Abstract: A method of manufacturing a tubular member for an exhaust gas treatment device according to at least one embodiment of the present invention, the tubular member including a tubular main body made of a metal and an insulating layer formed on at least an inner peripheral surface of the tubular main body, the insulating layer containing glass, includes steps of: forming a coating film by bringing a coating liquid for insulating layer formation supplied to the tubular main body into contact with a contact member; and firing the coating film to obtain the insulating layer.

Abstract: A method of manufacturing a tubular member for an exhaust gas treatment device according to at least one embodiment of the present invention, the tubular member including a tubular main body made of a metal and an insulating layer formed on at least an inner peripheral surface of the tubular main body, the insulating layer containing glass, includes steps of: forming a coating film by spraying a coating liquid for insulating layer formation onto the inner peripheral surface of the tubular main body; and firing the coating film to obtain the insulating layer. The spraying is performed while the tubular main body is rotated with a length direction thereof being a rotation axis.

Abstract: There is provided a check valve capable of effectively suppressing the generation of chattering. The check valve includes: a housing including an inlet channel, a valve chest, and an outlet channel; a seat member provided around the inlet channel, the seat member including a seat portion; a valve element pressed against the seat portion to close the inlet channel; a biasing member configured to push the valve element toward a valve seat; a guide portion provided at the housing and configured to guide the valve element when the valve element moves in an axial direction; and a damper chamber communicating with the valve chest through a space between the valve element and the guide portion, the damper chamber being configured to attenuate axial moving force of the valve element. The biasing member is arranged in the valve chest.

Abstract: A composition with which collapse and roughness of a resist pattern can be ameliorated and the etching resistance can be improved by metallizing a resist in the resist pattern and a resist pattern metallization method using the composition. A composition for a resist pattern metallization process, including a component (A): at least one selected from the group consisting of a metal oxide (a1), a hydrolyzable silane compound (a2), a hydrolysate (a3) of the hydrolyzable silane compound, and a hydrolysis condensate (a4) of the hydrolyzable silane compound, a component (B): an acid compound containing no carboxylic acid group (—COOH), and a component (C): an aqueous solvent, and a resist pattern metallization method for providing a resist pattern in which the composition components have permeated into a resist using the composition.

Abstract: A film-forming composition including one selected from among a hydrolyzable silane compound, a hydrolysate of the compound, and a hydrolysis condensate of the compound, and a solvent, the film-forming composition wherein: the hydrolyzable silane compound contains a hydrolyzable silane having a cyano group in the molecule and being of the following Formula (1): R1aR2bSi(R3)4?(a+b)??(1) (wherein R1 is a group bonded to a silicon atom and is an organic group containing a cyano group; R2 is a group bonded to a silicon atom via an Si—C bond, and is each independently a substitutable alkyl group, etc.; R3 is a group or atom bonded to a silicon atom, and is each independently a hydroxy group, an alkoxy group, an aralkyloxy group, an acyloxy group, or a halogen atom; a is an integer of 1; b is an integer of 0 to 2; and a+b is an integer of 1 to 3).

Abstract: A film-forming composition is suitable as a resist underlayer film-forming composition capable of forming a resist underlayer film that exhibits favorable adhesion to an EUV resist and favorable etching processability. A film-forming composition includes: a hydrolysis condensate (A) of a hydrolyzable silane compound produced in the presence of a basic hydrolysis catalyst; a hydrolysis condensate (B) of a hydrolyzable silane compound produced in the presence of an acidic hydrolysis catalyst; and a solvent.

Abstract: There is provided a check valve capable of effectively suppressing the generation of chattering. The check valve includes: a housing including an inlet channel, a valve chest, and an outlet channel; a seat member provided around the inlet channel, the seat member including a seat portion; a valve element pressed against the seat portion to close the inlet channel; a biasing member configured to push the valve element toward a valve seat; a guide portion provided at the housing and configured to guide the valve element when the valve element moves in an axial direction; and a damper chamber communicating with the valve chest through a space between the valve element and the guide portion, the damper chamber being configured to attenuate axial moving force of the valve element. The biasing member is arranged in the valve chest.

Abstract: A glass ball safety valve includes: a housing including a valve passage connecting a first and second port; a valve element provided in the housing so as to close the passage, the element being movable in an open direction so as to open the passage; a biasing spring configured to bias the element in the open direction; a glass ball provided in the housing so as to support the element against biasing force of the biasing spring with a space between the element and the housing in the open direction, the glass ball including a longitudinal-direction intermediate portion that breaks at a predetermined temperature, the glass ball in a broken state allowing a movement of the valve element in the open direction; and a holding body provided in the housing and holding at least one of a first longitudinal-direction end-side portion and second longitudinal-direction end-side portion of the glass ball.

Abstract: A check valve capable of being reduced in size and suppressing the generation of chattering, including: a seat member arranged at a channel of a fluid including a large-diameter portion, small-diameter portion, and seat portion, the large and small-diameter portions provided at an inner periphery of the seat member, the seat portion provided between the large and small-diameter portions; a valve element pressed against the seat portion to close the channel; and a casing including a valve chest accommodating the valve element so the valve element is movable in an axial direction. The large-diameter portion has an inner diameter larger than an outer diameter of the valve element which enters in the axial direction. A space through which fluid flows is formed between the large-diameter portion and the valve element. The diameter of the large-diameter portion is equal to or less than 1.2 times the diameter of the valve element.

Abstract: A pressure regulator valve includes: a housing including a base, a cover, and a body; a valve element configured to open and close a valve passage by moving between a closed position and an open position, the valve element being further configured to reduce a primary pressure to a secondary pressure and receive the secondary pressure by which the valve element moves toward the closed position; a biasing unit accommodated in an accommodating space formed between the body and the cover, the biasing unit being configured to bias the valve element such that the valve element moves toward the open position; a first sealing member provided at a gap between the base and the body; and a second sealing member provided a gap between the base and the cover and made of synthetic rubber. The second sealing member is arranged away from the body.

Abstract: A glass ball safety valve includes: a housing including a valve passage connecting a first and second port; a valve element provided in the housing so as to close the passage, the element being movable in an open direction so as to open the passage; a biasing spring configured to bias the element in the open direction; a glass ball provided in the housing so as to support the element against biasing force of the biasing spring with a space between the element and the housing in the open direction, the glass ball including a longitudinal-direction intermediate portion that breaks at a predetermined temperature, the glass ball in a broken state allowing a movement of the valve element in the open direction; and a holding body provided in the housing and holding at least one of a first longitudinal-direction end-side portion and second longitudinal-direction end-side portion of the glass ball.

Abstract: A pressure regulator valve includes: a housing including a base, a cover, and a body; a valve element configured to open and close a valve passage by moving between a closed position and an open position, the valve element being further configured to reduce a primary pressure to a secondary pressure and receive the secondary pressure by which the valve element moves toward the closed position; a biasing unit accommodated in an accommodating space formed between the body and the cover, the biasing unit being configured to bias the valve element such that the valve element moves toward the open position; a first sealing member provided at a gap between the base and the body; and a second sealing member provided a gap between the base and the cover and made of synthetic rubber. The second sealing member is arranged away from the body.