Abstract: In a columnar-shaped magnetic marker including a magnet formed by dispersing a magnetic powder of iron oxide in a polymer material and to be laid in a road without being accommodated in a metal container, one end face of an outer peripheral surface and an entire outer peripheral side surface of magnet are covered with metal foil forming a conductive layer, and an RFID tag which performs wireless communication with a tag reader mounted on a vehicle side is arranged on the end face of magnetic marker provided with metal foil as being in a state of being electrically insulated from metal foil.

Abstract: In a columnar-shaped magnetic marker including a magnet formed by dispersing a magnetic powder of iron oxide in a polymer material and to be laid in a road without being accommodated in a metal container, one end face of an outer peripheral surface and an entire outer peripheral side surface of magnet are covered with metal foil forming a conductive layer, and an RFID tag which performs wireless communication with a tag reader mounted on a vehicle side is arranged on the end face of magnetic marker provided with metal foil as being in a state of being electrically insulated from metal foil.

Abstract: Provided is a rotary machine in which the output of a magnetic sensor is hardly lowered even if the rotation speed of a rotor becomes high. The rotary machine includes a rotor, a housing, a magnet, and a magnetic sensor. The rotor axially rotates around a rotation axis. The housing is formed of a conductive material and contains the rotor. The magnet is attached to the rotor such that an arrangement direction of a pair of magnetic poles is in a radial direction of the rotor. The magnetic sensor is attached to the housing. The magnetic sensor detects a time variation of a magnetic field generated from the magnet to detect the rotation speed of the rotor. The magnetic sensor is located on the outside than the magnet in the radial direction. The magnetism sensing direction of the magnetic sensor is orthogonal to the radial direction.

Abstract: Provided is a rotary machine in which the output of a magnetic sensor is hardly lowered even if the rotation speed of a rotor becomes high. The rotary machine includes a rotor, a housing, a magnet, and a magnetic sensor. The rotor axially rotates around a rotation axis. The housing is formed of a conductive material and contains the rotor. The magnet is attached to the rotor such that an arrangement direction of a pair of magnetic poles is in a radial direction of the rotor. The magnetic sensor is attached to the housing. The magnetic sensor detects a time variation of a magnetic field generated from the magnet to detect the rotation speed of the rotor. The magnetic sensor is located on the outside than the magnet in the radial direction. The magnetism sensing direction of the magnetic sensor is orthogonal to the radial direction.

Abstract: A method for etching an organic film 1 having a surface selectively protected by a hard mask layer 2, includes a partial etching process of etching the organic film 1 partly in a thickness direction of the organic film 1 by using a mixed gas containing a gas that anisotropically etches a silicon oxide film and a gas that isotropically etches the organic film without etching the silicon oxide film; and a deposition process of depositing a protective film 3 made of the silicon oxide film on side surfaces 12 and a bottom surface 11 of a recess 10 formed in the organic film in the partial etching process. The partial etching process and the deposition process is alternately performed multiple times.

Abstract: A method for etching an organic film 1 having a surface selectively protected by a hard mask layer 2, includes a partial etching process of etching the organic film 1 partly in a thickness direction of the organic film 1 by using a mixed gas containing a gas that anisotropically etches a silicon oxide film and a gas that isotropically etches the organic film without etching the silicon oxide film; and a deposition process of depositing a protective film 3 made of the silicon oxide film on side surfaces 12 and a bottom surface 11 of a recess 10 formed in the organic film in the partial etching process. The partial etching process and the deposition process is alternately performed multiple times.