Patents by Inventor Koen J J M Zaal

Koen J J M Zaal has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Patent number: 7012264
    Abstract: A lithographic apparatus is provided. The apparatus includes an illumination system that conditions a beam of radiation, an article support member that supports an article to be placed in a beam path of the beam of radiation on the article support, and a movable carriage for moving the article support member. The carriage includes a compartmented composite structure provided with a non-composite mounting interface and/or cooling interface With such an arrangement, conventional interfacing using, for example metal or ceramic materials, can be applied in combination with the advantages of composite structures, such as a low specific weight, a high Young's modulus at places and directions where required, high strength, high stability, and high electrical resistivity.
    Type: Grant
    Filed: June 4, 2004
    Date of Patent: March 14, 2006
    Assignee: ASML Netherlands B.V.
    Inventors: Martinus Arnoldus Henricus Terken, Hernes Jacobs, Harmen Klaas Van Der Schoot, Petrus M H Vosters, Koen J J M Zaal
  • Lithographic apparatus and device manufacturing method
    Publication number: 20050269525
    Abstract: A lithographic apparatus is provided. The apparatus includes an illumination system that conditions a beam of radiation, an article support member that supports an article to be placed in a beam path of the beam of radiation on the article support, and a movable carriage for moving the article support member. The carriage includes a compartmented composite structure provided with a non-composite mounting interface and/or cooling interface With such an arrangement, conventional interfacing using, for example metal or ceramic materials, can be applied in combination with the advantages of composite structures, such as a low specific weight, a high Young's modulus at places and directions where required, high strength, high stability, and high electrical resistivity.
    Type: Application
    Filed: June 4, 2004
    Publication date: December 8, 2005
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Martinus Arnoldus Henricus Terken, Hernes Jacobs, Harmen Klaas Van Der Schoot, Petrus M. H. Vosters, Koen J. J. M. Zaal