Patents by Inventor Kofi Afoiabi MAKINWA

Kofi Afoiabi MAKINWA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MEASUREMENT SUBSTRATE AND A MEASUREMENT METHOD
    Publication number: 20180340767
    Abstract: A measurement substrate for measuring a condition pertaining in an apparatus for processing production substrates during operation thereof, the measurement substrate including: a body having dimensions compatible with the apparatus; a plurality of sensor modules embedded in the body, each sensor module having: a sensor configured generate an analog measurement signal, an analog to digital converter to generate digital measurement information from the analog measurement signal, and a module controller configured to output the digital measurement information; and a central control module configured to receive the digital measurement information from each of the module controllers and to communicate the digital measurement information to an external device.
    Type: Application
    Filed: November 23, 2016
    Publication date: November 29, 2018
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Stoyan NIHTIANOV, Ruud Hendrikus Martinus Johannes BLOKS, Johannes Paul Marie DE LA ROSETTE, Thibault Simon Mathieu LAURENT, Kofi Afoiabi MAKINWA, Jacobus NEEFS, Johannes Petrus Martinus Bernardus VERMEULEN